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    • 77. 发明专利
    • METHOD AND DEVICE FOR INSPECTING SUPERCONDUCTING OXIDE FILM
    • JPH05149720A
    • 1993-06-15
    • JP31508991
    • 1991-11-29
    • KOKUSAI CHODENDO SANGYO GIJUTSHITACHI LTD
    • HIGASHIYAMA KAZUHISAHIRABAYASHI IZUMIMORISHITA TADATAKATANAKA SHOJI
    • G01B11/06G01B11/30H01L39/00H01L39/24
    • PURPOSE:To measure the forming speed, thickness, and surface smoothness of a superconducting oxide film by irradiating the film with a laser beam while the film is formed on a substrate and measuring the intensity of reflected light from the irradiated section of the film. CONSTITUTION:When a superconducting oxide film 20 formed on a substrate 5 is irradiated with a laser beam 25 having a wavelength lambda, a phase difference delta is produced between a reflected beam 26 form the upper surface of the film 20 and another reflected beam 27 from the lower surface of the film 20. The difference can be expressed by delta=2pi/lambda1.2nd.Cosx+ or -pi, where lambda1, (n), (d), and (x) respectively represent the wavelength of the laser beams 25, refractive index of the film 20, thickness of the film 20, and incident angle of the laser beam 25 in the film 20. It can be understood from the expression that the film thickness (d) at which the intensities of the reflected beams become maximum and minimum are proportional to 1/4 of the wavelength of the laser beam. Therefore, when each peak value is detected, the film thickness (d) and film forming speed can be found. In addition, as the film thickness (d) increases, the vibrational amplitudes of the reflected beams become smaller and the value of a base line decreases. Since the light absorbing amount of the film 25 is a function of the film thickness, the surface smoothness of the film 25 can be found from the intensity reducing speeds of the reflected beams by calculating the function.