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61. 发明专利

JP3869319B2 Target and method of manufacturing the X-ray tube 有权
公开(公告)号：JP3869319B2
公开(公告)日：2007-01-17
申请号：JP2002179983
申请日：2002-06-20
申请人：正海安藤 , 株式会社リガク , 独立行政法人物質・材料研究機構
发明人：尚久大坂 , 茂樹大谷 , 正海安藤 , 勝栗林 , 雅弘野々口
IPC分类号： C04B41/88 , H01J35/08 , C04B35/50 , H01J9/14
摘要： PROBLEM TO BE SOLVED: To provide a practical target of an X-ray tube capable of generating a characteristic X-ray of lanthanoid with sufficient intensity, and to provide its manufacturing method. SOLUTION: A substance prepared by infiltrating copper into a sintered compact of a boride or a carbide of lanthanoid is used as an X-ray generation material. For instance, a material prepared by impregnating copper into a sintered body of lanthanum hexaboride is used. As its manufacturing method, first a void 14 is formed in a block 12 of copper, and the sintered compact 10 of lanthanum hexaboride is disposed in the void 14. The copper block 12 is put into a capsule 18 of stainless steel and thereafter heated to a temperature above the melting point of copper in a pressurized atmosphere to melt the copper block 12. Thereby, copper is infiltrated into the sintered compact 10. Thereafter a flake 50 is sliced off the sintered compact 10 and bonded to the target 62 of an X-ray tube. COPYRIGHT: (C)2004,JPO

62. 发明专利

JP2006528830A 审中-公开
公开(公告)号：JP2006528830A
公开(公告)日：2006-12-21
申请号：JP2006521781
申请日：2004-07-24
IPC分类号： H01J9/14 , H01J37/26 , H01J9/18 , H01J37/12 , H01J37/28

63. 发明专利

JP3849498B2 Defect correction method of defect correction device and a stencil mask of the stencil mask 有权
公开(公告)号：JP3849498B2
公开(公告)日：2006-11-22
申请号：JP2001348559
申请日：2001-11-14
申请人：ソニー株式会社
发明人：和也岩瀬
IPC分类号： H01L21/027 , G03F1/20 , G03F1/72 , G03F1/74 , H01J9/14 , H01J37/244 , H01J37/28 , H01J37/317

64. 发明专利

JP2006524420A Molybdenum alloy x-ray target having a uniform grain structure 有权
公开(公告)号：JP2006524420A
公开(公告)日：2006-10-26
申请号：JP2006510047
申请日：2004-04-15
申请人：ハーツェーシュタルクインコーポレイテッドH.C. Starck, Inc.
发明人：ギレゲーアハルト , デイリージェイムズ , ハートジョーゼフ , レモンブラッド , カマープラバット
IPC分类号： H01J9/14 , B21C23/01 , B21J5/00 , B22F3/16 , C22B34/34 , C22C1/02 , C22C32/00 , C22F1/18 , H01J35/08
CPC分类号： C22B34/34 , B21C23/001 , B21C23/01 , B21J1/025 , B21J5/00 , B22F3/16 , B22F3/162 , B22F3/24 , B22F2003/248 , B22F2998/00 , B22F2998/10 , C22C1/02 , C22C1/1094 , C22C27/04 , C22C32/0031 , C22F1/18 , C23C14/3414 , H01J2235/081 , H05H6/00 , B22F9/24 , B22F3/20 , B22F3/17
摘要：本発明は、横方向に作業されたモリブデンプレートの製造方法に関し、以下の工程からなる。（ａ）モリブデン酸アンモニウムを還元し、モリブデン金属粉末を形成し、（ｂ）モリブデン金属粉末および合金成分からなるモリブデン成分を団結し、第１加工品を形成し、合金成分がチタン、ジルコニウム、ハフニウム、炭素、酸化ランタンおよびこれらの組合せ物からなる群から選択される、（ｃ）第１加工品を熱処理し、加工品に第１方向に熱機械的力を作用し、これにより第２加工品を形成し、（ｄ）第２加工品を熱処理し、第２加工品に第１方向と異なる第２方向に熱機械的力を作用し、（ｅ）熱機械的に処理された第２加工品を再結晶熱処理工程で処理し、これにより熱処理され、横方向に作業された加工品を形成し、（ｆ）熱処理され、横方向に作業された加工品をスライス工程または機械処理工程で処理し、これにより横方向に作業されたモリブデンプレートを形成する。本発明は更に前記方法から製造されたＸ線ターゲットに関する。

65. 发明专利

JP3827708B2 Static electricity removal device using the soft x-ray 有权
公开(公告)号：JP3827708B2
公开(公告)日：2006-09-27
申请号：JP2005507781
申请日：2003-10-02
申请人：スンチェ・ハイテック・カンパニー・リミテッド
发明人：ドン−ホーン・イ
IPC分类号： H05F3/06 , H01J9/14 , H01J35/00 , H01J35/08 , H01J35/18 , H01T23/00
CPC分类号： H05F3/06

66. 发明专利

JP3820844B2 失效
公开(公告)号：JP3820844B2
公开(公告)日：2006-09-13
申请号：JP2000167668
申请日：2000-06-05
IPC分类号： C23F1/00 , H01J9/14

67. 发明专利

JP3814926B2 失效
公开(公告)号：JP3814926B2
公开(公告)日：2006-08-30
申请号：JP8551697
申请日：1997-03-21
IPC分类号： G03F7/004 , C08F2/44 , C08F2/46 , C09D4/02 , G03F7/027 , G03F7/028 , H01J9/14 , H01J9/227 , H01J11/42 , H01J17/04

68. 发明专利

JP2006221981A PROBE FOR PROCESSING AND PROCESSING DEVICE, AND METHOD OF MANUFACTURING PROBE FOR PROCESSING 审中-公开
公开(公告)号：JP2006221981A
公开(公告)日：2006-08-24
申请号：JP2005034731
申请日：2005-02-10
申请人： SII NANOTECHNOLOGY INC
发明人： ADACHI TATSUYA , MINAFUJI TAKASHI
IPC分类号： H01J37/30 , G01Q70/14 , G01Q70/16 , G01Q80/00 , G01Q90/00 , H01J9/14
摘要： PROBLEM TO BE SOLVED: To provide a prove for processing which has a processing needle of a prescribed shape at the top end, and can maintain a constant quality always. SOLUTION: This is a method of manufacturing a probe for processing 2 which has a cantilever 10 arranged opposed to a sample and a processing needle 11 which is provided at the top end of the cantilever 10 in a state opposed to the sample and capable of contacting the surface of the sample and of which top end is sharpened. The manufacturing method comprises a selection process in which a diamond piece which has a size to meet the tip dimension of the cantilever 10 and has a projection is selected from a plurality of diamond pieces, a transfer process to move the selected diamond piece on the processing table after the selection process, and a processing process in which, after the transfer process, the projection is etching-processed by focusing beams so as to be sharpened into a given shape and by installing the base end side of the projection to the top end of the cantilever 10 by utilizing the focusing beams, the processing needle 11 is manufactured. COPYRIGHT: (C)2006,JPO&NCIPI

69. 发明专利

JP2006208084A Inspection device for irregularities in cyclic pattern 有权
标题翻译：循环模式中的不正确检查装置
公开(公告)号：JP2006208084A
公开(公告)日：2006-08-10
申请号：JP2005018325
申请日：2005-01-26
申请人： Toppan Printing Co Ltd , 凸版印刷株式会社
发明人： INAMURA TAKASHI , GUNJIMA MASASHI , TANIZAWA KEIICHI
IPC分类号： G01N21/956 , G01M11/00 , H01J9/14 , H01J9/42
摘要： PROBLEM TO BE SOLVED: To provide an inspection device for detecting irregularities with stability and high accuracy imaging/detecting stripe-like irregularities that appear in a cyclical pattern.
SOLUTION: This irregularity inspection device is equipped with an XY stage 21, equipped with a movement mechanism for moving a substrate in the X-axis direction and the Y-axis direction, respectively, in a two-dimensional planar visual field, while horizontally holding the substrate; four light sources 11A to 11D for separately providing obliquely transmitted illumination for the cyclic pattern on the substrate; an imaging means 31, disposed on the opposite side of the light sources with the XY stage in between for imaging diffracted light on the periodic pattern given the transmitted illumination; movement means 13 for separately making the respective light sources move relative to the substrate in the visual field; attitude changing means 12 for changing the directions of the light sources, in conjunction with the movement means 13 so that oblique transmitted light from the light sources falls on the periodic pattern, when the light sources are moved; and optical-condition four-axes setting means 40a to 40c for severally setting the motions of the movement means and the changing means so that the incident angles of the transmitted illumination given by the light sources change relative to the periodic pattern.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于以稳定性和高精度检测不规则性的检查装置成像/检测以周期性图案出现的条状不规则。
解决方案：该不规则检查装置配备有XY台21，其配备有用于在二维平面视野中分别在X轴方向和Y轴方向上移动基板的移动机构，同时水平地保持基板; 四个光源11A至11D，用于在基板上分别提供用于循环图案的倾斜透射照明; 成像装置31，其设置在具有XY台之间的光源的相对侧上，用于在给定透射照明的周期图案上成像衍射光; 移动装置13，用于在视野中分别使相应的光源相对于基底移动; 姿态改变装置12，用于改变光源的方向，结合移动装置13，使得当光源移动时来自光源的倾斜透射光落在周期性图案上; 以及光学条件四轴设定装置40a〜40c，分别设定移动机构和变更机构的运动，使得由光源发出的透射照射的入射角相对于周期性图案变化。版权所有（C）2006，JPO＆NCIPI

70. 发明专利

JP3758220B2 Method of manufacturing a photosensitive conductive paste and electrode 失效
公开(公告)号：JP3758220B2
公开(公告)日：2006-03-22
申请号：JP30011495
申请日：1995-11-17
申请人：東レ株式会社
发明人：雄一朗井口 , 孝樹正木 , 亜紀子芳村
IPC分类号： C03C3/064 , C03C8/18 , C03C4/14 , H01B1/16 , H01J9/02 , H01J9/14 , H05K1/09 , H05K3/02
CPC分类号： H05K1/092 , H05K3/02

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