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61. 发明专利

JP4761684B2 Broadband ultraviolet catadioptric imaging system 有权
公开(公告)号：JP4761684B2
公开(公告)日：2011-08-31
申请号：JP2001510034
申请日：2000-06-22
申请人：ケーエルエー−テンカーコーポレイション
发明人：ジェイジョセフアームストロング , デイビッドアールシェイファー , ユン−ホーチュアン
IPC分类号： G01B11/30 , G02B17/08 , G01N21/956 , G02B21/00 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/20 , H01L21/027 , H01L21/66
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.

62. 发明专利

JP2011039526A Catadioptric projection objective 审中-公开
标题翻译：目标投影目标
公开(公告)号：JP2011039526A
公开(公告)日：2011-02-24
申请号：JP2010194864
申请日：2010-08-13
申请人： Carl Zeiss Smt Gmbh , カール・ツァイス・エスエムティー・ゲーエムベーハー
发明人： KAMENOV VLADIMIR , EPPLE ALEXANDER , GRUNER TORALF , SCHICKETANZ THOMAS
IPC分类号： G02B17/08 , G02B1/11 , H01L21/027
CPC分类号： G02B17/0892 , G02B1/11 , G02B17/08 , G02B17/0896 , G03F7/70 , G03F7/70225 , G03F7/70275
摘要： PROBLEM TO BE SOLVED: To provide a catadioptric projection objective, a projection aligner, and a method of manufacturing semiconductor components and other fine-structure components. SOLUTION: The catadioptric projection objective for microlithography for imaging an object field in an object plane onto an image field in an image plane includes: a first partial objective imaging the object field onto a first real intermediate image; a second partial objective imaging the first real intermediate image onto a second real intermediate image; and a third partial objective imaging the second intermediate image onto the image field. The second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens. A first folding mirror and a second folding mirror are disposed. At least one surface of the lens of the second partial objective has a reflectivity of less than 0.2%. As an alternative or in addition, all the surfaces of the lenses of the second partial objective are configured such that the deviation from the marginal ray concentricity is greater than or equal to 20°. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供反射折射投影物镜，投射对准器以及制造半导体元件和其它精细结构元件的方法。解决方案：用于将物平面中的物场成像成像平面中的图像场的用于微光刻的反射折射投射物镜包括：将物场成像到第一实际中间图像上的第一部分物镜; 将第一实际中间图像成像到第二实际中间图像上的第二部分目标; 以及第三部分目标将第二中间图像成像到图像场上。第二部分目标是具有恰好一个凹面镜并具有至少一个透镜的反射折射物镜。设置第一折叠镜和第二折叠镜。第二部分物镜的透镜的至少一个表面的反射率小于0.2％。作为替代或另外，第二部分物镜的透镜的所有表面被配置为使得与边缘射线同心度的偏差大于或等于20°。版权所有（C）2011，JPO＆INPIT

64. 发明专利

JP2009216941A Bending variable power optical system 审中-公开
标题翻译：弯曲可变功率光学系统
公开(公告)号：JP2009216941A
公开(公告)日：2009-09-24
申请号：JP2008060149
申请日：2008-03-10
申请人： Tamron Co Ltd , 株式会社タムロン
发明人： KUBOTA TAKASHI
IPC分类号： G02B15/16 , G02B13/18
CPC分类号： G02B15/177 , G02B17/0896
摘要： PROBLEM TO BE SOLVED: To provide a small bending variable power optical system that reduces its error sensitivity and prevents its optical performance degradation. SOLUTION: The first lens group in the bending variable power optical system is composed of a first lens L 1 having a negative power and consisting of a meniscus lens with its concave surface facing the image side, an optical element P to fold the optical path (prism), a second lens L 2 having a negative power with its concave surface facing the object side, and a third lens L 3 having a positive power, all arranged sequentially from the object side. The image side surface of the first lens L 1 is partially in contact with the light incident surface of the optical element P. And the object side surface of the second lens L 2 is partially in contact with the light emission surface of the optical element P. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种减小其误差灵敏度并防止其光学性能降低的小型弯曲可变功率光学系统。解决方案：弯曲可变光学系统中的第一透镜组由具有负光焦度的第一透镜L 1 组成，并且其凹面朝向像侧的弯月形透镜组成，用于折叠光路（棱镜）的光学元件P，其凹面朝向物体侧具有负光焦度的第二透镜L SB <2>和第三透镜L SB < >具有正的功率，全部从物体侧排列顺序。第一透镜L 1的像侧表面部分地与光学元件P的光入射表面接触。另外，第二透镜L的物体侧表面2 部分地与光学元件P的发光表面接触。版权所有（C）2009，JPO＆INPIT

65. 发明专利

JP4311905B2 Optical system 有权
公开(公告)号：JP4311905B2
公开(公告)日：2009-08-12
申请号：JP2002045938
申请日：2002-02-22
申请人：オリンパス株式会社
发明人：英治安田 , 哲生永田 , 公彦西岡 , 健太郎関山
IPC分类号： G02B17/08 , G03B13/06 , G02B3/14 , G02B5/04 , G02B5/10 , G02B5/18 , G02B7/04 , G02B7/10 , G02B13/00 , G02B13/18 , G02B15/00 , G02B15/14 , G02B25/00 , G02B26/08 , G03B21/00 , H04N5/225
CPC分类号： G02B13/004 , G02B3/14 , G02B5/1828 , G02B13/0065 , G02B13/0075 , G02B13/009 , G02B17/0896 , G02B26/0825 , G03B3/10 , G03B2205/0046 , G03B2205/0053
摘要： The invention relates to an optical system or apparatus such as a lens system capable of focus control and a variable-focus lens, which has reduced power consumptions, ensures noiseless operation and fast response and contributes to cost reductions for the reason of simplified structure. Specifically, the invention provides an optical apparatus comprising an element 409 having variable optical properties and an image plane 612. To correct the optical apparatus for movement of the image-formation surface of an optical system 614 in association with a change in the element 409 having variable optical properties, the image plane 612 is placed in the range of movement of the image-formation surface in association with the change in the element having variable optical properties.

66. 发明专利

JP2009086315A Projection optical apparatus 有权
标题翻译：投影光学装置
公开(公告)号：JP2009086315A
公开(公告)日：2009-04-23
申请号：JP2007256283
申请日：2007-09-28
申请人： Ricoh Co Ltd , Ricoh Opt Ind Co Ltd , リコー光学株式会社 , 株式会社リコー
发明人： TAKAURA ATSUSHI , FUJITA KAZUHIRO , ABE KAZUNARI , YAMAKAGE AKIHIRO , NAGASE OSAMU , KONO YOSHITSUGU
IPC分类号： G03B21/00 , G02B17/08
CPC分类号： G03B21/28 , G02B17/08 , G02B17/0896 , G02B26/0833 , G02B27/283 , G03B21/14
摘要： PROBLEM TO BE SOLVED: To provide a projection optical apparatus, capable of preventing deterioration in image quality and of reducing the apparatus in size. SOLUTION: The projection optical apparatus includes a light valve; and a projection optical system, including a first optical system 5 having a transmissive refractive element and a second optical system 3' having a reflective refractive element. An image formed on the light valve is projected by the projection optical system on a projection surface 4. The first optical system 5 is in the first the optical system 5. When the first optical system 5 contains the reflective element, the optical axis is folded both vertically and horizontally, within a range close to the light valve other than it. The first group 5A of the first optical system 5 is contained in a space (dead space), whose lower limit is defined by a lower edge of the second optical system 3', thereby reducing the depth of the apparatus to D1. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够防止图像质量下降和尺寸减小的投影光学装置。
解决方案：投影光学装置包括光阀; 以及包括具有透射折射元件的第一光学系统5和具有反射折射元件的第二光学系统3'的投影光学系统。形成在光阀上的图像由投影光学系统投射在投影表面4上。第一光学系统5处于第一光学系统5中。当第一光学系统5包含反射元件时，光轴被折叠在垂直和水平方向上都在靠近除此之外的光阀的范围内。第一光学系统5的第一组5A被包含在由第二光学系统3'的下边缘限定的下限的空间（死空间）中，从而将装置的深度减小到D1。版权所有（C）2009，JPO＆INPIT

67. 发明专利

JP3792799B2 Optical system and an imaging apparatus using the same having an optical element 失效
公开(公告)号：JP3792799B2
公开(公告)日：2006-07-05
申请号：JP24413996
申请日：1996-08-27
申请人：キヤノン株式会社
发明人：研一木村 , 浩猿渡 , 常文田中 , 健志秋山 , 敬介荒木 , 誠関田 , 則広難波
IPC分类号： G02B7/10 , G02B17/08 , G02B3/00 , G02B15/14 , G02B17/00
CPC分类号： G02B17/086 , G02B15/14 , G02B17/0848 , G02B17/0896

68. 发明专利

JP3625339B2 The zoom optical system and an imaging apparatus using the same 失效
公开(公告)号：JP3625339B2
公开(公告)日：2005-03-02
申请号：JP24414096
申请日：1996-08-27
申请人：キヤノン株式会社
发明人：研一木村 , 浩猿渡 , 常文田中 , 健志秋山 , 敬介荒木 , 誠関田 , 則広難波
IPC分类号： G02B7/10 , G02B15/00 , G02B17/00 , G02B17/08
CPC分类号： G02B17/0896 , G02B17/0848

69. 发明专利

JP2004247947A Optical apparatus 审中-公开
公开(公告)号：JP2004247947A
公开(公告)日：2004-09-02
申请号：JP2003035430
申请日：2003-02-13
申请人： Olympus Corp , オリンパス株式会社
发明人： NISHIOKA KIMIHIKO , SEKIYAMA KENTARO
IPC分类号： G02C7/06 , G02B3/00 , G02B3/08 , G02B3/12 , G02B5/10 , G02B13/00 , G02B13/18 , G02B17/08 , G02B21/36 , G02B23/02 , G02B23/06 , G02B25/00 , G02B26/06 , G02B26/08 , G02B27/00 , G02F1/13 , G03B5/00 , H04N5/225 , H04N5/228 , H04N5/232
CPC分类号： G02B17/0896 , G02B13/0045 , G02B13/0055 , G02B13/006 , G02B13/0065 , G02B13/007 , G02B13/0075 , G02B13/009 , G02B17/08 , G02B21/361 , G02B26/06 , G02B26/0825 , G02B27/0068 , H04N5/2254 , H04N5/23296
摘要： PROBLEM TO BE SOLVED: To provide a small-sized optical apparatus capable of attaining magnification and providing high sharpness of an image even when a magnification ratio is high. SOLUTION: The optical apparatus is provided with an imaging optical system 301 including a variable mirror 409 acting as an optical characteristic variable optical element; and an electronic zoom function of magnifying an image which the imaging optical system 301 records on a recording element such as an imaging element by means of image processing. Changing the ray deflection action of the variable mirror 409 together with revision of an object range corresponding to the image in use optimizes the aberration of the imaging optical system 301. An arithmetic unit 414 and a drive circuit 304 connected to an image processing apparatus 303 control the variable mirror 409 and when the variable mirror 409 applies electronic zooming to the image recorded in the imaging element 408 via a signal processing apparatus 308 and the image processing apparatus 303 and allows a display apparatus 306 to display the resulting image, a thin film 409a forming a reflection face is deformed so as to increase the sharpness of the object image around its center imaged by the imaging element 408. COPYRIGHT: (C)2004,JPO&NCIPI

70. 发明专利

JP3535710B2 Optical element and an optical system using the same 失效
公开(公告)号：JP3535710B2
公开(公告)日：2004-06-07
申请号：JP26935897
申请日：1997-09-16
申请人：キヤノン株式会社
发明人：研一木村 , 浩猿渡 , 常文田中 , 健志秋山 , 敬介荒木 , 道晴荒谷 , 定彦辻 , 則廣難波
IPC分类号： G02B5/18 , G02B17/00 , G02B17/08
CPC分类号： G02B5/1814 , G02B17/0848 , G02B17/086 , G02B17/0896

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