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    • 64. 发明专利
    • Method and apparatus for forming film using plasma in liquid
    • 在液体中使用等离子体形成薄膜的方法和装置
    • JP2011000504A
    • 2011-01-06
    • JP2009143565
    • 2009-06-16
    • Ehime UnivToyota Industries Corp国立大学法人愛媛大学株式会社豊田自動織機
    • OKUDA SHINYAAIDA NOBUHIROSHIMO TOSHIHISANOMURA NOBUFUKUTOYODA HIROMICHI
    • B01J19/08C23C14/00C23C14/34H01L21/285H05H1/24
    • PROBLEM TO BE SOLVED: To provide a method for forming a film containing a solid raw material at a desired ratio without changing film formation conditions drastically, as a method for forming the film using plasma in liquid, in which not only another liquid but also a solid are used as a raw material to form the film on the surface of a substrate.SOLUTION: In the method for forming the film by using plasma in the liquid, at the least the first raw material is deposited on the surface of the substrate Sby sputtering the target Tby the generated plasma through: an arrangement step where a target Tconsisting of the solid including a first raw material, and the substrate Sare arranged to be opposed to each other in the liquid Lwhich includes or does not include a second raw material; a gas-phase space formation step for forming a gas-phase space V, at the least, between the target Tand the substrate Sby supplying a sputtering gas Ginto the liquid L; and a plasma generation step for generating plasma of the sputtering gas Gat the least in the gas-phase space V.
    • 要解决的问题:为了提供一种用于在不改变成膜条件的情况下以期望的比例形成含有固体原料的膜的方法,作为在液体中使用等离子体形成膜的方法,其中不仅使用另一种液体,而且还可以 使用固体作为在基材表面上形成膜的原料。解决方案:在通过在液体中使用等离子体形成膜的方法中,至少将第一原料沉积在基板S的表面上 通过以下步骤溅射靶Tby所产生的等离子体:其中包括第一原料的固体的目标Tc和在包含或不包括第二原料的液体L中彼此相对的基板Sare的布置步骤; 气相空间形成步骤,用于通过向溅射气体提供液体L,至少在目标T和基板S之间形成气相空间V; 以及用于在气相空间V中至少产生溅射气体Gat的等离子体的等离子体产生步骤。
    • 65. 发明专利
    • Film deposition method of amorphous hard carbon film, and film deposition apparatus therefor
    • 非晶硬碳膜的薄膜沉积方法及其膜沉积装置
    • JP2010126734A
    • 2010-06-10
    • JP2008299590
    • 2008-11-25
    • Toyota Industries Corp株式会社豊田自動織機
    • HAYASHI HIDETAKASHIMO TOSHIHISAKUMAGAI KYOKOSHIBATA KENJI
    • C23C16/26C23C8/36C23C16/505C23C16/54H05H1/24
    • PROBLEM TO BE SOLVED: To provide a film deposition method of an amorphous hard carbon film capable of obtaining the amorphous hard carbon film having higher hardness compared with the former, with hydrocarbon-based gas under the atmospheric pressure being raw material thereof, and to provide a film deposition apparatus therefor. SOLUTION: The film deposition method of the amorphous hard carbon film includes a base material holding step of holding a base material to a holding electrode, and a film deposition step of depositing the amorphous hard carbon film on a surface of the base material by applying the AC voltage to an application electrode, generating the glow discharge plasma between an electrode body and surface of the base material, and exhausting exhaust gas while the electrode body having the application electrode is opposite to the holding electrode, raw material gas containing hydrocarbon based gas is fed between the electrode body and the holding electrode, and the DC bias voltage is generated between the electrode body and the holding electrode. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决方案:为了提供能够获得与前者相比具有较高硬度的非晶硬质碳膜的无定形硬碳膜的成膜方法,以大气压下的烃类气体为原料, 并提供一种成膜装置。 解决方案:非晶硬质碳膜的成膜方法包括将基材保持在保持电极上的基材保持工序,以及将非晶硬质碳膜析出在基材的表面上的成膜工序 通过向施加电极施加AC电压,在电极体与基材表面之间产生辉光放电等离子体,并且在具有施加电极的电极体与保持电极相反时排出废气,含有烃的原料气体 在电极体和保持电极之间供给基于气体的气体,并且在电极体与保持电极之间产生直流偏压。 版权所有(C)2010,JPO&INPIT
    • 66. 发明专利
    • In-liquid plasma film deposition method, coating film formed by the same, and in-liquid plasma film deposition apparatus
    • 液体等离子体沉积方法,由其形成的涂膜和液体等离子体膜沉积装置
    • JP2010070782A
    • 2010-04-02
    • JP2008236888
    • 2008-09-16
    • Ehime UnivToyota Industries Corp国立大学法人愛媛大学株式会社豊田自動織機
    • HAYASHI HIDETAKASHIMO TOSHIHISAKUMAGAI KYOKOOKUDA SHINYASHIBATA KENJINOMURA NOBUFUKUTOYODA HIROMICHI
    • C23C16/505C23C16/04
    • PROBLEM TO BE SOLVED: To provide an in-liquid plasma film deposition method in which even a coating film having not only the shape similar to that of a conventional one but also the shape different from the conventional one is obtained by applying the film deposition by masking a base material using the in-liquid plasma, a coating film formed by the same, and an in-liquid plasma film deposition apparatus. SOLUTION: The decomposition component of the raw material is deposited on a surface S 0 to be film-deposited by bringing bubbles B containing plasma therein into contact with the surface S 0 through a mask 2, via an arranging step of arranging a base material S and the mask 2 having a plurality of through-holes to cover the surface S 0 of the base material S in the liquid L containing raw materials, a bubble generating step of generating the bubbles B in the liquid L, and a plasma generating step of generating plasma consisting of the raw material in the bubbles B. A coating film having a form different from the segment form to be formed by conventional vapor phase plasma is obtained depending on the arranged state of the mask 2 in the arranging step. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种液体中的等离子体膜沉积方法,其中即使不仅具有与常规形状类似的形状,而且与通常的形状不同的涂膜也可以通过涂布 通过使用液体内等离子体掩蔽基材的薄膜沉积,由其形成的涂膜以及液晶内等离子体成膜装置。 解决方案:通过使含有等离子体的气泡B与表面S 0 相接触,将原料的分解成分沉积在要沉积的表面S 0 上, SP>通过掩模2,通过布置基材S和具有多个通孔的掩模2的布置步骤来覆盖液体L中的基材S的表面S 0 含有原料的气泡发生步骤,在液体L中产生气泡B的气泡产生步骤以及产生由气泡B中的原料构成的等离子体的等离子体产生步骤。具有不同于待形成的片段形式的涂膜 通过常规的气相等离子体取决于在布置步骤中掩模2的布置状态。 版权所有(C)2010,JPO&INPIT
    • 68. 发明专利
    • Catalyst precursor, catalyst material, and method of producing catalyst
    • 催化剂前体,催化材料和催化剂的生产方法
    • JP2009268961A
    • 2009-11-19
    • JP2008120818
    • 2008-05-06
    • Toyota Industries Corp株式会社豊田自動織機
    • SAGA SHOTASHIMO TOSHIHISAMURAZAKI TAKANORI
    • B01J23/42B01D53/94C01B31/02F01N3/28
    • PROBLEM TO BE SOLVED: To provide a novel catalyst material for removing nitrogen oxides in exhaust, which is prepared by fixing a metal species to a specific solid acid. SOLUTION: The catalyst precursor includes amorphous carbon to which a metal salt of an acidic group has been introduced. The precursor is synthesized by mixing the amorphous carbon to which an acidic group has been introduced with an aqueous solution comprising a metal ion and exchanging the ions. The catalyst material is prepared by reducing the catalyst precursor. The catalyst material is comprised of a micro-support comprising graphene sheets constituting the amorphous carbon, and a catalyst metal produced by reducing the metal ion and being supported by the micro-support. Since the metal ion is supported by the micro-support (graphene sheets) and fixed to the carbon solid acid has a bond with the micro support, the growth of the catalyst metal particles is suppressed, and the catalyst material exhibits excellent NOx reduction activity even in a low temperature range. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种用于去除排气中的氮氧化物的新型催化剂材料,其通过将金属物质固定到特定的固体酸而制备。 解决方案:催化剂前体包括已经引入酸性基团的金属盐的无定形碳。 通过将已经引入了酸性基团的无定形碳与包含金属离子的水溶液混合并交换离子来合成前体。 通过还原催化剂前体制备催化剂材料。 催化剂材料由包含构成无定形碳的石墨烯片的微载体和通过还原金属离子并被微载体支持而生成的催化剂金属构成。 由于金属离子被微支撑体(石墨烯片)支撑并固定在碳固体上,与微载体具有键合,催化剂金属颗粒的生长被抑制,并且催化剂材料甚至表现出优异的NOx还原活性 在低温范围内。 版权所有(C)2010,JPO&INPIT
    • 69. 发明专利
    • Submerged plasma coating apparatus, electrode for submerged plasma, and coating method using submerged plasma
    • 提供的等离子涂层设备,用于等离子体等离子体的电极和使用等离子体的涂覆方法
    • JP2009235559A
    • 2009-10-15
    • JP2008236934
    • 2008-09-16
    • Ehime UnivToyota Industries Corp国立大学法人愛媛大学株式会社豊田自動織機
    • SHIBATA KENJISHIMO TOSHIHISAKUMAGAI KYOKOHAYASHI HIDETAKAOKUDA SHINYANOMURA NOBUFUKUTOYODA HIROMICHI
    • C23C16/505H05H1/24
    • C23C16/509C23C16/26C23C16/4485H01J37/32357
    • PROBLEM TO BE SOLVED: To provide a submerged plasma coating apparatus capable of generating plasma in liquid without using a second electrode as a base, and to provide an electrode for submerged plasma.
      SOLUTION: The submerged plasma coating apparatus has a container 1 that is capable of containing a substrate S and a liquid L that includes raw material, an electrode for submerged plasma 2 that is provided in the container 1, and a power supply apparatus 3 that supplies power to the electrode for submerged plasma 2. The electrode for submerged plasma 2 includes: a main electrode 21 having a discharging end 22; a sub-electrode 26 that faces the discharging end 22 and is also provided between the discharging end 22 and the substrate S, which face each other; and a plasma generator 29 that has a space partitioned off by the surface 22a of the discharging end 22 and the surface 26a of the sub-electrode 26 that faces the surface 22a, and generates plasma in the space by power supplied from the main electrode 21. The plasma generated by the plasma generator 29 is brought into contact with the substrate S, and degradation components of the raw material are deposited on the surface of the substrate S.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供能够在不使用第二电极作为基底的情况下在液体中产生等离子体并且提供用于浸没等离子体的电极的浸没式等离子体涂覆装置。 解决方案:浸没式等离子体涂覆装置具有能够容纳基板S和包含原料的液体L的容器1,设置在容器1中的浸没等离子体2的电极和电源装置 用于浸没等离子体2的电极的电力。3,浸没等离子体电极2的电极包括:具有放电端22的主电极21; 面向排出端22并且还设置在彼此相对的排出端22和基板S之间的子电极26; 以及等离子体发生器29,其具有由排出端22的表面22a和与副表面22a相对的副电极26的表面26a分隔开的空间,并且通过从主电极21供给的电力在该空间中产生等离子体 由等离子体发生器29产生的等离子体与基板S接触,原材料的降解成分沉积在基板S的表面上。(C)2010,JPO&INPIT
    • 70. 发明专利
    • Coating composition, method for producing transparent protective film by using coating composition and organic glass having transparent protective film
    • 涂料组合物,使用涂料组合物生产透明保护膜的方法和具有透明保护膜的有机玻璃
    • JP2009096901A
    • 2009-05-07
    • JP2007270801
    • 2007-10-18
    • Tokyo Institute Of TechnologyToyota Industries Corp国立大学法人東京工業大学株式会社豊田自動織機
    • HAYASHI HIDETAKASHIMO TOSHIHISASAITO REIKO
    • C09D183/16B05D7/24C09D7/12C09D143/04C09D183/14
    • PROBLEM TO BE SOLVED: To provide a new coating composition giving a transparent protective film having high adhesiveness to substrates and high transparency and high hardness, and to provide a method for producing a transparent protective film by using the coating composition, and an organic glass having the transparent protective film.
      SOLUTION: The coating composition comprises a mixture of a raw material polymer containing a transparent polymer having a silyl group and a polysilazane, and a dehydrated solvent for dissolving the raw material polymer. The transparent polymer is physically bonded to the polysilazane between the silyl group and the polysilazane molecule in a state dissolved in the dehydrated solvent. The polysilazane molecule is fixed to the transparent polymer by a physical bond to suppress the macroscopic phase-separation of the transparent polymer and the polysilazane. Accordingly, the transparent protective film obtained from the coating composition has reduced light-scattering caused by silica particles converted from the polysilazane molecule and has high transparency.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种新的涂料组合物,其赋予对基材具有高粘合性和高透明度和高硬度的透明保护膜,并提供通过使用该涂料组合物制备透明保护膜的方法,以及 具有透明保护膜的有机玻璃。 溶液:涂料组合物包含含有具有甲硅烷基的透明聚合物和聚硅氮烷的原料聚合物和用于溶解原料聚合物的脱水溶剂的混合物。 透明聚合物以溶解在脱水溶剂中的状态物理结合到甲硅烷基和聚硅氮烷分子之间的聚硅氮烷。 聚硅氮烷分子通过物理键固定在透明聚合物上,以抑制透明聚合物和聚硅氮烷的宏观相分离。 因此,由涂料组合物得到的透明保护膜具有降低由聚硅氮烷分子转化的二氧化硅粒子引起的光散射,透明性高。 版权所有(C)2009,JPO&INPIT