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61. 发明专利

JP2001027716A OPTICAL WAVEGUIDE DEVICE 失效
公开(公告)号：JP2001027716A
公开(公告)日：2001-01-30
申请号：JP19980599
申请日：1999-07-14
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , HASHIMOTO YOSHIHARU
IPC分类号： G02B6/126
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device having a self-polarizing effect which can extinguish any desired polarization components without causing changes with time. SOLUTION: In the optical waveguide device 10, an optical waveguide 2 formed on a substrate 1 having an electro-optic effect is connected in the input part 2A and output part 2B near the point P or Q with an optical fiber. Light waves of TE modes or TM modes propagating the optical waveguide 2 are extinguished while light of TM modes or TE modes are transmitted.

62. 发明专利

JP2000266951A WAVEGUIDE PASSAGE TYPE POLARIZER AND FORMING METHOD THEREOF 失效
公开(公告)号：JP2000266951A
公开(公告)日：2000-09-29
申请号：JP7090299
申请日：1999-03-16
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： MIYAMA YASUYUKI , SUGAMATA TORU , NAGATA HIROTOSHI
IPC分类号： G02B6/126 , G02B6/13 , G02F1/035
摘要： PROBLEM TO BE SOLVED: To restrain a metal film from peeling from a buffer layer by providing a metal film continuously formed extending over the upper face and/or the bottom face of a stereostructure part and the side parts of the stereostructure part, so as to include a part acting as a polarizer. SOLUTION: A resist pattern is lifted off, and a Ti mask opening a rectangular territory over a light waveguide passage 12 is formed. A buffer layer exposed in the opening part is removed by dry etching, and after exposing the surface of a X base plate 10, the Ti mask is removed by chemical etching, and the X base plate 10 having a buffer layer 14a forming a metal film forming scheduled territory part into a rectangular opening is obtained. Thereafter, photoresist is spread on the whole surface, a resist pattern having a rectangular opening formed so as to include a recessed part therein by photolithography is formed as a polarizer pattern, an Al film as a metal film is formed on the whole surface by a sputtering method, and the resist pattern is removed to obtain a waveguide passage type polarizer provided with the metal film 20a covering a square pillar like recessed part is obtained.

63. 发明专利

JP2000081521A FIXING STRUCTURE OF WAVEGUIDE TYPE ELEMENT 失效
公开(公告)号：JP2000081521A
公开(公告)日：2000-03-21
申请号：JP24938498
申请日：1998-09-03
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , HASHIMOTO YOSHIHIRO , KIUCHI KAZUMASA
IPC分类号： G02B6/122 , G02F1/035
摘要： PROBLEM TO BE SOLVED: To enable a waveguide type element to obtain a stable high frequency characteristic without being affected by the strength of electrical connection with a casing due to the width of a ground electrode. SOLUTION: A notched part 12 is formed in a casing 11 and a modulation electrode and a optical waveguide 2 composed of a signal electrode 3 and the ground electrode 4 are formed in the part of the notched part 12. Here, a substrate 1 is installed and fixed on the casing 11 so that the area where a high frequency electric signal applied on a waveguide type element from the modulation electrode and a light wave guided in the optical waveguide 2 substantially interact each other, is positioned, that is, so that the area of the substantial interaction is not brought in contact with the casing 11.

64. 发明专利

JPH11237593A OPTICAL MODULATOR 失效
公开(公告)号：JPH11237593A
公开(公告)日：1999-08-31
申请号：JP3914398
申请日：1998-02-20
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , HASHIMOTO YOSHIHIRO , KIUCHI KAZUMASA
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an optical modulator capable of executing high speed modulation even when a high frequency amplifier is not used and having excellent DC drift and temperature characteristics. SOLUTION: In the optical modulator provided with a substrate 7 having an electro-optical effect, a Mach-Zehnder type optical waveguide 8 formed on the substrate 7 and at least a pair of electrodes for modulating an optical wave propagated through the waveguide 8 and forming the pair of electrodes by a signal electrdoe 10 and a ground electrode 9, the ratio Wg/Wh of the width Wg of the electrode 9 to the width Wh of the electrode 10 is set up to 1

65. 发明专利

JPH10133158A WAVEGUIDE TYPE OPTICAL MODULATOR 失效
公开(公告)号：JPH10133158A
公开(公告)日：1998-05-22
申请号：JP29010196
申请日：1996-10-31
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , JINRIKI TAKASHI
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To widen an optical modulation band, to obtain impedance matching and to enable driving with a lower voltage by forming optical waveguides and a buffer layer on a substrate having an electro-optic effect and disposing grounding electric field adjustment regions and grounding electric field auxiliary adjustment regions adjacent to these regions between grounding electrodes and the buffer layer. SOLUTION: After patterned Ti is deposited by evaporation on the LiNbO3 substrate 5, the Ti is thermally diffused to form the waveguides 4a, 4b. The SiO2 buffer layer 3 is formed by a sputtering method. The entire surface of a wafer is spin coated in this state with a photoresist and the grounding electric field adjustment regions are exposed on the waveguides by using a photomask and NiCr is deposited by evaporation to form the grounding electric field adjustment regions 2a. In succession, the grounding electric field auxiliary adjustment regions are exposed in contact with the ground electric field adjustment regions 2a by using a photomask and Ti is deposited by evaporation to form the grounding electric field auxiliary adjustment regions 2b. The photoreceptor is thereafter applied with the photoresist over the entire surface of the substrate and signal electrodes 1 and the grounding electrodes 2 are patterned.

66. 发明专利

JP2001296486A MATRIX OPTICAL SWITCH 失效
公开(公告)号：JP2001296486A
公开(公告)日：2001-10-26
申请号：JP2000111795
申请日：2000-04-13
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： YANAGISAWA TSUNEO , SUGAMATA TORU , SAKAMOTO TOSHIHIRO , TAKEMURA YASUHIRO
IPC分类号： G02B26/08 , B81B1/00
摘要： PROBLEM TO BE SOLVED: To provide a matrix optical switch for micromachine having a good response and long service life. SOLUTION: The matrix optical switch consists of a package 32 formed of a top cover 11a having a plurality of notches for forming an input port or an output port and a main body part 12a while holding the outer peripheral surface of an optical fiber end at a peripheral part, and a reflecting mechanism 16. The top cover 11a, main body part 12a, peripheral edge of the end of input side optical fibers 20a-20d, and peripheral edge of the end of output side optical fibers 22a-22h are sealed by a sealing compound 14, and thus a package 32 whose inside is sealed under vacuum is formed.

67. 发明专利

JP2001255501A OPTICAL WAVEGUIDE ELEMENT 失效
公开(公告)号：JP2001255501A
公开(公告)日：2001-09-21
申请号：JP2000064490
申请日：2000-03-09
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , HASHIMOTO YOSHIHIRO
IPC分类号： G02B6/12 , G02F1/03 , G02F1/035 , G02F1/225
摘要： PROBLEM TO BE SOLVED: To provide a new optical waveguide element, having high reliability which will not cause shift of operating point. SOLUTION: A first and a second branched light waveguides 23-1 and 23-2, which constitute an optical waveguide of a Mach-Zehnder type is formed on a surface layer portion of a substrate 21. On a buffer layer 22, a first earth electrode 25-1, a signal electrode 24, and a second earth electrode 25-2 are formed. The second ground electrode 25-2 is divided in the longitudinal direction of the optical waveguide to have a groove part 26 and the electrode for modulation, consisting of a signal electrode 24, thereby the first and second ground electrode 25-1 and 25-2 become symmetrical with respect to the center II-II of the first and second branched light waveguides. Then, the ratio d2/d1 of the intervals d1 and d2 of the first and second branched light waveguide to the signal electrode is 3.5-7.5.

68. 发明专利

JP2000275586A FIXING STRUCTURE FOR OPTICAL WAVEGUIDE ELEMENT 失效
公开(公告)号：JP2000275586A
公开(公告)日：2000-10-06
申请号：JP7764799
申请日：1999-03-23
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , HASHIMOTO YOSHIHIRO , KIUCHI KAZUMASA
IPC分类号： G02F1/03
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure for an optical waveguide element which has sable high-frequency characteristics without being affected by the strength of an electric connection depending upon the width of a ground electrode. SOLUTION: On the reverse surface 11B of a substrate 11, a cut part 12 is formed over the area where a signal electrode 3 and the ground electrode 4 are present. Consequently, the optical waveguide element 15 is fixed to a housing 5 so that the area where a high-frequency electric signal applied to the signal electrode 3 having length C, width (d), and thickness (e) and a light wave guided in an optical waveguide 2 interact with each other is not in direct contact with a housing 5.

69. 发明专利

JPH1152315A OPERATION POINT CONTROL METHOD FOR WAVEGUIDE LIGHT MODULATOR AND WAVEGUIDE LIGHT MODULATOR 失效
公开(公告)号：JPH1152315A
公开(公告)日：1999-02-26
申请号：JP20908197
申请日：1997-08-04
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , ICHIKAWA JUNICHIRO
IPC分类号： G02B6/12 , G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an operation point control method for a waveguide light modulator and the waveguide light modulator capable of performing precise operation point control, without elapsed deviation in an operation point and with a low production cost by a simple manufacturing process. SOLUTION: In the operation point control method of the waveguide light modulator provided with a substrate having an electrooptical effect, a Mach- Zehnder type optical waveguides 2a, 2b formed by doping and thermally diffusing the first substance on this substrate and modulating electrodes 3a, 3b, the second substance having a diffusion coefficient for the substrate larger than the first substance is doped in the vicinity of or just above of at least one side optical waveguide of the Mach-Zehnder type optical waveguides, and the operation point is coarsely adjusted, and only the second substance is thermally diffused 4, and the operation point is finely adjusted. Thus, the operation point of the waveguide light modulator is adjusted to a prescribed value.

70. 发明专利

JPH1048583A WAVEGUIDE TYPE OPTICAL MODULATOR 失效
公开(公告)号：JPH1048583A
公开(公告)日：1998-02-20
申请号：JP20813096
申请日：1996-08-07
申请人： SUMITOMO OSAKA CEMENT CO LTD
发明人： SUGAMATA TORU , MIYAMA YASUYUKI , JINRIKI TAKASHI
IPC分类号： G02F1/035
摘要： PROBLEM TO BE SOLVED: To provide an optical modulator having a wide modulation band, capable of performing impedance matching and driving with a lower voltage by providing electric conductivity having the width of a signal electric field adjusting area larger than the width of a signal electrode and the electric field adjusting area different in the direction of width. SOLUTION: A whole surface of a wafer is coated by spinning. The central part of a signal electric field area 1a is exposed on a waveguide 4a by using a photomask, after forming NiCr film by vacuum deposition, lifted off and the central part of the area 1a is formed. Similarly, after exposing the peripheral part of the area 1a on the waveguide 4a, a Ti film is formed by sputtering, lifted off and the peripheral part of the area 1a is formed. Since the conductivity of NiCr in the central part of the area 1a is higher than that of Ti fitted on the outer side, As to the distribution of the signal electric field, the density of electric field is high in the central part of the electrode and week in the end part. Consequently, interaction between the signal electric field and waveguide light just under the signal electrode and having a Gauss distribution is stregthened and an optical modulator with a lower driving voltage is obtained.

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