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    • 61. 发明专利
    • ULTRAPURE WATER PREPARING APPARATUS
    • JPH0929251A
    • 1997-02-04
    • JP18001895
    • 1995-07-17
    • KURITA WATER IND LTD
    • FURUKAWA MASAHIROKOIZUMI MOTOMU
    • C02F1/44B01D19/00C02F1/20C02F1/32C02F1/42
    • PROBLEM TO BE SOLVED: To efficiently eliminate dissolved oxygen in ultrapure water by arranging a membrane type deaeration device at the rear stage of an ion exchange pure water device in an apparatus wherein the primary pure water is introduced and the water is fed into a subsystem at least with a UV ray irradiation oxidation device and the ion exchange pure water device to obtain an ultrapure water. SOLUTION: In an ultrapure water preparing apparatus for preparing ultrapure water used for cleaning water for semiconductor, the primary pure water obtd. from various pretreatment processes is successively passed through a subtank 11, a pump 12, a heat exchanger 13, a low pressure UV oxidation device 14, an ion exchange device 15, a membrane type deaeration device 16 and an ultrafiltration membrane separation device 17 and the obtd. ultrapure water with extremely low dissolved oxygen is sent to a use point 18. In the membrane type deaeration device 16, water is made to flow on one side of the membrane and another side is evacuated by means of a vacuum pump to permeate dissolved oxygen through the membrane and to transfer the oxygen on the vacuum side for elimination. It is pref. that the degree of vacuum of this deaeration device 16 is regulated to 55-70Torr and the flow rate of gas such as N2 on the vacuum side is regulated to 5-25% of the amt. of water.
    • 62. 发明专利
    • TREATMENT OF WATER
    • JPH0839066A
    • 1996-02-13
    • JP18009794
    • 1994-08-01
    • KURITA WATER IND LTD
    • MISUMI YOSHITERUTSURUMI TAKESHIFURUKAWA MASAHIRO
    • B01D61/58B01D19/00C02F1/20C02F1/44
    • PURPOSE:To markedly enhance the quality of treated water, in treating raw water by subjecting raw water to decarbonation treatment by adding an acid thereto and passing the treated water through reverse osmosis membrane separators arranged in two stages, by adding alkali to the water supplied to the reverse osmosis membrane separators to stagnate the water under an atmosphere cut-off condition. CONSTITUTION:At first, raw water obtained by applying pollutant and chlorine removing pretreatment to city water or recovered water is introduced into a decarbonation column 1 and subjected to decarbonation treatment by an acid added from piping 12. Next, the water is passed through a first RO membrane separator 2 from piping 13 equipped with a pump P and conc. water is drawn out of piping 14 while transmitted water drawn out of piping 15 is introduced into a stagnation tank 3 while alkali is added to the transmitted water to be stagnated for a predetermined time. Thereafter, the water is passed through a second RO membrane separator 4 and transmitted water is drawn out of piping 19 as treated water. As an acid to be added, sulfuric acid or hydrochloric acid is pref. and the addition amt. thereof is controlled so as to adjust the pH of water introduced into the decarbonation tower 1 to about 5.0-6.0.
    • 63. 发明专利
    • MEASURING METHOD FOR PEROXODISULFURIC ACID IN WASTE WATER
    • JPH07333153A
    • 1995-12-22
    • JP12624894
    • 1994-06-08
    • KURITA WATER IND LTD
    • OGOSE TSUTOMUFURUKAWA MASAHIRO
    • G01N31/00G01N21/78G01N31/22
    • PURPOSE:To measure peroxodisulfuric acid in waste water easily and highly accurately in a short time by adding N,N-diethyl-P-phenylene diamine sulfate (DPD) reagent to the waste water for reaction, and measuring the degree of the color development of reaction liquid with a chromatic method. CONSTITUTION:A solenoid valve V1 is opened and the prescribed amount of fume desulfurized waste water in waste water circulation lines 11 and 12 is taken out as test water. This water is, then, supplied to a reaction vessel 4 via piping 13. Thereafter, a solenoid valve V2 is opened and a reaction reagent (composed of phosphate buffer, DPD dilution powder and potassium iodide) in a reaction reagent reservoir 3 is supplied to the vessel 4 on the operation of a reagent charge pump 2 via piping 14 and 15. The water and reagent are agitated with a magnetic stirrer 4A. After the progress of reaction over the preset time (15 to 30 minutes), a solenoid valve V3 is opened, and the color developed reaction liquid in the vessel 4 is made to flow to the circulation cell 6 of a digital colorimeter 5 for chromatic analysis. As the red color development degree of the reaction liquid is proportional to the concentration of peroxodisulfuric acid, measurements can be taken with high accuracy.
    • 64. 发明专利
    • PREPARATION OF SUPER PURE WATER
    • JPH0686976A
    • 1994-03-29
    • JP23928792
    • 1992-09-08
    • KURITA WATER IND LTD
    • FURUKAWA MASAHIRO
    • C02F1/42
    • PURPOSE:To lower Na ion which leaks out of a non-reproducible mixed bed ion exchange apparatus in the secondary pure water preparation process and thus prepare super water with high purity stably and efficiently. CONSTITUTION:After primary pure water is led to pass a mixed bed 23 consisting of strongly acidic cation exchange resin and strongly basic anion exchange resin, the water is led to pass a single bed 22 of strongly acidic cation exchange resin. Consequently, Na ion which leaks by hydrolysis of R-Na due to reproduction defect of the ion exchange resin of the mixed bed in the prior stage and NaOH which leaks due to deficiency of the cleansing of the ion exchange resin of the mixed bed after reproduction are removed by ion exchange in the single bed of the strongly acidic cation exchange resin put in the rear stage of the mixed bed. Pure water with high quality and Na concentration as low as 10ppt or less is stably prepared in this way.
    • 67. 发明专利
    • REMOVAL OF IMPURITY FROM LIQUID
    • JPS60248212A
    • 1985-12-07
    • JP10418184
    • 1984-05-23
    • KURITA WATER IND LTD
    • FURUKAWA MASAHIROTSURUMI TAKESHI
    • B01D37/02G21F9/00G21F9/06G21F9/12
    • PURPOSE:To remove impurities from liquid effectively by feeding powdery ion exchange resin or precoating additive continuously or intermittently in the stage of passing the liquid to be treated. CONSTITUTION:A mixed precoated layer (initial stage precoated layer) 2a consisting of powdery ion exchange resin and precoating additive is formed in the first stage on a filter element 1. Then, the liquid to be treated is fed to the initial stage precoated layer 2a and is passed therethrough. In this stage, the powdery ion exchange resin and/or the precoated additive 5 is(are) supplied continuously or intermittently to form a fresh precoated layer (secondary precoated layer) 2b successively on the initial stage precoated layer 2a. As the result, the surface layer of the precoated layer is renewed. Accordingly, the filtration is not executed by the cake filtration mode but is executed by the standard clogging filtration mode, so the increase of pressure drop is retarded. Therefore, the durability of operation is prolonged, further, suspended materials particularly, colloidal materials, in the initial treating liquid are removed effectively.
    • 69. 发明专利
    • ELECTROMAGNETIC FILTER
    • JPS57180413A
    • 1982-11-06
    • JP6367381
    • 1981-04-27
    • KURITA WATER IND LTD
    • FURUKAWA MASAHIROKURITA EIICHIHATSUTORI RIYOUJIHIROTA MORIYUKI
    • B01D35/06B03C1/034
    • PURPOSE:To obtain high gradient magnetic-flux density and to enhance washing effect, by using cut pieces of wire rods as a filtering material in a magnetic filter for treating waste water, containing magnetic bodies. CONSTITUTION:Filtering materials 4 consisting of cut pieces of wire rods are packed in a filtering tower 1 of an electromagnetic filter. Raw water such as waste water produced in steel industry is introduced from a liquid inlet and outlet port 7 and is filtered through a packed layer of the materials 4 by supplying electric current to an exiting coil 6, provided to the outside of the tower 1, to magnetize the mateial 4. Ferromagnetic SS and paramagnetic SS are captured satisfactorily with the aid of high magnetic-flux-density gradients produced by the concentration of magnetic flux at projected parts of the material 4, because the projected parts are formed by cutting the material 4. Treated water, after removing the SS components, is discharged from a liquid inlet and outlet port 8. Washing operation is performed by feeding reversed washing water to the port 8 to give the materials 4 fluid agitation in order to peel off the SS stuck to the material 4 and discharging the reversed washing water from the port 7.