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61. 发明专利

JPH0391941A WIRE BONDING 失效
公开(公告)号：JPH0391941A
公开(公告)日：1991-04-17
申请号：JP22951889
申请日：1989-09-05
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKAMURA MASAMITSU
IPC分类号： H01L21/607 , H01L21/60
摘要： PURPOSE:To make possible a stable bonding regardless of the direction of a lead and the rigidity of the lead by a method wherein a timing of ultrasonic oscillation and an ultrasonic oscillation output are controlled. CONSTITUTION:A bonding tool 3 is made to vibrate by ultrasonic oscillation means 1, 14 and 15 and after the vibration of this tool 3 becomes a vibration of an amplitude larger than a proper amplitude for a bonding, this tool 3 is made to land on a lead 20b. Moreover, a wire 4 supported by the tool 3 is made to bond on the lead 20b in a state that it is made to vibrate in the proper amplitude. That is, as the tool 3 is landed on the lead 20b in a state that the amplitude of the tool 3 is larger than the proper amplitude for a bonding, the rise of ultrasonic vibration of the tool 3 to the lead 20b becomes infinite and the lead 20b can not follow up the vibration of the tool 3 and performs a relative movement. Thereby, a stable bonding can be made possible regardless of the direction of the lead and the rigidity of the lead.

62. 发明专利

JPH02122638A APPARATUS FOR DETECTING HEIGHT OF BONDING FACE 失效
公开(公告)号：JPH02122638A
公开(公告)日：1990-05-10
申请号：JP27797788
申请日：1988-11-01
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKAMURA MASAMITSU , FUJIWARA KUNIO , ICHIMURA HIDEO
IPC分类号： H01L21/60
摘要： PURPOSE:To always accurately detect a position where a capillary is in contact with a bonding face without erroneous detection due to noise by making constitution wherein by comparing the value stored in a memory device with an output value of a position sensor, a detection signal is generated when an absolute value of the difference between said values reaches a constant value or higher. CONSTITUTION:When a capillary 2 drops, a solenoid 21 is supplied with power, a bonding arm 4 and a swingable arm 16 integrally rotate counterclockwise, and the output voltage V0 of a photoelectric sensor 20 is temporarily stored through a sample and hold circuit 24. When a suction force of the solenoid 21 is lowered and the capillary 2 comes into contact with a bonding face, the capillary 2 stops at the position but the swingable arm 16 further lowers and stops after it has moved by a constant distance. According to displacement of the swingable arm 16, the photoelectric sensor 20 rotates counterclockwise to have its relative position with respect to a light shielding plate 17, and output voltage V of the photoelectric sensor 20 is varied. With voltage V0 compared with the output voltage V of the photoelectric sensor 20 in a comparator circuit 26, a detection signal is output when the absolute value of their difference is a predetermined value DELTAV or lower.

63. 发明专利

JPS63240038A WIRE BONDING DEVICE 失效
公开(公告)号：JPS63240038A
公开(公告)日：1988-10-05
申请号：JP7511587
申请日：1987-03-27
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKAMURA MASAMITSU , ICHIMURA HIDEO
IPC分类号： H01L21/60
摘要： PURPOSE:To make possible the stable formation of a ball and a high-speed bonding by a method wherein a clamper supporting arm is installed in a swingable design independent of a swinging arm and a motor is provided with a cam for swinging a wire clamper supporting arm. CONSTITUTION:A clamper supporting arm 24 is installed in a swingable design independent of a swinging arm of a bonding arm 7 and a motor 13 for driving up and down a capillary is provided with a cam 27 for driving up and down a wire clamper. Accordingly, by moving up and down independently the capillary 6 and the wire clamper 8, a wire can be stably cut when the wire is clamped and cut after the side of a lead frame is bonded regardless of the ascending speed of the capillary 6 and the response characteristics of the clamper 8. Thereby, the length of a tail needed for forming a ball by discharge is kept constantly and a highly reliable and high-productivity wire bonding can be executed.

64. 发明专利

JPS6378542A WIRE CLAMPER 失效
公开(公告)号：JPS6378542A
公开(公告)日：1988-04-08
申请号：JP22277086
申请日：1986-09-20
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKAMURA MASAMITSU , ICHIMURA HIDEO
IPC分类号： H01L21/60
摘要： PURPOSE:To adjust the parallelism of a clamping plate easily with high precision by extending or narrowing a slit between the nose sections of first and second fixed plates by a screw and adjusting the parallelism of the clamping plate. CONSTITUTION:When the opposed angles of clamping plates 6, 7 take a value shown in (a) after assembling a wire clamper, a male screw 15 is screwed to a female screw 14, and a slit 12 is expanded until the clamping plates 6 and 7 are made parallel and the positional relationship of the nose sections 2a, 2b of first and second fixed plates is changed. When the opposed angles of the clamping plates 6, 7 take a value shown in (c), a male screw 16 is screwed to a female screw 13 from the female 14 side together with a washer 17, and the slit 12 is narrowed until the clamping plates 6 and 7 are made parallel and the positional relationship of the nose sections 2a, 2b of the first and second fixed plates is altered. Accordingly, the parallelism of the clamping plates 6, 7 in the longitudinal direction of a wire 5 can be adjusted easily with high accuracy, thus preventing the damage of the wire on clamping, then improving the quality of wire bonding.

65. 发明专利

JPS60244034A ATMOSPHERE FORMING DEVICE FOR WIRE BONDING 失效
公开(公告)号：JPS60244034A
公开(公告)日：1985-12-03
申请号：JP9848484
申请日：1984-05-18
申请人： MITSUBISHI ELECTRIC CORP
发明人： ICHIMURA HIDEO , OKAMURA MASAMITSU
IPC分类号： B23K20/00 , B23K20/14 , B23K20/16 , H01L21/60
摘要： PURPOSE:To maintain the circumferential part of a ball in a reducing or inert atmosphere during the period between the time when the ball is formed and the point of bonding by a method wherein reducing or inert gas is jetted into a cylinder from the side face of the cylindrical cover which is positioned enveloping a capillary. CONSTITUTION:A cylindrical cover 1 is fixed to a bonding head or an X-Y table, it is electrically insulated and constituted in such a manner that it envelopes a capillary 2. A gas sucking hole 3 is provided on the side face of the cylindrical cover 1, gas is injected, and inside the cylindrical cover 1 is maintained in a reducing atmosphere or an inert atmosphere. Accordingly, as the oxidization of the ball 7, which is formed when it is fused by the heat of electric discharge, is prevented and an excellent and stabilized bonding can be performed at all times even when the wire other than a gold wire such as an aluminum wire and a copper wire are used.

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