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    • 62. 发明专利
    • DRIVING DEVICE OF SCANNING MIRROR
    • JPH0682711A
    • 1994-03-25
    • JP23115692
    • 1992-08-31
    • MATSUSHITA ELECTRIC WORKS LTD
    • HORI MASAMINISHIMURA HIROMIKASANO FUMIHIRO
    • G01B11/24G01B11/30G01N21/88G02B26/10
    • PURPOSE:To easily drive a large sized scanning mirror by utilizing interference of a laser beam reflected on a mirror face part. CONSTITUTION:This driving device of a scanning mirror is provided with a magnetism generation part 2 having a coil 2a, and a flat plate shaped scanning mirror 1 which is angularly displaced and driven according to the magnetism of the part 2 generated by electrifying the coil 2a so that the light reflected with a mirror face part 1b is scanned. The scanning mirror 1 is supported with supporting members 1d at both ends capably of being angularly displaced centering around a drive axis 1e connecting both end parts, one face side is formed into a mirror face part 1b, the other face side is formed into a thin film-like permanent magnet 1c of which both sides of the drive axis 1e are magnetized into different poles, the part 2 having the winding axis of coil 2a in the direction meeting at right angles with the drive axis 1e of the mirror 1 is arranged on the other side of the mirror 1 spacedly by a decided distance. Consequently, the mirror 1 is singly driven in the light weighted condition of only forming the thin film-like permanent magnet 1c on the other side, and hence it can be driven by relative small drive force even in case of its large size.
    • 66. 发明专利
    • ELECTROSTATIC RELAY
    • JPH052977A
    • 1993-01-08
    • JP15353791
    • 1991-06-25
    • MATSUSHITA ELECTRIC WORKS LTD
    • SAKAI ATSUSHIAIZAWA KOICHIKAKINOTE KEIJINISHIMURA HIROMIKASANO FUMIHIROAWAI TAKAYOSHI
    • H01H59/00
    • PURPOSE:To accomplish an electrostatic relay of such a structure that its possibility of practical application is not, impaired even in the single mode and that it is easy to secure a requisite and sufficient electrostatic power when a driving voltage is impressed. CONSTITUTION:An electrostatic relay concerned is equipped with a stationary side base 2, which has a stationary contact 21 and a stationary side driving electrode 11, and a movable plate 13 having a movable contact 22 and a movable side driving electrode, wherein such an arrangement is introduced that see-saw motions are possible in the condition the movable plate 13 confronts the stationary side base 2. The movable contact 22 is positioned facing the stationary contact 21 at least on one side viewed from the fulcrum P of the see-saw motions, and the stationary side driving electrode 11 and movable side driving electrode confront on the two sides of the fulcrum P, and at either of these two electrodes, an electret 9 is installed for drawing one side of the movable plate 13 to the stationary side when the driving voltage is out of impression. Thus the see-saw motions are generated in the movable plate 13, wherein the other side of the movable plate 13 is drawn to the stationary side while the driving voltage is impressed on the driving electrodes.
    • 67. 发明专利
    • ELECTROSTATIC RELAY
    • JPH04370622A
    • 1992-12-24
    • JP14897091
    • 1991-06-20
    • MATSUSHITA ELECTRIC WORKS LTD
    • AIZAWA KOICHISAKAI ATSUSHIKAKINOTE KEIJINISHIMURA HIROMIKASANO FUMIHIROAWAI TAKAYOSHI
    • H01H59/00
    • PURPOSE:To obtain a property strong to a thermal shock and to prevent malfunction due to an external electromagnetic field by providing a movable contact and a fixed contact to a movable side base substance and a fixed side base substance which consist of a conductive material, and contacting and separating the contacts by an electrostatic force by applying a voltage between the base substances. CONSTITUTION:A movable contact 2 provided to the rear side of a movable side base substance A, and a fixed contact 3 provided to the front side of a fixed side base substance B are formed opposing each other, and the base substances A and B are contacted through a junction surface D. And by applying a voltage to driving electrodes 16 and 22 of the base substances A and B, the contacts 2 and 3 are contacted by an electrostatic force. The base substances A and B are composed of a silicon single crystal substrate, connected by a gold eutectic method, and the contacts 2 and 3 are insulated from the base substances A and B by insulating membranes 15 and 21. Since the base substances A and B are all of a conductive material in such a way, and the difference of the thermal expansion rate is small, being strong to a thermal shock, and since the section held by the base substances A and B is made in an electric shield section, an error operation by an external electromagnetic field can be prevented.