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61. 发明专利

JPH07169620A MAGNETIC FILM AND MAGNETIC HEAD USING IT 失效
公开(公告)号：JPH07169620A
公开(公告)日：1995-07-04
申请号：JP29834993
申请日：1993-11-29
申请人： HITACHI LTD
发明人： KIRINO FUMIYOSHI , OTOMO MOICHI , KOISO YOSHITSUGU , MORIWAKI HIDETOSHI
IPC分类号： C22C38/00 , C22C38/26 , G11B5/127 , G11B5/23 , H01F10/14
摘要： PURPOSE:To raise the corrosion resistance while securing desired magnetic property by putting the change of saturation magnetic flux density and the coercive force at the time of adding first additive element to a magnetic film and the change of saturation magnetic flux density and the coercive force at the time of adding only the second additive element in such relation as to compensate each other. CONSTITUTION:In a magnetic film, which contains Fe as a main ingredient, Ta in the range from 5atom% to 20atom%, and C in the range from 1atom% to 20atom%, it contains first and second additive elements, and the change of the saturation magnetic flux density and the coercive force at the time of having added only the first additive element to it and the change of the saturation magnetic flux density and the coercive force at the time of having added only the second additive element to it are in the relation of compensating each other. And, the first additive element is at least one kind among Cr, Al, Nb, Mo, and Ru, and the quantity of addition is in the range from 0.5atom% to 8 atom %, and also the second additive element is N.

62. 发明专利

JPH06290942A CORROSION-PROOF ABRASION-RESISTANT MAGNETIC FILM AND MAGNETIC HEAD PROVIDED THEREWITH 失效
公开(公告)号：JPH06290942A
公开(公告)日：1994-10-18
申请号：JP7334793
申请日：1993-03-31
申请人： HITACHI LTD
发明人： OTOMO MOICHI , KOISO YOSHITSUGU , MORIWAKI HIDETOSHI , KIRINO FUMIYOSHI
IPC分类号： C22C45/02 , G11B5/127 , G11B5/23 , G11B5/31 , H01F10/13 , H01F10/14
摘要： PURPOSE:To obtain a magnetic head having a high saturation flux density and excellent soft magnetic properties and resistant to corrosion and abrasion by forming a magnetic film of fine crystal grains represented by a specific composition formula. CONSTITUTION:A magnetic film formed of fine crystal grains represented by a composition formula is formed, wherein T denotes one or more elements selected out Ti, Zr, Hf, Nb, Ta, Mo, and W, C and N are carbon and nitrogen respectively, X denotes one or more elements selected out of Al, Si, Ge, and Ga and Y is one or more elements selected out of Ru, Rh, Pd, Os, Ir, Pt, Cu, Ag, and Au. At this point, a, b, c, d, e, f, and g represent atom% respectively and are so set as to satisfy the following formulas, 65

63. 发明专利

JPH0562127A MAGNETIC HEAD 失效
公开(公告)号：JPH0562127A
公开(公告)日：1993-03-12
申请号：JP22397891
申请日：1991-09-04
申请人： HITACHI LTD
发明人： NAKAMURA HITOSHI , OTOMO MOICHI , KOISO YOSHITSUGU
IPC分类号： G11B5/31
摘要： PURPOSE:To improve the reproduced output of a magnetic head by forming a base film between a substrate and fine crystal precipitation type magnetic film. CONSTITUTION:The substrate and ferromagnetic thin film of this magnetic head are respectively formed of an oxide and fine crystal precipitation type Fe-or Co-based magnetic substance. Then one or more kinds of elements among C, B, Ni, and O and one or more kinds of element among IVa, Va, and VIa groups, Al, and Si are simultaneously added to the fine crystal precipitation type magnetic layer. In addition, an amorphous Fe-or Co-based magnetic alloy is used for the base film formed between the substrate and magnetic film. Therefore, the characteristic of this magnetic head is improved, since the reproduced output of this magnetic head is improved and, at the same time, a contour output lowering effect can be expected.

64. 发明专利

JPH04252006A CORROSION-RESISTANT MAGNETICALLY SOFT FILM AND MAGNETIC HEAD USING THE SAME 失效
公开(公告)号：JPH04252006A
公开(公告)日：1992-09-08
申请号：JP829391
申请日：1991-01-28
申请人： HITACHI LTD
发明人： KOBAYASHI TOSHIO , KOISO YOSHITSUGU , NAKAMURA HITOSHI , OTOMO MOICHI
IPC分类号： C22C19/07 , C22C38/00 , G11B5/127 , G11B5/31 , H01F10/12
摘要： PURPOSE:To enhance a magnetically soft characteristic and to prevent that a substrate or a filling glass is reacted when a magnetic head is manufactured by using a specific corrosion-resistant magnetically soft film as a core for the magnetic head at a magnetic recording apparatus. CONSTITUTION:Cr or Cr and Mo or W are made to exist in a ferromagnetic metal film which simultaneously contains elements selected from Ti, Zr, Hf, V, Nb, Ta, Mo and W and elements selected from B, C, N and O. The magnetic pole of a metal in-gap tape head is manufactured by using the ferromagnetic film. A magnetic core to which a ferromagnetic film 2 having a film thickness of 5mum has been applied is brought face to face with an Mn-Zn ferrite substrate 1; a gap 4 is formed. The length of the gap is at 0.2mum, and a coil 5 is wound on the magnetic core. A glass bonding temperature is set at 520 deg.C when a head is formed; a reaction layer is not formed when the interface between the magnetic film and a filling glass 3 is observed by using an optical microscope.

65. 发明专利

JPH03292705A FERROMAGNETIC FILM AND MAGNET HEAD USING THEREOF 失效
公开(公告)号：JPH03292705A
公开(公告)日：1991-12-24
申请号：JP40564090
申请日：1990-12-25
申请人： HITACHI LTD
发明人： KOBAYASHI TOSHIO , KOISO YOSHITSUGU , NAKAMURA HITOSHI , NAKATANI RYOICHI
IPC分类号： C23C14/06 , C23C14/34 , G11B5/127 , G11B5/147 , G11B5/23 , G11B5/31 , H01F10/12 , H01F10/30 , H01F41/18
摘要： PURPOSE:To obtain a material for magnetic heads which can maintain saturated magnetic flux density and soft magnetic characteristics to a high temperature and has high reaction-resisting property and high corrosion-resisting property by a method wherein an oxide is mixed into ferromagnetic metal. CONSTITUTION:A piece of ferromagnetic metal, mainly composed of Fe and Co, and the targets of a oxide are alternately sputtered on a crystallized glass substrate 1 using an ion beam sputtering device, a laminated film consisting of a ferromagnetic metal layer 2 and an oxide layer 3 is manufactured, and a heat treatment is conducted for an hour in an Ar gas atmosphere. A heat-proof high saturation magnetic flux density film excellently maintains its soft magnetic characteristics at least up to 600 deg.C, and its saturation magnetic flux density is not decreased. Also, not only the soft magnetic film has exceedingly excellent corrosion-resisting property but also the reaction layer such as an oxide and the like is hardly formed on the interface between the magnetic film and ferrite. Accordingly, when the heat-proof high saturation magnetic flux density film is used for the magnetic head of a magnetic recording device, especially, when it is used on a metal-in-gap type magnetic head, a glass bonding operation can be conducted at a high temperature, and a glass layer having sufficient strength can be formed.

66. 发明专利

JPS58123711A PREPARATION OF MAGNETIC BUBBLE MEMORY ELEMENT 失效
公开(公告)号：JPS58123711A
公开(公告)日：1983-07-23
申请号：JP658782
申请日：1982-01-19
申请人： HITACHI LTD
发明人： UMEZAKI HIROSHI , KOYAMA NAOKI , KOISO YOSHITSUGU , SUGITA KEN
IPC分类号： G11C11/14 , H01F41/14 , H01F41/34 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To improve the accuracy of a pattern formed on a film to be etched by tilting the angle of ion incidence and rotating a specimen in the ion milling process. CONSTITUTION:An insulating film 2, a conductor film 3, an insulating film 4, a permalloy film 5, a mask film 6, and a resist film are provided on a substrate 1 and the film 6 is etched with patterns 7, 8 provided on the resist film as a mask. Subsequently, ion milling is conducted to etch the exposed portion on the film 5. At this time, the angle of ion incidence is tilted by 5-30 degrees against the perpendicular direction to the surface of the substrate and the substrate is kept turning. The exposed portion of the film 6 is again etched. Subsequently, the exposed portions of the films 5, 4 and the film 3 under them are removed by the ion milling as in the case of the above process. Finally, the resist 7, 8 and the film 6 are removed.

67. 发明专利

JPS57170510A METHOD OF ION IMPLANTATION 失效
公开(公告)号：JPS57170510A
公开(公告)日：1982-10-20
申请号：JP5555181
申请日：1981-04-15
申请人： HITACHI LTD
发明人： IMURA AKIRA , IKEDA HITOSHI , SUZUKI MAKOTO , KOISO YOSHITSUGU , TAKEUCHI TERUAKI , UMEZAKI HIROSHI , SUGITA KEN
IPC分类号： G11C11/14 , H01F10/24 , H01F41/14 , H01F41/32 , H01F41/34
摘要： PURPOSE:To realize a magnetic bubble memory device whose bubble action margin is fully large in ion implantation by a method wherein bydrogen ion is inplanted via a laminated film adhered on a magnetic garnet film, on a desired part of a surface region of the magnetic garnet film in which magnetic bubles can be held to form here an under-the surface magnetization layer. CONSTITUTION:A magnetic garnet film 4 which can keep magnetic bubbles is formed on a non-magnetic monocrystal baseplate 8 of gallium gadolinium garnet by means of a liquid phase eptixial method, and thereon a laminated film 9 is coated, through which hudrogen ions 3 are implanted on a desired part of the film 4. Then it is annealed to form an under-the-surface magnetization layer in the film 4. The hydrogen ions 3 here are H and H , and the laminated film 9 is SiO2, TiO2, SiO, Al2O3, Si3N4, etc., the thickness of which is selected for 500 to 6,000Angstrom . With this structure, since the film 9 is formed on the film 4, hydrogen ions 3 within the under-the-surface magnetization layer are not flown externally from the film in annealing, avoiding degradation of the under-the-surface anistropy.

68. 发明专利

JPS5522293A MAGNETIC BUBBLE MEMORY ELEMENT 失效
公开(公告)号：JPS5522293A
公开(公告)日：1980-02-16
申请号：JP9591178
申请日：1978-08-07
申请人： HITACHI LTD
发明人： UMEZAKI HIROSHI , TAKAHASHI MASAKI , NISHIDA HIDEKI , YAMADA KOUJI , SUGITA YUTAKA , KANEKO KATSUHIRO , KOISO YOSHITSUGU
IPC分类号： G11C11/14 , G11C19/08 , H01F10/30
摘要： PURPOSE:To reduce the stage error of the soft magnetic substance patern provided on the 2nd insulator film and thus to increase the transfer margin by forming the 2nd insulator film on the electric conductor pattern into the hardened film of the heat-resisting high molecular resin featuring a specified thickness. CONSTITUTION:SiO2 film 7 of 100-400nm thick functioning as the 1st insulator film is provided on the magnetic film such as garnet film 1 which can hold the magnetic bubble provided on the nonmagnetic substrate. Electric conductor pattern 8 is formed on film 7, and then the solution of the heat-resisting high molecular resin such as the polyimide-group resin is coated to obtain hardened 2nd insulator film 9 of 100-1,300nm thick after the thermal treatment. As a result, the stage error on the surface of film 9 caused by pattern 8 is reduced greatly and made flat, and accordingly the stage error can also be reduced greatly for soft magnetic substance pattern 10 which is provided on film 9 and used for detection as well as the bubble transfer.

69. 发明专利

JPH10189334A MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING DEVICE USING THE MEDIUM 失效
公开(公告)号：JPH10189334A
公开(公告)日：1998-07-21
申请号：JP34371096
申请日：1996-12-24
申请人： HITACHI LTD
发明人： KIRINO FUMIYOSHI , INABA NOBUYUKI , KOISO YOSHITSUGU , FUTAMOTO MASAAKI
IPC分类号： G11B5/66 , G11B5/65 , H01F10/12 , H01F10/13 , H01F10/16
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording medium on which very small stable magnetic domains can be formed and can realize a low-noise (high-S/N) state. SOLUTION: A magnetic recording film 4 containing cobalt (Co) as a main component is formed on the surface of a substrate 1. The film 4 contains an amorphous Co phase 4a and the crystalline phase 4b of an intermetallic compound X2 CO7 of an element X having an effect of promoting the magnetic anisotropy of the Co. It is preferable to select at least one kind of element out of a group composed of Sm, Pr, Nd, Eu, Gd, Tb, Dy, Ho, and Er as the element X. Consequently, very small stable magnetic domains are formed in the magnetic recording film 4 and, at the same time, a low-noise (high-S/N) state can be attained. For example, such high-density recording not smaller than 1 Gbit/in can be realized.

70. 发明专利

JPH09326314A SOFT MAGNETIC THIN FILM, AND MAGNETIC HEAD AND MAGNETIC RECORDING DEVICE USING THE SAME 失效
公开(公告)号：JPH09326314A
公开(公告)日：1997-12-16
申请号：JP14396296
申请日：1996-06-06
申请人： HITACHI LTD
发明人： KIRINO FUMIYOSHI , KOISO YOSHITSUGU
IPC分类号： G11B5/31 , G11B5/127 , G11B5/23 , H01F10/14
摘要： PROBLEM TO BE SOLVED: To provide a magnetic film which has good soft magnetic characteristics and is excellent in its thermal stability and anti-corrosion. SOLUTION: The soft magnetic thin film contains Fe as its main component, and also contains at least one selected from the group of Nb, Zr, T a and Hf and also contains an Fe crystalline phase and an nitride crystalline phase. All or part of the nitrogen components forms AlN. The thin film may contain Fe as its main component and consist of fine crystals of at least Fe and AlN. In these soft magnetic thin films, it is preferable that nitrogens in the crystalline phase in the films are present in the form of interstitial solid solution and/or Fe nitrides.

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