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61. 发明专利

JPS6426371A INDUCTIVE PULSE POWER SUPPLY 失效
公开(公告)号：JPS6426371A
公开(公告)日：1989-01-27
申请号：JP18103787
申请日：1987-07-22
申请人： HITACHI LTD
发明人： TOKUYAMA SHUNJI , SUZUKI KOJI , ARITA HIROSHI , KUROSAWA YUKIO
IPC分类号： H05H3/00 , H02M9/04 , H05G1/24 , H05G2/00
摘要： PURPOSE:To perform current limiting breaking in a high speed by using a high temperature superconducting switch as the opening switch. CONSTITUTION:A low speed capacitor C, which is previously charged by a charging device serving as the current source, connects in series a trigger gap TG serving as the starter switch, high temperature superconducting switch SC and a coil L. The coil L connects in series a discharge gap G as a transfer switch and a plasma focus PF of X-rays source or the like as a load discharge tube. Thus the action is obtained such that the trigger gap TG starts to allow an oscillating current to flow in the coil L through the high temperature superconducting switch SC placed in a superconductive condition. When the first wave of this current reaches a peak value, the switch SC is transferred in a high speed to be placed in a normal conductive condition changing into a high resistor, breaking the current to be limited. As the result, pulse high voltage generating across terminals of the coil L, a large pulse current is allowed to flow in the discharge gap G and the plasma focus PF.

62. 发明专利

JPS63316000A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS63316000A
公开(公告)日：1988-12-23
申请号：JP15118687
申请日：1987-06-19
申请人： HITACHI LTD
发明人： SUZUKI KOJI , ARITA HIROSHI , TOKUYAMA SHUNJI , KUROSAWA YUKIO
IPC分类号： G21G4/00 , G21K5/02 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00 , H05G2/00
摘要： PURPOSE:To constitute an X-ray source which is small in size and weight and has high luminance by using a large-capacity capacitor laminated with units in which plural pieces of ceramics capacitors are disposed between three sheets of upper, middle, and lower parallel conductive plates as a plasma X-ray source. CONSTITUTION:The capacitor unit 5 is constituted by disposing plural pieces of the ceramics capacitors 1, 1' between the parallel conductive plates 2, 3, 3'. The units 5 are laminated via insulating plates 7 and reinforcing plates 9 and are housed in a capacitor container 6. A power supply 10, a current rectifier 11 and coaxial cables 12, 13 are respectively so connected as to apply a high potential to the central conductive plate 2 of the units 5 and a low potential to the upper and lower conductive plates 3, 3' and the units 5 are laminated under low insulation, by which the size of the capacitor is reduced and the capacity thereof is increased. The output from this capacitor is connected via a discharge switch 14 to counter electrodes 18, 19.

63. 发明专利

JPS63308896A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS63308896A
公开(公告)日：1988-12-16
申请号：JP14313287
申请日：1987-06-10
申请人： HITACHI LTD
发明人： ARITA HIROSHI , KUROSAWA YUKIO , SUZUKI KOJI , TOKUYAMA SHUNJI
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To strengthen emitted X-rays by using a capacitor bank pinched with multiple ceramic capacitors between parallel conductive plates and arranging a discharging electrode near the parallel conductive plates. CONSTITUTION:Ceramic capacitors 20a... are pinched in sandwiches between multiple conductive plates 21, 21, 22 respectively to form a disk-shaped capacitor bank centering a discharge device 5. A discharge switch 4 is provided near the conductive plates 21, 22 and formed into a coaxial shape to reduce the inductance. When the ceramic capacitors 20a... are discharged, the circuit becomes a distributed constant circuit, and the discharge current wave-form with the quick rising time can be obtained. Since the plasma generated between electrodes 11, 12 can be strongly pinched in a short time according to this constitution, strong X-rays can be obtained.

64. 发明专利

JPS63232251A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS63232251A
公开(公告)日：1988-09-28
申请号：JP6387387
申请日：1987-03-20
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUZUKI KOJI , TOKUYAMA SHUNJI , KUROSAWA YUKIO
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To expand the degree of freedom of selecting the X-ray wavelength by forming a columnar electrode and an electrode to be a coaxial electrode to the columnar electrode placing a specific interval between them. CONSTITUTION:A pulse-form high speed and large current discharge is applied to an electrode couple consisting of a columnar electrode 8 and a cylindrical electrode 10 arranged coaxial with a specific interval from the electrode 8, to generate X-rays. In this case, the electrodes 8 and 10 are formed of a metal which is to be an X-ray emitting material. Since a metal is used as the X-ray generating substance, the X-ray wavelength different from that of a rare gas can be selected, and the degree of freedom of the X-ray wavelength can be expanded.

65. 发明专利

JPS63228554A PLASMA X-RAY GENERATOR 失效
公开(公告)号：JPS63228554A
公开(公告)日：1988-09-22
申请号：JP6094187
申请日：1987-03-18
申请人： HITACHI LTD
发明人： TOKUYAMA SHUNJI , SUZUKI KOJI , ARITA HIROSHI , KUROSAWA YUKIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/02
摘要： PURPOSE:To perform crowbar without fail as well as to aim at improvement in the reliability of a generator, by installing a diode in reversed polarity to the charging polarity of a capacitor. CONSTITUTION:A diode 11 is installed in reversed polarity to the charging polarity of a capacitor 1 in parallel with a plasma generating electrode 3. Voltage and current waveforms of a discharge circuit of the capacitor 1 reverse with the voltage polarity at that point of a discharge current first wave crest value. If the diode 11 is parallely installed in the reversed polarity to the polarity of charging voltage of the condenser in advance, the diode 11 is automatically energized at the time of the current wave crest value, crowbarring the discharge circuit. That is to say, it crowbars synchronously with the current crest value automatically with supply voltage, not resting on electronic circuit control, so that there is no malfunction at all.

66. 发明专利

JPS63213246A X-RAY GENERATOR 失效
公开(公告)号：JPS63213246A
公开(公告)日：1988-09-06
申请号：JP4524687
申请日：1987-03-02
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUZUKI KOJI , KUROSAWA YUKIO , TOKUYAMA SHUNJI
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To make a high speed and large current and a high brightness to be obtained by making a part of a round trip circuit to be a squirrel cage type. CONSTITUTION:An electrode 8 is connected to an end plate 13, and end plates 4 and 13 are connected by plural rods 11. Similarly an electrode 9 is connected to an end plate 14, and end plates 6 and 14 are connected by plural rods 12. Rods 11 and 12 are arranged on the circumference, and are made to a squirrel cage type with end plates 13 and 14. An electric charge of a condenser 2 charged by a high voltage power source 1 is made to be discharged between electrodes 8 and 9 with a discharge switch 3 operated. Thus the inductance of a circuit can be decreased, a high speed and large current and high brightness X-ray can be obtained by making a part of a circuit to be the sqirrel cage type.

67. 发明专利

JPS63102147A X-RAY GENERATOR 失效
公开(公告)号：JPS63102147A
公开(公告)日：1988-05-07
申请号：JP24527486
申请日：1986-10-17
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUGAWARA HIROYUKI , SUZUKI KOJI , KUROSAWA YUKIO
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To perform induced emission of X rays whose wavelength and direc tion are similar to those of incident X rays so that X-ray output of high bright ness can be obtained by disposing plural pairs of other electrodes for X-ray generation on an optical path of X rays generated between a pair of electrodes. CONSTITUTION:Electrodes 6a and 6b are jointed with a terminal plate 8, and electrodes 7a, 7b, and 4 are jointed with an terminal electrode 9, and one end of the electrode 3 and a terminal plate 8 are jointed with a capacitor 2. X rays are generated as follows: electric charges in the capacitor 2 charged by a high-voltage source 1 are discharged between electrodes 3 and 4, 6a and 7a, 6b and 7b by an operation of a trigger electrode 5. Thus, discharging plasma is formed between respective electrodes, and atoms in the plasma become excited. Part of X rays generated from spot plasma formed between the electrodes 3 and 4 become X rays incident to spaces between 6a and 7a, 6b and 7b, and induce a phenomenon of induced emission, so that respective X rays 11a and 11b are generated in the same direction as the incident X rays.

68. 发明专利

JPS63100728A X-RAY STEPPER 失效
公开(公告)号：JPS63100728A
公开(公告)日：1988-05-02
申请号：JP24526786
申请日：1986-10-17
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUGAWARA HIROYUKI , SUZUKI KOJI , KUROSAWA YUKIO
IPC分类号： H05G1/00 , G03F7/20 , H01L21/027 , H01L21/30 , H01S4/00
摘要： PURPOSE:To increase the X-ray brightness of a lithography equipment by a method wherein X-ray laser induction-discharged by means of entering the X-rays into plasma in excited state is led to a semiconductor substrate. CONSTITUTION:The charge of capacitors 2 charged by a high voltage power supply 1 actuates trigger electrodes 5 to be discharged between a pair of electrodes 31-41. Thus, discharged plasma is produced between respective electrodes to bring about an excited state of atoms in plasma. A part of X-rays emitted from spot plasma between the electrodes 31 and 41 become incident x-rays into electrodes 32, 33 inducing induction discharge phenomenon to emit x-rays in the same direction as that of the incident rays so that the induction discharge may take place successively to emit X-rays 9. Finally, the X-rays 9 are picked up on an exposure part through a window 10 to transfer the pattern of a mask 12 on a holder 11 to the Si wafer 13 on an aligner 14. In such a constitution, an X-ray output in high brightness can be generated enabling a fine pattern to be transferred.

69. 发明专利

JPS6388794A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS6388794A
公开(公告)日：1988-04-19
申请号：JP23116886
申请日：1986-10-01
申请人： HITACHI LTD
发明人： KUROSAWA YUKIO , ARITA HIROSHI , SUZUKI KOJI , HIRASAWA KUNIO
IPC分类号： H05G2/00 , G03F7/20 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To reduce a stain of an X-ray pickup window, by connecting a ceramic capacitor to the circuit side of a capacitor bank. CONSTITUTION:A ceramic capacitor 20 receives a stress in the direction to contract the space between poles of the capacitor 20 in the charged condition. When a discharge occurs between electrodes 11 and 12, the stress the ceramic capacitor 20 is receiving is released in a very short time, and the ceramic capacitor 20 is restored to the original condition, when, the ceramic capacitor 20 generates supersonic waves 21. The supersonic waves 21 pass through a circuit 7, reach to a discharge unit 5, and arrive at an X-ray pickup window 15. On the other hand, the evaporated substance from the electrodes 11 and 12 is at the loosely attached condition at a high temperature without losing the temperature at this time. Therefore, such an attached substance at the X-ray pickup window 15 is removed easily by the supersonic oscillation, and the stain there is reduced.

70. 发明专利

JPS6372052A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS6372052A
公开(公告)日：1988-04-01
申请号：JP21392886
申请日：1986-09-12
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUZUKI KOJI , KUROSAWA YUKIO , HIRASAWA KUNIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To obtain a strong X-ray output, by forming a distribution constant circuit by an electric circuit between a capacitor and a discharge electrode. CONSTITUTION:The power is fed to a capacitor 20 (20a to 20i) from a charging power source 1 through a charge resistor 2, and the capacitor 20 is charged up to a specific voltage. Then by closing a discharge switch 4, the charge of the capacitor 20 flows in to electrodes 11 and 12 rapidly. In this case, an electric circuit composed of the ceramic capacitor 20, parallel conductive plates 21 and 22, the charge switch 4, transmission plates 8 and 9, and the electrodes 11 and 12 forms a distribution constant circuit. Therefore, when the capacitor 20 is charged to a certain voltage and the circuit is short-circuited, a current of a rectangular wave form flows, and the sharpness of the starting of the discharge current is made extensively high. By the extensively high starting sharpness of the discharge current like this, the heating temperature of the plusma generated in the discharge unit rises to generate a strong X ray.

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