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    • 62. 发明专利
    • FINE POSITIONING DEVICE
    • JPS61243511A
    • 1986-10-29
    • JP8360585
    • 1985-04-20
    • HATAMURA YOTAROHITACHI CONSTRUCTION MACHINERY
    • HATAMURA YOTAROONO KOZO
    • G05D3/00B23Q1/36B25J17/02G03F7/20H02N2/00
    • PURPOSE:To prevent the generation of interference displacement and to make a multiaxis constitution easy by storing a piezoelectric actuator, which generates a force, in an area formed with rigid body parts and parallel flexible beams of a parallel flexible beam displacing mechanism. CONSTITUTION:Plane plate-shaped parallel flexible beams 16 and 16' parallel with each other are formed between rigid body parts 15a and 15b as one body together with rigid body parts 15a and 15b. A piezoelectric actuator 19 is fixed in the area surrounded with rigid body parts 15a and 15b and beams 16 and 16'. When a voltage is applied to the actuator 19 to generate a force (f) in the (z)-axis direction, the rigid body part 15b is pressed in the (z)-axis direction by the force (f). Therefore, beams 16 and 16' generate bending deformation and the rigid body part 15b is displaced in the (z)-axis direction. A compressive strain and an expansive strain are generated in strain gauges 21 respectively to generate a principal displacement xsi. Since the flow of the force generated by the actuator 19 passes very near beams 16 and 16' by this constitution, the actuator does not interfere when this device is laminated.