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51. 发明专利

JP2003198000A MAGNETORESISTIVE EFFECT ELEMENT, THIN FILM MAGNETIC HEAD, MAGNETIC HEAD UNIT, AND MAGNETIC RECORDING AND REPRODUCING UNIT 审中-公开
公开(公告)号：JP2003198000A
公开(公告)日：2003-07-11
申请号：JP2001390148
申请日：2001-12-21
申请人： TDK CORP
发明人： SHIMAZAWA KOJI , TAKEO KENJI , ITO NORIYUKI , TERUNUMA KOICHI
IPC分类号： G01R33/09 , G11B5/39 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To provide an MR element capable of restraining the fluctuation of an effective track width, which is caused by misalignment when forming an electrode. SOLUTION: An MR film 300 has one end surface 100 that becomes a magnetic field detecting surface. First and second electrode layers (371, 372) are respectively adjacent to the bottom surface and the top surface of the MR film 300, and the both edges in a width direction seen from the one end surface 100 are inside the both edges in a width direction of the MR film 300. The first and second electrode layers (371, 372) and the second electrode layer 372 have a portion that overlaps with each other via the MR film 300, and the both edges in one width direction are inside the both edges in the other width direction. COPYRIGHT: (C)2003,JPO

52. 发明专利

JP2003168835A MAGNETORESISTIVE EFFECT ELEMENT, THIN FILM MAGNETIC HEAD, MAGNETIC HEAD, AND MAGNETIC RECORDER/REPRODUCER 审中-公开
公开(公告)号：JP2003168835A
公开(公告)日：2003-06-13
申请号：JP2001369064
申请日：2001-12-03
申请人： TDK CORP
发明人： SHIMAZAWA KOJI , TAKEO KENJI , TERUNUMA KOICHI
IPC分类号： G11B5/39 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To provide an MR element in which the effective track width can be made narrow by reducing read blur at the end part of a track, and a thin film magnetic head comprising it. SOLUTION: An MR film 300 has a free layer (ferromaneticlayer) 301 on the outside. Antiferromagnetic layers 41 and 42 have lower surfaces partially overlapping the upper surface of the free layer 301 of the MR film 300 and exchange bonding takes place at the overlapped part thus applying a bias field due to exchange bonding to the MR film 300. Electrode layers 35 and 36 include soft magnetic layers 351 and 361 having lower surfaces abutting on the upper surfaces of the antiferromagnetic layers 41 and 42. COPYRIGHT: (C)2003,JPO

53. 发明专利

JP2003142422A PATTERNED THIN FILM FORMING METHOD AND METHOD OF MANUFACTURING MICRO DEVICE 审中-公开
公开(公告)号：JP2003142422A
公开(公告)日：2003-05-16
申请号：JP2001336871
申请日：2001-11-01
申请人： TDK CORP
发明人： UEJIMA SATOSHI , ISHIDA YOICHI , TERUNUMA KOICHI
IPC分类号： H01L21/28 , G11B5/31 , G11B5/39 , H01F41/30 , H01L21/302 , H01L21/3205 , H01L21/3213 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To form a patterned thin film which is provided with a groove of fine width and equipped with an end that faces the groove and is superior in adhesion to the other thin film. SOLUTION: A patterned thin film forming method comprises a first step of successively forming an etching stopper film 102 and a patterning film 103 on a base 101, second step of forming a first patterned film 104 on the patterning film 103, third step of forming a second film 105 on all the surfaces of the patterning film 103 and the first film 104, fourth step of separating the first film 104 so as to enable the second film 105 formed on the patterning film 103 to function as an etching mask, and fifth step of selectively etching the patterning film 103 using the etching mask through dry etching for the formation of a patterned thin film with a groove.

54. 发明专利

JP2003067903A Thin film magnetic head, and manufacturing method thereof, head gimbal assembly, and hard disk device 有权
标题翻译：薄膜磁头及其制造方法，耳机组件和硬盘装置
公开(公告)号：JP2003067903A
公开(公告)日：2003-03-07
申请号：JP2001253814
申请日：2001-08-24
申请人： Tdk Corp , ティーディーケイ株式会社
发明人： ITO NORIYUKI , TANAKA KOSUKE , TERUNUMA KOICHI
IPC分类号： G11B5/39 , G11B5/596
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B5/3909 , G11B5/59683 , G11B2005/3996
摘要： PROBLEM TO BE SOLVED: To realize excellent magnetic signal read out characteristics by preventing to sustain an injury in processing of facing surface of a medium by making resistance of a conductive layer of a magnetroresistive (MR) effect element small enough to pass a current for detection of a magnetic signal.
SOLUTION: A playback head is provided with an MR element 5, two bias impress layers 27, and two conductive layers 6. Two bias magnetic field impress layers 27 are disposed abutting on each sideward 5c, 5d of the MR element 5, and impresses vertical bias magnetic field to the MR element 5. Two conductive layers 6 are disposed abutting on one surface of respective bias magnetic field impress layers 27 and also overlaying partly on one surface 5a of the MR element 5, and a sense current is passed to the MR element 5. The conductive layer 6 is gold alloy having the resistivity
摘要翻译：要解决的问题：为了通过使磁阻（MR）效应元件的导电层的电阻小到足以通过用于检测的电流来防止在介质的相对表面的处理中维持损伤来实现优异的磁信号读出特性的磁信号。解决方案：回放头设置有MR元件5，两个偏置压印层27和两个导电层6.两个偏置磁场施加层27被设置为邻接在MR元件5的每个侧面5c，5d上，并且使垂直两个导电层6邻接在相应的偏置磁场施加层27的一个表面上并且部分地覆盖在MR元件5的一个表面5a上，并且感测电流被传递到MR 导电层6是具有电阻率<22μΩ·cm的金合金，并且构成偏置磁场施加层27的材料的硬度> =硬度。

55. 发明专利

JP2002324927A MAGNETORESISTIVE EFFECT DEVICE, MANUFACTURING METHOD THEREFOR, THIN FILM MAGNETIC HEAD, MANUFACTURING METHOD THEREFOR, HEAD GIMBAL ASSEMBLY AND HARD DISK DEVICE 失效
公开(公告)号：JP2002324927A
公开(公告)日：2002-11-08
申请号：JP2001128485
申请日：2001-04-25
申请人： TDK CORP
发明人： SHIMAZAWA KOJI , TERUNUMA KOICHI
IPC分类号： G01R33/09 , G11B5/012 , G11B5/39 , G11B5/48 , H01F10/16 , H01F10/28 , H01F10/30 , H01F41/18 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To reduce Barkhausen noises while preventing drop of output. SOLUTION: A magnetoresistive effect device is provided with an MR element 5 having two faces 5a and 5b facing opposite sides and two side parts 5c and 5d facing the opposite sides, two bias magnetic field impression layers 27 which are arranged adjacent to the respective side parts 5c and 5d of the MR element 5 and which apply vertical bias magnetic field to the respective sides of the MR element 5 and two electrode layers 6 which are arranged adjacent to one face of each bias magnetic field applying layer 27 and make sense current flow to the MR element 5. The two electrode layers 6 are arranged so that they are partially overlapped with one face 5a of the MR element 5. The magnetoresistive effect device is provided with two non-conductive layers 28 arranged between one face 5a of the MR element 5 and the two electrode layers 6 in the two areas which are a part of the area where one face 5a of the MR element 5 is confronted with the two electrode layers 6 and which include the end parts of the side parts 5c and 5d of the MR element 5.

56. 发明专利

JP2002026428A METHOD OF FORMING PHOTORESIST PATTERN AND METHOD OF MANUFACTURING MAGNETORESISTIVE EFFECT THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JP2002026428A
公开(公告)日：2002-01-25
申请号：JP2000209911
申请日：2000-07-11
申请人： TDK CORP
发明人： ITO NORIYUKI , TERUNUMA KOICHI , TSUKIYAMA SATOSHI
IPC分类号： G03F7/20 , G03F7/40 , G11B5/31 , G11B5/39 , H01L21/027 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide an MR thin film magnetic head manufacturing method capable of very accurately controlling an overlap volume without making manufacturing processes complicated and a new photoresist pattern forming method capable of easily obtaining a photoresist pattern of narrow width. SOLUTION: A photoresist pattern forming method is carried out through a manner in which a photoresist pattern prescribed in width is formed on a board, and an ion beam is made to impinge on the board at a large angle of incidence (an angle made by an ion beam with the normal of the surface of a board is called an angle of incidence) for ion-milling the side of the photoresist pattern so as to decrease it in width.

57. 发明专利

JP2001084521A SPIN VALVE MAGNETORESISTANCE EFFECT ELEMENT, THIN FILM MAGNETIC HEAD PROVIDED WITH THE SAME, AND MANUFACTURE OF THE SAME 失效
公开(公告)号：JP2001084521A
公开(公告)日：2001-03-30
申请号：JP25715799
申请日：1999-09-10
申请人： TDK CORP
发明人： INAGE KENJI , TERUNUMA KOICHI , SAKAI MASANORI , TSUCHIYA YOSHIHIRO
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide an SVMR element having a novel constitution and excellent output stability, a thin film magnetic head provided with the element, and a method for manufacturing the SVMR element. SOLUTION: In a magnetic detecting region, this spin valve magnetoresistance effect element has a structure formed by laminating a first anti-ferromagnetic thin film layer 12, a first ferromagnetic thin film layer 13 exchange bonded thereto, a non-magnetic metal thin film layer 14 and a second ferromagnetic thin film layer 15 from the side of a substrate in this order. The first anti- ferromagnetic thin film layer 12 extends to both ends outer side regions of the magnetic detecting region and a magnetic region controlling film layer consisting of a second anti-ferromagnetic thin film layer 18 and a third ferromagnetic thin film layer 17 exchange bonded thereto is laminated on the first anti- ferromagnetic thin film layer 12 in the both ends outer side regions.

58. 发明专利

JP2000353308A MAGNETIC CONVERSION ELEMENT, THIN FILM MAGNETIC HEAD AND PRODUCTION THEREOF 失效
公开(公告)号：JP2000353308A
公开(公告)日：2000-12-19
申请号：JP16335499
申请日：1999-06-10
申请人： TDK CORP
发明人： TERUNUMA KOICHI
IPC分类号： G11B5/39 , G11B5/40
摘要： PROBLEM TO BE SOLVED: To provide a magnetic conversion element in which the heat radiation efficiency can be increased. SOLUTION: An MR(magnetoresistance effect) element 50 as a magnetic conversion element has a laminated body 5 produced by laminating an antiferromagnetic layer 51, pinned layer 52, nonmagnetic metal 53 and free layer 54. The laminated body 5 is formed on a heat radiating layer 6 consisting of a nonmagnetic material having high resistance. The heat radiating layer 6 has a larger surface area than the laminated body 5, and its thickness is >=0.5 nm and

59. 发明专利

JP2000348307A MAGNETO-RESISTIVE ELEMENT, THIN-FILM MAGNETIC HEAD AND THEIR PRODUCTION 失效
公开(公告)号：JP2000348307A
公开(公告)日：2000-12-15
申请号：JP15675199
申请日：1999-06-03
申请人： TDK CORP
发明人： TERUNUMA KOICHI
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide a magneto-resistive(MR) element which can be enhanced in heat radiation efficiency and a thin-film magnetic head as well as a process for producing the same. SOLUTION: The MR element includes a laminate 5 formed by laminating a free layer 54 which is a magnetic layer changing freely in a magnetization direction, a magnetic separation layer 53 consisting of a nonmagnetic metal, a bid layer 52 which is a magnetic layer fixed in the magnetization direction to one direction and an antiferromagnetic material layer 15 for fixing the magnetization direction of this bid layer 52. A tapered surface 5A inclined with respect to a medium-facing surface S is formed on the end face of the laminate 5 on the side opposite to the medium-facing surface S. The element is so constituted that the distance to the surface opposite to the medium-facing surface S of the antiferromagnetic material layer 51 is greater than the distance to the surface opposite to the medium-facing surface S of the free layer 54. As a result, a sufficient heat radiation quantity from the antiferromagnetic material layer 51 may be assured and the heating of the MR element may be suppressed.

60. 发明专利

JP2000030227A THIN-FILM MAGNETIC HEAD AND ITS PRODUCTION 失效
公开(公告)号：JP2000030227A
公开(公告)日：2000-01-28
申请号：JP21344998
申请日：1998-07-14
申请人： TDK CORP
发明人： TERUNUMA KOICHI
IPC分类号： G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To reproduce the information recorded with a recording head diagonally formed on a substrate with larger output by inclining the magnetism detecting region of an MR layer at a prescribed angle with a substrate surface. SOLUTION: The portion corresponding to part of the front surface of a first shielding layer 12, i.e., the magnetism detecting region of an MR element is formed inclined at a prescribed angle with a surface of the substrate 10. Lead conductor layers (and magnetic domain control film layers) 15, 16 are connected to both ends of the MR layer 14 formed, by being held with shielding gap layers 13 on the first shielding layer 12. A second shielding layer 17 is formed on the shielding gap layers 13, and the front surface of the second shielding layer 17 is flattened to the surface of the substrate 10. Since the first shielding layer 12 is formed to be inclined at a prescribed angle with the surface of the substrate 10, the magnetism detecting region of the MR layer 14 formed thereon is formed to be inclined at the prescribed angle with the surface of the substrate 10.

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