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    • 52. 发明专利
    • OPTICAL RECORDING MEMBER
    • JPS6276038A
    • 1987-04-08
    • JP21473585
    • 1985-09-30
    • NIPPON TELEGRAPH & TELEPHONE
    • FUJIMORI SUSUMUCHIBA REIICHIFUNAKOSHI NORIHIRO
    • B41M5/26G03C1/72G11B7/24
    • PURPOSE:To realize higher performance by adding a soft layer for relieving the volumetric change of a recording layer in the stage of laser recording. CONSTITUTION:The dielectric layer is constituted by laminating the soft dielectric film on the substrate side and the hard dielectric material on the outside. The thin soft layer is provided to the part to contact with a recording medium to relieve the impact generated from the volumetric change in the stage of making Te in the recording film amorphous; further, the thick and hard layer is provided on the soft layer to prevent the irreversible shape change as a whole to constitute the composite dielectric layer. The deterioration of an over coat layer and under coat layer by the repetition of making the Te crystallization transition to amorphous is thus prevented. The irreversible deformation of the over coat and under coat layers in the writing stage by laser heating is eliminated by using, for example, PbF as the soft layer and SiO2 as the hard layer. Repetition of many times of recording and erasing is thus made possible.
    • 56. 发明专利
    • LASER RECORDING MEDIUM
    • JPS5990246A
    • 1984-05-24
    • JP19897782
    • 1982-11-15
    • NIPPON TELEGRAPH & TELEPHONE
    • ASANO YOSHIHIROYAMAZAKI HIRONORIFUJIMORI SUSUMU
    • B41M5/26G11B7/241G11B7/257
    • PURPOSE:To prevent deterioration of a recording layer due to oxidation and to obtain a laser recording medium enhanced in recording sensitivity by forming a plasma-polymerized florocarbon film on a substrate and a metallic recording layer contg. Te on this film. CONSTITUTION:A substrate 1 having track servo grooves 4 are formed with plastics, such as polymethacrylate or polycarbonate, and then, a polyfluorocarbon film 2 is formed by plasma polymn. Further, a CS2 plasma polymerized film 3 contg. 90vol% Te is formed on the film 2 to obtain an optical recording layer. In another manner, a glass substrate 1 is coated with a UV hardenable resin film 5 of an acrylic or the like resin, the grooves 4 are transferred by using an Ni stamper or the like, the polyfluorocarbon film 2 is formed on the film 5, and then the recording layer 3 is formed. The film 2 prevents oxidation of the film 3 due to intrusion of moisture from the side of the substrate 1, and degradation and deterioration due to the unhardened matter and the remaining low-molecular matters of the resin film 5, and the obtained recording layer is superior in recording sensitivity and stable against the lapse of time.
    • 58. 发明专利
    • EXPOSURE MASK
    • JPS57128031A
    • 1982-08-09
    • JP1269381
    • 1981-01-30
    • NIPPON TELEGRAPH & TELEPHONE
    • TAMAMURA TOSHIAKIFUJIMORI SUSUMU
    • H01L21/027H01L21/30
    • PURPOSE:To obtain a mask having extremely excellent resolution by employing a diamond-shaped carbon film as the mask substrate of an X-ray or as a part of the substrate, thereby enhancing the permeability of the X-ray. CONSTITUTION:A nitrided Si film 12 is accumulated on one side surface of an Si wafer 11. Then, a photoresist is covered on the film, and an Si selecting back etching window pattern 13 is formed. Subsequently, the film 12 is opened with a window 14. Thereafter, a diamond-shaped carbon film is formed on the remaining Si surface. Then, a positive type electron beam resist is covered on the film, thereby forming a resist film 15. Subsequently, a test pattern is drawn by an electron beam drawing device, and is then developed. Thereafter, metallic Ti is deposited on the film, Au 16 is deposited on the Ti. Then, it is lifted off, thereby obtaining the metallic pattern of an X-ray absorption layer. Subsequently, the Si of the part opened with the window is removed by back etching, thereby obtaining an exposure mask. In this manner, an X-ray mask having extremely high contrast can be obtained.