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    • 46. 发明专利
    • Oxide evaporation material and high-refractive-index transparent film
    • 氧化物蒸发材料和高折射率透明膜
    • JP2011132556A
    • 2011-07-07
    • JP2009290200
    • 2009-12-22
    • Sumitomo Metal Mining Co Ltd住友金属鉱山株式会社
    • ABE TAKAYUKIWAKE RIICHIROKUWAHARA MASAKAZUMAENO YASUYUKI
    • C23C14/24C04B35/00C23C14/08
    • H01B1/08C04B35/01C04B35/6261C04B2235/3229C04B2235/3286C04B2235/5445C04B2235/6562C04B2235/6565C04B2235/6585C04B2235/6586C04B2235/77C04B2235/786C23C14/0015C23C14/08
    • PROBLEM TO BE SOLVED: To provide an oxide evaporation material in which a high-refractive-index transparent film of low resistance and high transmittance in the visible to near-infrared region can be consistently manufactured even when the amount of oxygen to be introduced during the film deposition is small, and a high-refractive-index transparent film to be manufactured by using the oxide evaporation material. SOLUTION: The oxide evaporation material mainly consists of indium oxide, and is constituted of a sintered body containing cerium with its Ce/In atomic ratio being >0.110 and ≤0.538, and the L* value in the CIE1976 color space is 62-95. The oxide evaporation material with the L* value of 62 to 95 has an optimal oxygen amount. Accordingly, even when a small amount of oxygen gas is introduced into a film deposition vacuum chamber, a high-refractive-index transparent film having the refractive index of 2.15 to 2.51 at a wavelength of 550 nm, a low resistance, and a high transmittance in the visible to near-infrared region is formed by vacuum deposition methods. Since the introduced oxygen gas amount is small, the difference in composition between the film and the evaporation material is made small, and the fluctuation in the film composition or characteristic during the mass production can be reduced. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种氧化物蒸发材料,其中即使当氧气的量将可以一致地制造其中可见光到近红外区域的低电阻和高透射率的高折射率透明膜 在膜沉积期间引入的薄膜是通过使用氧化物蒸发材料制造的高折射率透明膜。 解决方案:氧化物蒸发材料主要由氧化铟组成,由Ce / In原子比> 0.110和≤0.538的含铈的烧结体构成,CIE1976色空间的L *值为62 -95。 L *值为62〜95的氧化物蒸发材料具有最佳的氧量。 因此,即使在薄膜沉积真空室中引入少量的氧气的情况下,在波长550nm下折射率为2.15〜2.51的高折射率透明膜,低电阻,高透射率 在可见光到近红外区域通过真空沉积法形成。 由于引入的氧气量少,所以膜和蒸发材料之间的组成差异变小,可以降低大量生产中的膜组成或特性的波动。 版权所有(C)2011,JPO&INPIT