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    • 49. 发明专利
    • Steam generator, steam generating method and substrate processing device
    • 蒸汽发生器,蒸汽发生方法和基板处理装置
    • JP2010060244A
    • 2010-03-18
    • JP2008228752
    • 2008-09-05
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • NAKAJIMA MIKIOKAMIKAWA YUJI
    • F22B3/02F22B1/28H01L21/304
    • B01D1/065B01B1/005B01D1/02B01D1/30F26B5/00F26B5/16
    • PROBLEM TO BE SOLVED: To provide a steam generator, steam generating method and substrate processing device, increasing the concentration of generated steam of an organic solvent, and efficiently heating the organic solvent. SOLUTION: This steam generator 10 includes: passage pipes 14, 16, 18; a liquid organic solvent supply part 30 for supplying a liquid organic solvent to one end of the passage pipe 14; and heating parts 20, 22, 24 for heating the passage pipes 14, 16, 18. The passage pipes 14, 16, 18 are formed to increase in sectional area as they go from each one end toward the other end. The liquid organic solvent supplied to one end of the passage pipe 14 is heated so that the steam of the organic solvent flows out from the other of the passage pipe 18. The substrate processing device 60 includes the above steam generator 10. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供蒸汽发生器,蒸汽发生方法和基板处理装置,增加有机溶剂的产生蒸汽的浓度,并有效地加热有机溶剂。

      解决方案:该蒸汽发生器10包括:通道14,16,18; 液体有机溶剂供给部30,用于向通路管14的一端供给液体有机溶剂; 以及用于加热通道14,16,18的加热部件20,22,24。通道管道16,16,18形成为在从每个端部朝向另一端部时增加截面面积。 供给到通路管14的一端的液体有机溶剂被加热,使得有机溶剂的蒸汽从通道管18中的另一个流出。基板处理装置60包括上述蒸汽发生器10。 (C)2010,JPO&INPIT