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41. 发明专利

JP2003126873A WATER PURIFICATION SYSTEM 审中-公开
公开(公告)号：JP2003126873A
公开(公告)日：2003-05-07
申请号：JP2001323180
申请日：2001-10-22
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO , YAMAZAKI SACHIKO , OKUMURA MASATAKE
IPC分类号： C02F1/00 , C02F1/58 , C02F1/70 , C02F1/72 , C02F1/78
摘要： PROBLEM TO BE SOLVED: To provide a water purification system capable of producing pure water which is low in organic carbon contents by removing aldehyde out of the water to be treated, which contains aldehydes. SOLUTION: In the water purification system, treated water, treated with pre-treating equipment having an oxidizing means for oxidizing aldehydes by adding an oxidizing agent to the water to be treated, which contains aldehydes, and an oxidizing agent decomposing means for decomposing the remaining oxidizing agent, is made to be the raw water of a primary water purification system.

42. 发明专利

JP2001163615A AMMONIA RECOVERING DEVICE 失效
公开(公告)号：JP2001163615A
公开(公告)日：2001-06-19
申请号：JP34909199
申请日：1999-12-08
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO
IPC分类号： C02F1/44 , B01J39/04 , C01C1/02 , C02F1/42 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide an ammonia recovering process for recovering ammonia for recycle ammonia from a mixed waste liquid containing ammonia and hydrogen peroxide such as a SCI cleaning waste liquid generated in a RCA cleaning process usually used in the electronic industrial field. SOLUTION: The device for recovering ammonia from the waste liquid containing ammonia and hydrogen peroxide has a catalytic reaction column, a membrane separation means provided with a reverse osmotic membrane and an NH4 type strong acidic ion exchange resin column and is operated by passing the liquid through in this order.

43. 发明专利

JPH11121408A DEVICE FOR RECOVERING ABRASIVE SLURRY 失效
公开(公告)号：JPH11121408A
公开(公告)日：1999-04-30
申请号：JP28233597
申请日：1997-10-15
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO , OTA OSAMU
IPC分类号： B24B57/02 , B01D61/02 , B01D61/14 , B01D61/58 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a device for recovering abrasive slurry wherein, with no clogging, large impurity and file impurity are removed to recover colloidal silica and low molecular weight electrolyte, which is reused as an abrasive slurry while a transmission liquid is reused as a raw water for a low-quality pure water and a secondary pure water device. SOLUTION: An abrasion waste liquid provided after chemical machinery polishing with a semiconductor substrate or a coat formed over it in a polishing system 2 is fully filtered at a filtration device 4 to remove impurities comprising solid substance. Then, a filtered liquid is membrane-separated with a UF membrane at a membrane separation device 6 into a concentrated liquid comprising abrasives and a transmission liquid, the transmission liquid is separated by reverse infiltration with a RO membrane at a reverse infiltration device 8 into a concentrated liquid comprising low molecular weight electrolyte and low-quality pure water, and the concentrated liquids of the membrane separation device 6 and the reverse infiltration device 8 are mixed to recover an abrasive slurry.

44. 发明专利

JPH11101761A TOTAL CARBONIC ACID CONCENTRATION MEASURING APPARATUS, ULTRAPURE-WATER PREPARATION APPARATUS PROVIDED WITH THE SAME AND PREPARATION OF ULTRAPURE WATER 失效
公开(公告)号：JPH11101761A
公开(公告)日：1999-04-13
申请号：JP26369297
申请日：1997-09-29
申请人： KURITA WATER IND LTD
发明人： NOMURA MAKOTO , FURUKAWA MASAHIRO
IPC分类号： G01N27/10 , C02F1/42
摘要： PROBLEM TO BE SOLVED: To obtain a total carbonic acid concentration measuring apparatus by which a carbonic acid concentration in pure water or ultrapure water can be detected simply and with high accuracy, by a method wherein a total carbonic acid concentration is computed on the basis of the measured value of the conductivity or the resistivity of the pure water. SOLUTION: A resistivity sensor 6A is installed on the entrance side of a mixed-bed ion exchange apparatus 4, and the resistivity of water flowing into the exchange apparatus 4 is measured by a resistivity meter 7A. On the other hand, a resistivity sensor 6B is installed on the exit side of the exchange apparatus 4, and the resistivity of water which flows out is measured by a resistivity meter 7B. Its measurement can be performed instantaneously. Consequently, even when a change in the resistivity is large, the measurement can be performed continuously, stably and with high accuracy. Measured values including a water passage amount by a flowmeter 8 are inputted to a computing device 9. By using a specific calculating expression, the total carbonic acid concentration of the water which flows into and total carbonic acid concentration of the water which flows out are computed. In addition, also the carbonic acid load amount of the exchange apparatus 4 and the carbonic acid load factor (the utilization factor) of an ion-exchange resin can be found. As a result, it is possible to estimate the time in which the ion-exchange resin reaches a breakthrough, i.e., the replacement time or the regeneration time of the ion-exchange apparatus 4.

45. 发明专利

JPH10258208A METHOD FOR RECOVERING FUNCTION OF PRECOATED FILTRATION APPARATUS 失效
公开(公告)号：JPH10258208A
公开(公告)日：1998-09-29
申请号：JP6614997
申请日：1997-03-19
申请人： KURITA WATER IND LTD
发明人： TSURUMI TAKESHI , FURUKAWA MASAHIRO
IPC分类号： B01D37/02
摘要： PROBLEM TO BE SOLVED: To recover the filtration function by almost completely removing adhering substances from a filtration element efficiently within a short time by simple operation of a simple apparatus. SOLUTION: Adhering substances are peeled and removed from a filtration element 1 and the filtration function is recovered by taking a unit 7 comprising the filtration element 1 out of a filtration apparatus 10, which carries out filtration desalination by the filtration element 1 precoated with a filter material of powder ion exchange resin and applying vibration to the filtration element 1 while keeping the filtration element 1 in heated and dried state by hot wind.

46. 发明专利

JPH10123040A MEASURING APPARATUS FOR SPECIFIC GRAVITY 失效
公开(公告)号：JPH10123040A
公开(公告)日：1998-05-15
申请号：JP27664696
申请日：1996-10-18
申请人： KURITA WATER IND LTD
发明人： SATO SHIN , FURUKAWA MASAHIRO
IPC分类号： G01N9/18 , G01N1/10
摘要： PROBLEM TO BE SOLVED: To provide a measuring apparatus which can measure a specific gravity of a sample solution precisely, automatically and continuously and control the specific gravity automatically according to a measured result. SOLUTION: A sample solution 2 is introduced into a measuring cell 1 from an introduction passage. While the sample solution is being discharged from a discharge passage 4, a float body 5 is put into the sample solution, and the height of the detecting face 8a of a cap 8 which is attached to its tip is measured by a short-distance analog sensor 6. At this time, a measured result is converted, by a conversion unit 7, into a specific weight value or a concentration value which is equivalent to the value, and the specific gravity of the sample solution is measured.

47. 发明专利

JPH0739870A METHOD AND DEVICE FOR PRODUCING PURE WATER 失效
公开(公告)号：JPH0739870A
公开(公告)日：1995-02-10
申请号：JP18533693
申请日：1993-07-27
申请人： KURITA WATER IND LTD
发明人： ISHIKAWA KAORU , FURUKAWA MASAHIRO
IPC分类号： C02F1/42 , C02F1/44
摘要： PURPOSE:To prevent the lowering of the treatment performance and the quality of treated water due to clogging, in the case making scale due to the formation of insoluble salt, such as calcium fluoride is prevented and a membrane separator is used, when pure water is produced from mixed raw water of industrial water and semiconductor production waste water. CONSTITUTION:After industrial water is demineralized in a water softener 3 and decarbonated in a decarbonator 4, it is mixed with a semiconductor production waste water in a mixed water tank 15. After the mixed raw water is, if necessary, pretreated in a biological filter 5 and a UF membrane separator 7, it is deionized in a RO membrane separators 9, 10, an ion exchange device, etc., to produce pure water.

48. 发明专利

JPH06277663A TREATMENT OF RINSE WASTE WATER 失效
公开(公告)号：JPH06277663A
公开(公告)日：1994-10-04
申请号：JP6656693
申请日：1993-03-25
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO
IPC分类号： C02F1/42 , B01J41/04 , B01J49/00 , C02F1/52 , C02F1/58 , C02F9/00
摘要： PURPOSE:To obtain high purity treated water and to efficiently recover fluorine, in a method treating rinse waster discharged from a semiconductor manufacturing process with an anion exchange, by inexpensively and efficiently treating the waste regeneration soln. of the anion exchange resin within a short time. CONSTITUTION:An obtained waste regeneration soln. is classified into a fluorine conc. waste regeneration soln, and a fluorine dilute waste regeneration soln. and the fluorine conc. waste regeneration soln. is passed through a calcium carbonate packed tower 7 and a fluorine dilute waste regeneration soln. is subjected to flocculation treatment in a flocculation tank 5A.

49. 发明专利

JPH04293503A REMOVAL OF DISSOLVED OXYGEN IN WATER 失效
公开(公告)号：JPH04293503A
公开(公告)日：1992-10-19
申请号：JP5683891
申请日：1991-03-20
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO
IPC分类号： B01D19/00 , C02F1/58 , C02F9/00
摘要： PURPOSE:To obtain a treated water having a dissolved oxygen concn. of at most 1ppb by removing the dissolved oxygen inexpensively and efficiently. CONSTITUTION:In a method for removing dissolved oxygen in water by a physical deaerating means and thereafter removing the same chemically using a palladium catalyst, the steps comprising bringing the water into contact with the palladium catalyst at a pressure of at least 2kg/cm G and then at a higher pressure, whereby the removing efficiency of the dissolved oxygen can be further enhanced.

50. 发明专利

JPS61209006A HOLLOW YARN TYPE MEMBRANE SEPARATION APPARATUS 失效
公开(公告)号：JPS61209006A
公开(公告)日：1986-09-17
申请号：JP4642885
申请日：1985-03-11
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO , HIROTA MORIYUKI
IPC分类号： B01D63/02
摘要： PURPOSE:To reduce the rising in filtering differential pressure in the removal of a suspended substance and to facilitate the recovery of filtering capacity by washing, by using a hollow yarn membrane of which the fractional MW is a specific range. CONSTITUTION:In a hollow yarn type membrane separation apparatus of a total amount filtering type external pressure filter system, a hollow yarn membrane 2 with a fractional MW of 30,000-260,000 is used. For example, water to be treated such as water containing a radioactive substance in an atomic power plant is injected in the treatment chamber 4 of a treatment tank under pressure and passed through the hollow yarn membrane 2 from the outside thereof by an external pressure filtering system to take out treated water from a water collection chamber 3. The water passing process is interrupted periodi cally or on occasion and the cake such as radioactive substance collected by the hollow yarn membrane 2 is washed and removed by flushing.

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