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    • 41. 发明专利
    • HUMIDIFY SENSOR
    • JP2002357579A
    • 2002-12-13
    • JP2001165318
    • 2001-05-31
    • NGK SPARK PLUG CO
    • FUJITA HIROTERUYAMADA TETSUOISHIDA NOBORUOSHIMA TAKAFUMI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a humidity sensor suppressing deterioration of a humidity sensitive layer and maintaining stable performance over a long period, even under an atmosphere to be measured contains toxic substances and a high temperature atmosphere. SOLUTION: The humidity sensor 1 is provided with an insulation substrate 11 comprising alumina, the humidity sensitive layer 13 having alumina, titania, tin oxide and the like with a prescribed mass ratio, a detection electrode (lower electrode 12 and upper electrode 14) comprising noble metal such as Pt and Au, and a protection layer 15 comprising metal oxide and composite oxide of either alumina, spinel or the like and is a porous body. The detection electrode can be the porous body, and the humidity sensitive layer is preferably the porous body. In addition, a heater 111 and a temperature measuring resistor 112 are provided in the inside of the insulation substrate, and is provided directly under the humidity sensitive layer in the inside of the insulation substrate.
    • 47. 发明专利
    • GAS CONCENTRATION SENSOR
    • JP2000304732A
    • 2000-11-02
    • JP19802899
    • 1999-07-12
    • NGK SPARK PLUG CO
    • ISHIKAWA HIDEKISATO YOSHIKUNITOMONO KEIGOISHIDA NOBORUOSHIMA TAKAFUMI
    • G01N29/00G01N29/02G01N29/18
    • PROBLEM TO BE SOLVED: To provide a gas concentration sensor with which a gas concentration can be measured with high accuracy. SOLUTION: A recessed part 34a is formed so that the bottom face is to be nearly parallel to a reflecting face 34 in an edge part which comes into contact with the sidewall of a measuring chamber in the reflecting face 34. The distance between the edge part of the reflecting face 34 and an ultrasonic element 33 is made longer than the distance between the central part of the reflecting face 34 and the ultrasonic element 33. As a result, different-route waves which are propagated along the sidewall of the measuring chamber are reflected by the bottom face of the recessed part 34a so as to be propagated. That is to say, as compared with a case in which the reflecting face 34 is a plane, the propagation distance of the different-route waves becomes long, and the different-route waves are not synthesized near the modulation point of straight waves. That is to say, since the modulation point of the straight waves can be detected precisely, the time between the modulation point of transmitted waves and the modulation point of receives waves can be measured as the propagation time of ultrasonic waves, and a gas concentration can be measured with high accuracy.
    • 50. 发明专利
    • GAS SENSOR
    • JP2000155110A
    • 2000-06-06
    • JP25675399
    • 1999-09-10
    • NGK SPARK PLUG CO
    • SUGAYA SATOSHIISHIDA NOBORUNADANAMI NORIHIKOYAMADA TETSUOOSHIMA TAKAFUMI
    • G01N27/419G01N27/416
    • PROBLEM TO BE SOLVED: To provide a gas sensor equipped with an electrode for reducing the oxygen concentration dependence of the measurement of gas concn. SOLUTION: A first pump cell 6, equipped with first inner and outer electrodes 10, 11, is formed to face to the inside and outside of a first flow passage 2 and draw out/in oxygen from the first flow passage 2 through an oxygen ion conductor and a second pump cell 8 equipped with second inner and outer electrodes 14, 15 formed to face the inside and outside of the second flow passage 4 which communicates with the first flow passage with diffusion resistance and allowing current corresponding to the concn. of a gas component to be measured to flow across the electrodes 14, 15 through an oxygen ion conductor by the reaction of the gas component to be measured in the second flow passage 4 are provided. At least a part of the first inner electrode 10 contains a platinum group element and Cu and oxygen pumping capacity is high, the voltage applied across the first inner and outer electrodes 10, 11 is lowered, and the reaction of a gas to be measured in the first flow passage is suppressed and measurement accuracy is enhanced.