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41. 发明专利

JPS6445131A CLEANING AND OXIDATION OF SEMICONDUCTOR WAFER 失效
公开(公告)号：JPS6445131A
公开(公告)日：1989-02-17
申请号：JP20172087
申请日：1987-08-14
申请人： HITACHI LTD
发明人： MATSUZAKI HARUMI , OKOCHI ISAO , EBARA KATSUYA , TAKAHASHI SANKICHI , HISHINUMA TAKAO
IPC分类号： B01D11/04 , H01L21/304 , H01L21/306 , H01L21/316
摘要： PURPOSE:To decrease the exposure of a wafer to air in a clean room, by bringing the semiconductor wafer into contact with carbon dioxide gas including one kind of material having oxygen atoms or similar supercritical carbon dioxide gas, and oxidizing the Si surface of the semiconductor wafer. CONSTITUTION:A semiconductor wafer is brought into contact with supercritical carbon dioxide gas or liquid carbon dioxide gas, and the wafer is cleaned. Thereafter, the wafer is brought into contact with carbon dioxide gas including at least one kind of material having oxygen atoms or similar supercritical carbon dioxide gas. Thus the Si surface of the wafer is oxidized. Therefore, the cleaning process with the supercritical carbon dioxide gas or the liquid carbon dioxide gas and the oxidizing process can be performed in the same process. Thus, the number of contact of the wafer and air in a clean room is decreased, and contamination of the wafer due to air is decreased.

42. 发明专利

JPS63319211A SUPERCONDUCTING MATERIAL AND PRODUCTION THEREOF 失效
公开(公告)号：JPS63319211A
公开(公告)日：1988-12-27
申请号：JP15546787
申请日：1987-06-24
申请人： HITACHI LTD
发明人： HIGASHIYAMA KAZUHISA , KAMO YUICHI , KUMAGAI TERUO , YAMASHITA HISAO , OKADA HIDEO , MATSUDA SHINPEI , HISHINUMA TAKAO
IPC分类号： C01G3/00 , C01G1/00 , H01B12/02 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To produce a superconducting material having superior formability, mechanical strength and high critical current density by impregnating a soln. of a silver compd. into oxide superconductor powder or powder of a starting material mixture for the superconductor, drying the impregnated powder and calcined it at a specified temp. in an oxygen atmosphere. CONSTITUTION:A soln. of a silver compd. such as silver nitrate is impregnated into oxide superconductor powder exhibiting superconductivity obtd. by coprecipitation or other method or powder of a starting material mixture exhibiting superconductivity after calcination. The impregnated powder is dried and calcined at 400-1,100 deg.C in an oxygen atmosphere optionally in the presence of steam to support silver on the surfaces of the fine oxide superconductor particles and to obtain a superconducting material having superior formability, high mechanical strength after forming into a wire or the like and high critical current density.

43. 发明专利

JPS63291313A SUPERCONDUCTOR 失效
公开(公告)号：JPS63291313A
公开(公告)日：1988-11-29
申请号：JP12385187
申请日：1987-05-22
申请人： HITACHI LTD
发明人： KUMAGAI TERUO , HIGASHIYAMA KAZUHISA , OKADA HIDEO , KAMO YUICHI , YAMASHITA HISAO , AIHARA KATSUZO , MATSUDA SHINPEI , HISHINUMA TAKAO
IPC分类号： H01L39/12 , H01B12/06
摘要： PURPOSE:To secure such an oxide superconductor that is excellent in lightweightiness, processability and installability suitable for a magnetic shielding material by forming grainy oxide superconducting material and fibrous material both on a substrate. CONSTITUTION:Grainy oxide superconducting material 2 having superconductivity at more than a boiling point of liquid hydrogen and fibrous material 3 both are formed on the surface of a structural base material 1 for magnetic shielding. When it is cooled by a refrigerant of more than a boiling point of liquid hydrogen, a shielding current is generated in this material 2 whereby an external magnetic field is screenable. The base material 1 may be any of metal, organic matter and inorganic matter unless conductivity of the material 2 is dissipated, and in order to strengthen its adhesion, the surface is roughed to some degree. As for the material 2, such material that shows conductivity of a composite oxide of yttrium-barium-copper having a perovskite structure is used. And, as for the material 3, those of silver fiber, nickel fiber, etc., that are resistible to low temperature and, what is more, less in deterioration against a heat cycle are used.

44. 发明专利

JPS63288912A PRODUCTION OF INORGANIC OXIDE SUPERCONDUCTOR 失效
公开(公告)号：JPS63288912A
公开(公告)日：1988-11-25
申请号：JP12385087
申请日：1987-05-22
申请人： HITACHI LTD
发明人： KAWAGOE HIROSHI , KAMO YUICHI , KUMAGAI TERUO , YAMASHITA HISAO , MATSUDA SHINPEI , HISHINUMA TAKAO , AIHARA KATSUZO , HIGASHIYAMA KAZUHISA , OKADA HIDEO
IPC分类号： C01G1/00 , C01G3/00 , C04B35/00 , C04B35/45 , H01B12/00 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To produce a superconductor which functions at above the b.p. of liquid H2 and has a high critical current density by drying coprecipitate obtained from aq. soln. of water-soluble salts of a raw material compsn. then calcining in two stages. CONSTITUTION:Aq. soln. of precipitant having >=9pH is added to aq. soln. of water-soluble salts contg. La, Cu, and >=one kind of alkaline earth element selected from Ba, Sr, and Ca. After precipitating hydroxides, hydrous oxides, oxalates, carbonates or a mixture thereof in the form of coprecipitate of said salts, a solid matter is obtd. by separating the solid from liquid. Then, the solid matter is dried and calcined at 700-950 deg.C, and molded, then calcined further at 800-1,200 deg.C in oxidizing atmosphere contg. O2. By this method, a high temp. superconductor expressed by the formula: (LaxAy)2CuO2 (wherein A is at least one kind selected from Ba, Sr, and Ca; x is 0.50-0.98; y is 0.5-0.02; z is an atomic ratio

45. 发明专利

JPS63288911A PRODUCTION OF HIGH TEMPERATURE SUPERCONDUCTOR 失效
公开(公告)号：JPS63288911A
公开(公告)日：1988-11-25
申请号：JP12384887
申请日：1987-05-22
申请人： HITACHI LTD
发明人： KUMAGAI TERUO , HIGASHIYAMA KAZUHISA , OKADA HIDEO , KAWAGOE HIROSHI , KAMO YUICHI , YAMASHITA HISAO , MATSUDA SHINPEI , HISHINUMA TAKAO , AIHARA KATSUZO
IPC分类号： C01G1/00 , C01G3/00 , C04B35/00 , C04B35/45 , H01B12/00 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To produce a high temp. superconductor which functions at above the b.p. of liquid H2 and has high critical current density by drying coprecipitate of salt obtained from aq. soln. of water-soluble salts having a raw material compsn. then calcining the coprecipitate in two stages. CONSTITUTION:Aq. soln. of precipitant having >=9pH is added to aq. soln. of water-soluble salts contg. Y, Cu, and >=one kind of alkaline earth elements selected from Ba, Sr, and Ca, and coprecipitate of hydroxides, hydrous oxides, oxalates, carbonates, or their mixture is formed to obtain a solid matters after separating the solid from liquid. The solid matters are then calcined at 700-950 deg.C, then calcined further at 800-1,200 deg.C in oxidizing atmosphere contg. O2. Thus, a high temp. superconductor expressed by the formula: (YxAy)2CuO2 (wherein A is >=one kind of element selected from Ba, Sr, and Ca; x is 0.1-0.6; y is 0.9-0.4; z is an atomic ratio

46. 发明专利

JPS62232101A MANUFACTURE OF IRON NITRIDE MAGNETIC MATERIAL 失效
公开(公告)号：JPS62232101A
公开(公告)日：1987-10-12
申请号：JP7422586
申请日：1986-04-02
申请人： HITACHI LTD
发明人： SAITO YUKIO , TANAKA HIDEAKI , FUJITA KAZUNORI , MATSUDA SHINPEI , HISHINUMA TAKAO
IPC分类号： C01B21/06 , B01J19/08 , C23C8/36 , H01F1/10
摘要： PURPOSE:To enable highly selective manufacture of Fe3N which is excellent in corrosion resistance and magnetic characteristics by advancing reaction supplying a compound gas which contains an iron atom and a compound gas which contains a nitrogen atom, generating plasma by applying electromagnetic energy and controlling the temperature of a deposited substrate in optimum. CONSTITUTION:A mixed gas 1 of H2 and NH3 is supplied to a plasma reactor 4 and the quantity of the supplied gas is adjusted and measured by a mass flow controller 2. The pressure in the plasma reactor 4 is reduced by a rotary vacuum pump 15, high frequency is generated from a high frequency oscillator 5, supplied to the plasma reactor 4 via a matching unit 6 and a coil type electrode 7 and the energy forms the mixed gas of H2 and NH3 plasma 3. An iron carbonyl 11 is supplied via a ring type nozzle 12 to the plasma reactor 4 accompanied by a carrier gas 8 Ar and the quantity of the supplied Ar is measured by a mass flow controller 9. The quantity of the iron carbonyl is also obtained by the difference of a mass flow controller 10 and the mass flow controller 9.

47. 发明专利

JPS59195018A Injection method for pulverized coal and device thereof 失效
标题翻译：用于粉煤的注射方法及其装置
公开(公告)号：JPS59195018A
公开(公告)日：1984-11-06
申请号：JP6562283
申请日：1983-04-15
申请人： Babcock Hitachi Kk , Hitachi Ltd
发明人： AZUHATA SHIGERU , ARASHI NORIO , NARATO KIYOSHI , SOUMA KENICHI , INADA TOORU , KOBAYASHI YOSHINOBU , OOTSUKA KEIZOU , HISHINUMA TAKAO , MASAI TADAHISA
IPC分类号： F23D1/02 , F23C99/00 , F23D1/00 , F23N1/02
摘要： PURPOSE: To reduce an amount of NOX produced, by a method wherein, after the starting, a nozzle in an outer periphery normally injects pulverized coal in a condition to swirl it, and a nozzle in an inner periphery injects the air until a load attains a given value after the starting and injects pulverized coal when the load exceeds the given value.
CONSTITUTION: A part of the air is bled in a secondary fuel feed pipe 25 from the middle of a feed pipe 26 for the air for combustion by means of a blower 58, and means for feeding the air through a secondary air feed pipe 65 is provided. Valves 66 and 67 are installed in a secondary air feed pipe 65 and a secondary fuel pipe 64, and if the secondary air feed pipe 25 is used as a fuel feed pipe, closing of the valve 66 results in stop of the flow of a secondary air fed through the blower 58. In case the secondary air feed pipe 25 is used as an air feed pipe, closing of the valve 67 causes stop of the flow of pulverized coal which is fuel. This permits reduction in an amount of NOX produced during combustion even if a load is changed.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：为了减少生成的NOX量，通过以下的方法，在起动后，外周的喷嘴通常在粉化状态下喷射粉煤，并且内周的喷嘴喷射空气，直到负荷达到启动后的给定值，当载荷超过给定值时注入粉煤。构成：空气的一部分通过鼓风机58从用于燃烧的空气的供给管26的中部从第二燃料供给管25排出，并且用于通过二次空气供给管65供给空气的装置是提供。阀66和67安装在二次空气供给管65和二次燃料管64中，如果二次空气供给管25用作燃料供给管，则阀66的关闭导致二级空气供给管22的流动停止通过鼓风机58供给空气。在二次空气供给管25用作供气管的情况下，关闭阀67使得停止作为燃料的粉煤流动。即使负荷变化，也能够减少燃烧时产生的NO x的量。

48. 发明专利

JPS5977207A Low nox burner device 失效
标题翻译：低NOX燃烧器装置
公开(公告)号：JPS5977207A
公开(公告)日：1984-05-02
申请号：JP18595082
申请日：1982-10-25
申请人： Babcock Hitachi Kk , Hitachi Ltd
发明人： ARASHI NORIO , AZUHATA SHIGERU , NARATO KIYOSHI , INADA TOORU , SOUMA KENICHI , OOTSUKA KEIZOU , HISHINUMA TAKAO , MASAI TADAHISA
IPC分类号： F23C99/00 , F23C1/00 , F23K1/00
CPC分类号： F23K1/00
摘要： PURPOSE:To reduce production of NOX when coal having a high fuel ratio is burnt, by a method wherein, in a device which effects multi-fuel combustion of pulverized coal comprising high fuel ratio coal and low fuel ratio coal, the grain of high fuel ratio coal is sized to be smaller than that of low fuel ratio coal on the whole for combustion. CONSTITUTION:A pulverizer 3 for high fuel ratio coal and a pulverizer 4 for low fuel ratio coal, whereto coal is supplied from a bunker 5 for high fuel ratio coal and a bunker 6 for low fuel ratio coal, feed them out to a pulverized coal feed line 9 leading to a burner 2. When a fuel ratio is varied resulting from a change in the type of coal, the power of a motor 12 of the pulverizer for high fuel ratio coal is varied, but even in this case, the grain size regulator of a classifying device 14 is controlled so that the power is maintained at a constant value. Namely, when entrance of high fuel ratio coal results in reduction in the power of the motor 12, the classifying device 14 is regulated so that the grain size reduces. As a result, coal is decreased in grain size as it is increased in fuel ratio, and this permits reduction of production of NOX.
摘要翻译：目的：为了减少高燃油比燃煤，减少生产NOX，通过一种方法，在高效燃料煤和低燃料比煤粉煤粉进行多燃燃烧的装置中，高燃料颗粒比例煤的总体尺寸要小于整体用于燃烧的低燃料比煤。构成：用于高燃料比的煤的粉碎机3和用于低燃料比的煤的粉碎机4，从用于高燃料比的煤的煤仓5和用于低燃料比的煤的燃料舱6供给煤，将其送入粉煤供给线9通向燃烧器2.当由于煤类型的变化而导致燃料比变化时，用于高燃料比的煤的粉碎机的电动机12的功率是变化的，但即使在这种情况下，颗粒控制分级装置14的尺寸调节器，使得功率保持在恒定值。也就是说，当高燃料比率的煤的进入导致马达12的功率的降低时，分级装置14被调节为使得粒度减小。结果，随着燃料比的增加，煤的粒度下降，这允许NOX的生产减少。

49. 发明专利

JPS592768B2 JPS592768B2 - 失效
公开(公告)号：JPS592768B2
公开(公告)日：1984-01-20
申请号：JP1283376
申请日：1976-02-10
申请人： Hitachi Ltd
发明人： SATO ISAO , OOSHIMA RYOICHIRO , UCHAMA YOSHIHIRO , ISHIBASHI YOJI , TSUKAHARA SATOSHI , HISHINUMA TAKAO
IPC分类号： B01D53/94 , B01D53/86 , F01D25/30 , F01N1/10 , F01N3/08 , F01N3/20 , F01N3/28 , F01N13/02 , F01N13/04 , F02C7/00
CPC分类号： F01N3/2066 , B01D53/8625 , F01D25/305 , F01N1/10 , F01N3/2839 , F01N13/0097 , F01N13/017 , F01N2230/04 , F01N2290/04 , F01N2310/02 , F01N2330/08 , F01N2610/02 , F01N2610/1453 , Y02T10/24 , Y10S55/30

50. 发明专利

JPS5852392A COAL/WATER SLURRY DEASHING 失效
公开(公告)号：JPS5852392A
公开(公告)日：1983-03-28
申请号：JP14957381
申请日：1981-09-24
申请人： HITACHI LTD , BABCOCK HITACHI KK
发明人： KAJI RIYUUICHI , HISHINUMA TAKAO , NAKAJIMA FUMITO
IPC分类号： C10L1/32 , C10L5/00 , C10L9/00
摘要： PURPOSE:To increase a coal deashing rate by lowering the coal concn. of a high-concn. coal/water slurry with addition of water, wet milling the coal particle and separating a carbonaceous material from an ash followed by deashing. CONSTITUTION:Water 2 is added to a high-concn. coal/water slurry sent through a line 1 to lower the coal concn. below 40wt% and, after the slurry is made homogeneous in a mixing tank 4, the coal is milled to a particle size

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