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41. 发明专利

JPH06160202A TEMPERATURE SENSOR AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH06160202A
公开(公告)日：1994-06-07
申请号：JP30684792
申请日：1992-11-17
申请人： FUJITSU LTD
发明人： SUGAMA AKIO , SUZUKI HIROAKI
IPC分类号： G01K7/16 , G01K7/18 , G01K7/22
摘要： PURPOSE:To provide a sensor of superior mass productivity, by supporting with a plane substrate for support, a temperature-sensitive part formed by a thin plate resistor, and by covering the temperature-sensitive part with a plane board for protection directly joined to the surface of the plane substrate for support by anode junction. CONSTITUTION:In a fixed position on a plane substrate 3 for support, a temperature sensitive part 1 to which a conductive path 2 of a thin film is connected is patterned. A thin film resistor is made of metals of gold, platinum, nickel, etc., or a thermistor material. A plane board 4 for protection covering the temperature sensitive part 1 is joined on the surface of the substrate 3. The substrate 3 is, for example, made of glass, and the board 4, for example, silicon, a groove of a fixed shape is provided on either the substrate 3 or the board 4 by photolithography and etching, and the temperature sensitive part 1 and the conductive path 2 are received therein. In the junction of the substrate 3 and the board 4, they are piled together and heated at a fixed temperature, a fixed direct current voltage is applied between the substrate 3 and the board 4, and the so-called anode junction is carried out. By this, the enough bonding strength is obtained, and an adhesive also becomes useless. Thus, the mass production of sensors can be carried out.

42. 发明专利

JPH05230142A ADJUSTMENT OF PH OF POLYVINYL PYRROLIDONE AND POLYVINYL PYRROLIDONE HAVING PH ADJUSTED WITH SAME AND SCREEN PRINTING ELECTROLYTE COMPOSITION CONTAINING THE SAME AND OXYGEN ELECTRODE USING THE COMPOSITION AND ITS PRODUCTION 失效
公开(公告)号：JPH05230142A
公开(公告)日：1993-09-07
申请号：JP3212492
申请日：1992-02-19
申请人： FUJITSU LTD
发明人： SUGAMA AKIO
IPC分类号： G01N27/28 , C08F26/10 , G01N27/404
摘要： PURPOSE:To stably adjust the pH of polyvinyl pyrrolidone by dissolving the polyvinyl pyrrolidone in a buffer solution having a prescribed pH value and subsequently removing the buffer solution component from the solution. CONSTITUTION:Polyvinyl pyrrolidone is dissolved in a buffer solution having a prescribed pH value, and the buffer solution component is removed from the obtained solution preferably by a gel filtration method or by a dialysis method. The buffer solution may be that usually used as a pH buffer solution such as a phosphoric acid buffer solution, acetic acid buffer solution or a citric acid buffer solution. An electrolytic composition for screen printing is obtained by dispersing a fine powdery inorganic salt capable of passing through a mesh for screen printing in a polyvinyl pyrrolidine organic solvent solution controlled to the above-mentioned pH.

43. 发明专利

JPH04372626A PROCESS FOR BONDING FLUORORESIN FILM 失效
公开(公告)号：JPH04372626A
公开(公告)日：1992-12-25
申请号：JP15157391
申请日：1991-06-24
申请人： FUJITSU LTD
发明人： SUZUKI HIROAKI , KOJIMA NAOMI , SUGAMA AKIO
IPC分类号： C08J5/12 , B29C65/00 , C09J5/02
摘要： PURPOSE:To bond a fluororesin film firmly to a substrate by treating the surface of the film with a plurality of specified reagents and fusing this film to the substrate. CONSTITUTION:A process for bonding a fluororesin film (e.g. fluorinated ethylene/propylene copolymer film) to a substrate (e.g. silicon wafer) comprising treating the surface of the film with a reagent containing metallic sodium (e.g. Chemgrip, a product of Norton Co.) and then with a silane coupling agent (e.g. gamma-aminopropyltriethoxysilane) and fusing the treated film to the substrate.

44. 发明专利

JPH04350551A ELECTROLYTIC COMPOSITION FOR SCREEN PRINTING 失效
公开(公告)号：JPH04350551A
公开(公告)日：1992-12-04
申请号：JP12381191
申请日：1991-05-28
申请人： FUJITSU LTD
发明人： SUGAMA AKIO , SUZUKI HIROAKI , KOJIMA NAOMI
IPC分类号： G01N27/404
摘要： PURPOSE:To achieve a smaller size and volume producibility by forming an electrolytic composition for screen printing from a halogen ion salt of quaternary ammonia, a metal ion salt of sulfonic acid or the like and an organic solvent to allow batch filling of an electrolyte. CONSTITUTION:A salt of quaternary ammonia or sulfonic acid and an organic solvent such as polyvinyl pyrolidone or butanol are arranged to form a paste- like electrolytic composition. The quaternary ammonia salt and sulfonate are strong in alkali and acid and exist as ions almost completely in an aqueous solution. Hence, there is no problem in the use of the electrolytic composition as electrolytic for an oxygen electrode. Through water soluble, the composition has a hydrocarbon residual with a high hydrophobic property and can be dissolved in various organic solvents as well. Thus, the composition can be used in the form of a solution for an organic solvent in screen printing and in the form of an aqueous solution when used as oxygen electrode after the formation of a gas permeating film. Applicability for various kinds of organic solvents allows adaptation to various conditions of screen printing.

45. 发明专利

JPH03176657A INTEGRATED TYPE SENSOR AND PRODUCTION THEREOF 失效
公开(公告)号：JPH03176657A
公开(公告)日：1991-07-31
申请号：JP31672989
申请日：1989-12-06
申请人： FUJITSU LTD
发明人： SUZUKI HIROAKI , TAKEI FUMIO , SUGAMA AKIO , KOJIMA NAOMI
IPC分类号： G01N27/404 , G01N27/327
摘要： PURPOSE:To allow the mass production of integration type biosensors which are integrated by joining the sensors of the same kinds or different kinds to each other on the rear surface of a substrate. CONSTITUTION:The integration type sensor is constituted by joining the sensors of the same kinds or the different kinds to each other on the rear surface of the substrate by combining, for example, plural enzyme electrodes 18 or oxygen electrodes 16. Namely, a wafer is immersed into an aq. soln. of 50% HF:40% NH4F=1:6 after the end of anisotropic etching to remove the SiO2 film used at the time of the etching. The wafer is then throughly washed with boiled pure water after washing for 5 minutes in the soln. of H2SO4:H2O2=2:1 to impart hydrophilicity to an Si substrate and to adhere a hydroxyl group (OH, etc.) to the Si atom on the surface. The H2O is taken by the dehydration condensation reaction of 20H O+H2O when the wafer is heated for 3 hours at 1000 deg.C in an N2 atmosphere in the state in which the OH groups attract to each other. The secure joining of Si-O-Si is thus executed. Thus, the crosstalks between the sensor phases are eliminated and the small-sized integration sensors are easily produced in a large quantity.

46. 发明专利

JPH0341353A PRODUCTION OF SMALL-SIZED OXYGEN ELECTRODE 失效
公开(公告)号：JPH0341353A
公开(公告)日：1991-02-21
申请号：JP17617389
申请日：1989-07-07
申请人： FUJITSU LTD
发明人： SUZUKI HIROAKI , TAKEI FUMIO , SUGAMA AKIO , KOJIMA NAOMI
IPC分类号： G01N27/404
摘要： PURPOSE:To easily form the electrode pattern present so as to extend to the bottom part of the groove of a substrate from the surface of said substrate, to improve yield and to make the mass production of an electrode possible by using a substrate whose surface is roughened at least in its electrode responsive part forming region as a semiconductor substrate. CONSTITUTION:As a semiconductor substrate 1, a substrate whose surface is roughened at least in its electrode responsive part forming region is used. A hole 5 is formed to the semiconductor substrate 1 by anisotropic etching. Electrodes 3A, 3B becoming a cathode and an anode reaching to the surface of the substrate 1 from the bottom part of the hole 5 are formed through an insulating film 2. Subsequently, the hole 5 is filled with an electrolyte-containing porous substance 6. A gas permeable film 14 covering the electrolyte-containing porous substance 6 is formed to the surface of the substrate 1 excepting the exposed parts of the electrodes 3A, 3B. By this method, since the adhesion of the resist 4 and the substrate 1 is improved, the formation of the patterns of the electrodes 3A, 3B extending to the bottom part of the hole 5 from the surface of the substrate becomes easy and the mass production of electrodes becomes possible with reduced labor.

47. 发明专利

JPH02284054A FORMATION OF ENZYME MEMBRANE FOR BIOSENSOR 失效
公开(公告)号：JPH02284054A
公开(公告)日：1990-11-21
申请号：JP10506489
申请日：1989-04-25
申请人： FUJITSU LTD
发明人： KOJIMA NAOMI , TAKEI FUMIO , SUGAMA AKIO , SUZUKI HIROAKI
IPC分类号： G01N27/414
摘要： PURPOSE:To form the enzyme membrane with good positional accuracy by mounting pens for drafting packed with aq. enzyme solns. in an X-Y recorder and scanning the pens in the electrode regions on an Si substrate, thereby applying the solns. to these regions. CONSTITUTION:The X-Y recorder is used for the driving regions consisting of the source regions, drain regions and gate electrode regions of many FETs formed on the Si wafer and the pens 4 for drafting packed with the aq. enzyme solns. are used. The pens 4 are driven by a microcomputer to apply the aq. enzyme solns. to the driving regions of the FET electrodes. For example, the Si wafer 6 patterned and formed with the many FETs is positioned to the X-Y recorder 5 equipped with two pieces of the pens 4 packed with the respectively different aq. enzyme solns. The respectively different aq. enzyme solns. are applied to the electrode regions of the FET elements as very small as about 0.3X1mm in size by driving two pieces of the pens 4 by the microcomputer. The membrane formation is executed with the good positional accuracy in this way and the yield of the production is improved.

48. 发明专利

JPH02115292A METHOD FOR RENDERING CONTAINER FOR AQUEOUS SOLUTION HYDROPHOBIC 失效
公开(公告)号：JPH02115292A
公开(公告)日：1990-04-27
申请号：JP26753388
申请日：1988-10-24
申请人： FUJITSU LTD
发明人： TAKEI FUMIO , SUZUKI HIROAKI , SUGAMA AKIO , KOJIMA NAOMI
IPC分类号： C03C17/30 , C03C27/10 , C09K3/18
摘要： PURPOSE:To obtain a container in which, when a protein or the like is crystallized from an aqueous solution, a crystal of the protein or the like can grow larger in good yields in that part of the solution which is distant from the wall without wetting it by subjecting the inside of the container to a specified treatment. CONSTITUTION:The inside of a container for an aqueous solution is coated with a pressure-sensitive adhesive (e.g., polyvinyl butyrate of a degree of polymerization of 700) and roughened by spraying an insoluble particulate substance (e.g., glass beads of a diameter of 200mum) on it and fixing them. This surface is rendered hydrophobic by coating with a hydrophobic agent (e.g., dichlorodimethylsilane).

49. 发明专利

JPH0277653A COMPACT DEVICE FOR MEASURING AND RECORDING ACCELERATION 失效
公开(公告)号：JPH0277653A
公开(公告)日：1990-03-16
申请号：JP15829389
申请日：1989-06-22
申请人： FUJITSU LTD
发明人： TAKEI FUMIO , HATAYA TAKAFUMI , FUJITA SHOZO , ASANO TAKAHARU , SUZUKI HIROAKI , SUGAMA AKIO , KOJIMA NAOMI
IPC分类号： G01P15/00 , G01P1/12 , G01P1/16 , G01P15/18
摘要： PURPOSE:To mount minute change in time of acceleration applied to an object in a kinetic system the same as that of the object to be measured and recorded by a method wherein optional data is written into a specific address of a RAM and this is read out to be checked against the written data. CONSTITUTION:A device is constituted of servo-type acceleration sensors 11a to 11c which are advantageous in reducing size and improving accuracy, an A/D converter 12, a CPU 13, an LED indicator and control switch 16, four static RAMs 14 serving as external auxiliary recording blocks, etc. Since simultaneously measurement in three-dimensional directions is important in measurement of acceleration, three acceleration sensors 11a to 11c are used while they are located orthogonal to one another. Their outputs are synchronized with sampling signals and stored in sample and hold circuits 17a to 17c, and then A/D-converted 12 then to be converted into numerals sequentially. In order to widen a dynamic range of the measurement, variable gain amplifiers 18a to 18c have been interposed between the sensors 11a to 11c and the circuits 17a to 17c. The CPU 13 proceeds with all of the measurement procedures according to a program written into a ROM.

50. 发明专利

JPH0227253A SMALL-SIZED OXYGEN ELECTRODE 失效
公开(公告)号：JPH0227253A
公开(公告)日：1990-01-30
申请号：JP17697688
申请日：1988-07-18
申请人： FUJITSU LTD
发明人： SUZUKI HIROAKI , TAKEI FUMIO , SUGAMA AKIO , KOJIMA NAOMI
IPC分类号： G01N27/404 , G01N27/30
摘要： PURPOSE:To enable a reduction in scattering of a response value by covering at least a back of a substrate with a hydrophobic insulation film to make it hard to be affected by a noise. CONSTITUTION:An Si substrate 1 has a hole 5 formed by an anisotropic etching and the entire surface thereof is covered with an SiO2 film 2 as insulation film. Moreover, the back of the substrate 1 is covered with a hydrophobic insulation film 7 hard to break. Gold electrodes 3A and 3B are applied on the hole 5 in a pair and parts thereof are extended to the outside of a groove. The hole 5 is filled with a porous material (gel) 6 containing an electrolyte. Moreover, the top of the hole 5 is covered with a gas permeating film 14 in such a manner as to cover the entire surface (expect for an exposed part) of the top of the substrate 1. This insulation film is made up of a negative type photoresist applied by a dip coating to cover both the side and back of the substrate 1. That is, a cell forming an oxygen electrode is electrically isolated completely from the outside world comprising an aqueous solution.

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