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    • 37. 发明专利
    • SUSCEPTOR AND METHOD FOR PRODUCING THE SAME
    • JP2001287982A
    • 2001-10-16
    • JP2000103665
    • 2000-04-05
    • SUMITOMO OSAKA CEMENT CO LTD
    • OTSUKA TAKASHIKAWASE TAKESHI
    • C04B35/10C04B35/00C04B35/56C23C16/458
    • PROBLEM TO BE SOLVED: To obtain a susceptor capable of surely electrifying an internal electrode built in the susceptor itself. SOLUTION: Fixation holes 16 and 16 are perforated in a supporting board 13, and then power-feeding terminals 14 and 14 made of one of an electrically conductive alumina-tantalum carbide compound sintered compact, an electroconductive alumina-tungsten compound sintered compact and an electroconductive alumina-silicon carbide compound sintered compact are fixed in such a way as to pierce the board 13. After that, a coating material made of one of electroconductive composite materials selected from the group consisting of an electroconductive alumina-tantalum carbide composite material, an electroconductive alumina-tungsten composite material and an electroconductive alumina-silicon carbide composite material is applied to the surface of the board 13 in such a way as to contact with the terminals 14, followed by drying the coating material. Then, the board 13 and a mounting board 11 are stacked through the coated surface and are heat-treated under pressurization to be integrated and also to form an internal electrode 12 made of an electroconductive compound sintered compact corresponding to the above electroconductive composite material.