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31. 发明专利

JPH10253683A APPARATUS FOR INSPECTING SUBSTRATE 失效
公开(公告)号：JPH10253683A
公开(公告)日：1998-09-25
申请号：JP7276297
申请日：1997-03-11
申请人： MICRONICS JAPAN CO LTD
发明人： HIRAI YUKIHIRO , IKEUCHI HIDEKI , HASEGAWA MASASHI
IPC分类号： G01R31/02 , G01R31/00
摘要： PROBLEM TO BE SOLVED: To reduce deflection of a substrate by providing substrate bearers to be displaced to a protruding position protruding from a substrate support to a lifter of a non-protruding position at four or more positions in an extending direction parallel to the substrate supported to a table. SOLUTION: Lifters 48 are disposed on a table 44 to lift up or down a substrate 12 to or from the table 44. The lifters 48 have a plurality of substrate bearers 50 projectable from or retractable to an upper surface of the table 44. The bearers 50 are disposed, for example, of each four at point symmetrically on two diagonal lines of the substrate on the table 44 so that upper ends are displaced to positions protruding from an upper surface of the table 44 or retracting to the surface of the table 44. Therefore, the bearers 50 function as the bearers for receiving the substrate 12. Thus, since not only both the ends of the substrate 12 but also intermediate part are received, the substrate 12 is not largely deflected at the time of being received, and the substrate 12 can be stably inspected and transported.

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