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31. 发明专利

JP2009164457A Apparatus and method for controlling pressure 有权
标题翻译：用于控制压力的装置和方法
公开(公告)号：JP2009164457A
公开(公告)日：2009-07-23
申请号：JP2008002102
申请日：2008-01-09
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： KINOUCHI MASAHITO , GOTO TAKAYUKI , TAWARA SATOSHI , TSUNO TAKESHI , UCHIUMI ATSUSHI , IDE KENSUKE , SUZUKI KITEN
IPC分类号： H01L21/02
CPC分类号： B32B37/1009 , B23K20/02 , B32B37/10 , B32B2309/68 , H01L21/187 , H01L21/2007 , H01L21/67092 , H01L21/67253
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and method for controlling pressure capable of accurately controlling the pressure in a chamber. SOLUTION: The apparatus comprises an exhaust device 24 for exhausting gas from a chamber 2; a gas supplying device 25 for supplying an introducing gas into the chamber 2; a pressure gauge 23 for measuring pressure in the chamber 2; and a pressure controller 22. The pressure controller 22 controls a gas-exhaust speed of gas exhausted from the chamber 2 by the exhaust device 24 based on target pressure, and a supply flow rate of the introducing gas supplied into the chamber 2 by the gas supplying device 25 based on a measured pressure such that the pressure in the chamber 2 corresponds with the target pressure. The pressure control apparatus 21 can control the pressure in the chamber 2 highly precisely in a further wide range compared with the case that either the gas supplying device 25 or the exhaust device 24 is controlled. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于控制能够精确地控制室中的压力的压力的装置和方法。解决方案：该装置包括用于从腔室2排出气体的排气装置24; 用于将引入气体供给到室2中的气体供给装置25; 用于测量室2中的压力的压力计23; 和压力控制器22.压力控制器22基于目标压力控制由排气装置24从室2排出的气体的排气速度，以及通过气体供给到室2中的导入气体的供给流量基于测量的压力使得腔室2中的压力对应于目标压力。与控制气体供给装置25或排气装置24的情况相比，压力控制装置21能够在更大范围内高精度地控制室2内的压力。版权所有（C）2009，JPO＆INPIT

32. 发明专利

JP2007324195A Device formed with room temperature bonding, method for manufacturing device, and room temperature bonding apparatus 有权
标题翻译：与室温结合形成的装置，制造装置的方法和室温结合装置
公开(公告)号：JP2007324195A
公开(公告)日：2007-12-13
申请号：JP2006149896
申请日：2006-05-30
申请人： Mitsubishi Heavy Ind Ltd , National Institute Of Advanced Industrial & Technology , 三菱重工業株式会社 , 独立行政法人産業技術総合研究所
发明人： UCHIUMI ATSUSHI , GOTO TAKAYUKI , IDE KENSUKE , FUNAYAMA MASAHIRO , TAKAGI HIDEKI
IPC分类号： H01L21/02
CPC分类号： B32B38/0008 , B23K20/02 , B23K20/22 , B32B37/14 , B32B2457/00 , B81C3/001 , B81C2203/032 , C23C14/14 , C23C14/3414 , C23C14/58 , Y10T428/31678
摘要： PROBLEM TO BE SOLVED: To provide a device that can be obtained by bonding a substrate formed of an unbondable material (for example, SiO 2 system material substrate) in the actual bonding strength with room temperature bonding process, and also to provide a method for manufacturing the same device. SOLUTION: An intermediate material layer 28 generating a bonding strength is formed at an interface 27 between a first substrate 11 and a second substrate 12, and a plurality of metal elements are included in this intermediate material layer. An existing ratio of a plurality of metal elements at the interface is controlled to 0.07 or more with an operation parameter during the sputtering process. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以通过将由不可键合材料（例如，SiO 2 系统材料基板）形成的基板以实际的接合强度与室温接合工艺，并且还提供用于制造相同装置的方法。解决方案：在第一基板11和第二基板12之间的界面27处形成产生接合强度的中间材料层28，并且在该中间材料层中包括多个金属元素。在溅射过程中，通过操作参数将界面处的多个金属元素的现有比率控制在0.07以上。版权所有（C）2008，JPO＆INPIT

33. 发明专利

JP2007156604A Curved surface creation method, curved surface creation program and three-dimensional shape processor 有权
标题翻译：弯曲表面创建方法，弯曲表面创建程序和三维形状处理器
公开(公告)号：JP2007156604A
公开(公告)日：2007-06-21
申请号：JP2005347705
申请日：2005-12-01
申请人： Mitsubishi Heavy Ind Ltd , Pal Kozo:Kk , 三菱重工業株式会社 , 株式会社パル構造
发明人： MIURA MASAMI , IDE KENSUKE , NAKAHAMA TAKESHI , NAKAHARA YOSHISATO , KONO TAKAYUKI , SATO HIROMASA , IZUMI MITSUHIKO
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To provide a curved surface creation method and a program and a three-dimensional shape processor for reducing data quantity, and for creating a curved surface with high precision.
SOLUTION: This curved surface creation method for creating a curved surface from a cross-sectional curve group is provided with a normal calculation process for calculating a normal at a plurality of reference points set on each cross-sectional curve of the cross-sectional curve group and a curved surface creation process for creating a curved surface by using the normal.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于减少数据量并且用于以高精度创建曲面的曲面创建方法和程序以及三维形状处理器。＆lt; P＆gt;解决方案：用于从横截面曲线组创建曲面的该曲面形成方法具有用于计算在横截面曲线组的每个横截面曲线上设定的多个参考点处的法线的正常计算处理，剖面曲线组和用于通过使用法线产生曲面的曲面创建过程。版权所有（C）2007，JPO＆INPIT

34. 发明专利

JP2007156603A Shape correction method and shape correction program and three-dimensional shape processor 有权
标题翻译：形状校正方法和形状校正程序和三维形状处理器
公开(公告)号：JP2007156603A
公开(公告)日：2007-06-21
申请号：JP2005347704
申请日：2005-12-01
申请人： Mitsubishi Heavy Ind Ltd , Pal Kozo:Kk , 三菱重工業株式会社 , 株式会社パル構造
发明人： MIURA MASAMI , ABE TOSHIO , KAWASETSU NOZOMI , IDE KENSUKE , NAKAHAMA TAKESHI , KONO TAKAYUKI
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To accurately express a three-dimensional shape by replacing a non-applicable surface with a primitive shape whose controlled variables are properly set.
SOLUTION: A non-applicable surface and an adjacent curved surface adjacent to the non-applicable surface are extracted from an object model, and a primitive shape having the same characteristics as those of the non-applicable surface is extracted from among a plurality of preregistered primitive shapes based on the extracted non-applicable features. Then, the non-applicable surface is replaced with the primitive shape, and the controlled variables of the primitive shape are adjusted so that the outer circumference of the replaced primitive shape can be matched with the outer circumference of the adjacent curved surface.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过用适当设定受控变量的原始形状替换不适用的表面，来准确地表达三维形状。解决方案：从对象模型中提取与不适用表面相邻的不适用表面和相邻弯曲表面，并且从不可应用表面提取具有与不可应用表面相同特征的原始形状基于所提取的不适用特征的多个预先注册的原始形状。然后，用原始形状代替不适用的表面，并且调整原始形状的受控变量，使得替换的原始形状的外圆周可以与相邻曲面的外周匹配。版权所有（C）2007，JPO＆INPIT

35. 发明专利

JP2006268188A Curved surface generation method, program, and three-dimensional shape processor 有权
标题翻译：弯曲表面生成方法，程序和三维形状处理器
公开(公告)号：JP2006268188A
公开(公告)日：2006-10-05
申请号：JP2005082656
申请日：2005-03-22
申请人： Mitsubishi Heavy Ind Ltd , Pal Kozo:Kk , 三菱重工業株式会社 , 株式会社パル構造
发明人： MIURA MASAMI , IDE KENSUKE , KONO TAKAYUKI , MATSUKUMA MASAYUKI , KISHIKAWA SHINOBU , KUSHIYAMA MASUKO , NAKAHAMA TAKESHI , IZUMI MITSUHIKO
IPC分类号： G06F17/50 , G06T17/30
CPC分类号： G06T17/30
摘要： PROBLEM TO BE SOLVED: To provide a curved surface generation method, program and three-dimensional shape processor for reducing the amount of data, and for generating a curved surface with high precision.
SOLUTION: This curved surface generation method for generating a curved surface from a dot group obtained as the shape measurement result of an object is provided with a representative point selection process for selecting a plurality of representative points from the dot group, a main curvature calculation process for calculating the main curvature of the representative point based on a positional relation between the representative point and a plurality of points existing around the representative point, a curvature line preparation process for preparing a curvature line based on the main curvature at the representative point and a curved surface preparation process for generating a curve surface by using the curvature line.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于减少数据量并且用于高精度地生成曲面的曲面生成方法，程序和三维形状处理器。解决方案：用于从作为对象的形状测量结果获得的点组生成曲面的曲面生成方法设置有用于从点组中选择多个代表点的代表点选择处理，主要基于代表点与代表点周围存在的多个点之间的位置关系来计算代表点的主曲率的曲率计算处理，基于代表点的主曲率准备曲率线的曲率线准备处理点和用于通过使用曲率线产生曲面的曲面准备处理。版权所有（C）2007，JPO＆INPIT

36. 发明专利

JP2006186091A SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
公开(公告)号：JP2006186091A
公开(公告)日：2006-07-13
申请号：JP2004377734
申请日：2004-12-27
申请人： MITSUBISHI HEAVY IND LTD
发明人： WADA TARO , IDE KENSUKE , FUNAYAMA MASAHIRO
IPC分类号： H01L25/18 , H01L25/065 , H01L25/07 , H05K1/14 , H05K3/36
摘要： PROBLEM TO BE SOLVED: To suppress an increase or the like in manufacturing costs, and to obtain high junction properties and an improved sealing state in a semiconductor device, such as a multilayer semiconductor device, and to provide a method for manufacturing the semiconductor device. SOLUTION: The semiconductor device comprises a first substrate 2 that has a first device 1 while a first bump electrode 6 is formed on the surface; a second substrate 4 that has a second device 3 while a second bump electrode 10 is formed on the surface, and the first bump electrode 6 is joined to the second bump electrode 10 for lamination on the first substrate 2; and a first sealing jointing material 8 and a second sealing joining material 12 that are interposed between the first substrate 2 and the second substrate 4 for joining them while surrounding the first bump electrode 6 and the second bump electrode 10 in the joined state, and seal the internal space in an airtight state. COPYRIGHT: (C)2006,JPO&NCIPI

37. 发明专利

JPH095067A SHAPE MEASURING METHOD 失效
公开(公告)号：JPH095067A
公开(公告)日：1997-01-10
申请号：JP15572695
申请日：1995-06-22
申请人： MITSUBISHI HEAVY IND LTD , TOYOTA MOTOR CORP
发明人： IDE KENSUKE , SANNOKIYOU HIROSHI , MICHIHASHI MASATOSHI , KITAYAMA TADASHI
IPC分类号： G01B5/20 , G01B5/008 , G01B21/20 , G06F17/40
摘要： PURPOSE: To automatically measure a shape so as to improve the measuring efficiency by finding intersections between character line data and a plurality of cross sectional line data, both of which are already measured, and a measured cross section, and moving a three-dimensional measuring device while assuming the line connecting the intersections together as a measured cross sectional shape of a model. CONSTITUTION: When character line data and a plurality of cross sectional line data for an automobile model are inputted to an intersection computing unit 21, the computing unit 21 computes intersections between the character line data and measured cross section data and between the plural cross sectional line data and the measured cross section data. By means of an intersection rearranging unit 22, measurement data are rearranged according to a measurement procedure, and by means of a locus generating unit 23, a locus connecting the found intersections together is generated as an automatic measurement locus. By means of a correction command inputting unit 25, correction data for a shape rapid deformation part or an unmeasured part on the automobile mode are inputted to a locus correcting unit 24 according to a command from an operator, and by means of the correcting unit 24, the measurement locus is corrected according to an instruction of the correction data.

38. 发明专利

JPH08150540A INTERFERENCE PREVENTING DEVICE FOR MACHINE TOOL 失效
公开(公告)号：JPH08150540A
公开(公告)日：1996-06-11
申请号：JP29429694
申请日：1994-11-29
申请人： MITSUBISHI HEAVY IND LTD
发明人： IDE KENSUKE
IPC分类号： B23Q15/00 , G05B19/4093
摘要： PURPOSE: To prevent a tool or a machine from interfering with a work without lowering the machining efficiency. CONSTITUTION: Depending on the shape of a raw material, the shape to be formed, stored in a work shape storage unit 23, the shape of a machine side member, stored in a shape memory unit 25, and the movement of the machine side member commanded by a NC program interpreter 12, are inputted to an interference detector 24. The interference detector 24 judges the interference between the work and the machine side member to input a new shape to be formed, judged by a work shape renewing unit 26 to the work shape storage unit 23 as a newly commanded shape to be formed. Thus, the interference between a tool or a machine and the work can be prevented lowering the machining efficiency.

39. 发明专利

JPH04130210A THREE-DIMENSIONAL SHAPE MEASURING METHOD 失效
公开(公告)号：JPH04130210A
公开(公告)日：1992-05-01
申请号：JP25006390
申请日：1990-09-21
申请人： MITSUBISHI HEAVY IND LTD
发明人： IDE KENSUKE
IPC分类号： G01B11/24 , G01B21/20
摘要： PURPOSE:To make it possible to obtain a point on a character line intended by a designer by detecting the cut part of an arc (R) part in the vicinity of the character line, smoothly extending the shapes on both sides other than the R part, and obtaining the intersection. CONSTITUTION:An R-part measuring means 1 detects a most externally extending point among a measured data. The radius of curvature of the R part is obtained based on two points of the data in the vicinity of the point. An R-stop-point judging means 2 obtains the radius of curvature based on neighboring three points sequentially. At this time, the most externally extending point obtained with the means 1 is made to be a starting point. The point where the difference occurs by a specified value or more from the radius of curvature obtained with means 1 is made to be a R stop point (b), and discrimination is performed. Furthermore, a non-R-part-function approximating means 3 approximates the shape of a non-R part (d) based on the several points of the measured data of both non-R part on the outside from the R stop point obtained with the means 2. An R-part extending means 4 extends the function obtained with the means 3 on the side of a character line from the R-stop point. An intersection operating means 5 obtains the intersection of both non-R-part functions obtained with the means 4. This is the character line point to be obtained.

40. 发明专利

JPH03249507A THREE-DIMENSIONAL SHAPE RECOGNIZER 失效
公开(公告)号：JPH03249507A
公开(公告)日：1991-11-07
申请号：JP4581490
申请日：1990-02-28
申请人： MITSUBISHI HEAVY IND LTD
发明人： IDE KENSUKE , MASUDA KENJI
IPC分类号： G01B11/24
摘要： PURPOSE:To realize the three-dimensional shape recognizer which can accurately recognize the shape of an object to be measured even if a virtual image is formed by deciding a real image and a virtual image according to the peak value and width of each ridge of a light intensity distribution at right angles to the length direction of the slit light of inputted image data. CONSTITUTION:A slit light generator 3 irradiates the object 2 to be measured with the slit light 4 while moved crossing a plane parallel to the slit light 4, and an image formed on the object 2 to be measured is photographed by a camera 5. Then the light intensity distribution is found in a direction R-R' crossing the length direction of the slit light at right angles is found according to image data inputted to an image fetch device 6 to find the peak value P and width W of each ridge, the image having the largest evaluated value P/W is judged as a real image I while other images are judged as virtual images II, and the result is supplied to a coordinate computing element 7. The coordinate computing element 7 performs specific arithmetic by using the data judges as the real image to recognize the shape of the object 2.

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