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    • 32. 发明专利
    • Scanning probe device and driving stage for same
    • 扫描探针设备和驱动阶段
    • JP2007171021A
    • 2007-07-05
    • JP2005370094
    • 2005-12-22
    • Canon Incキヤノン株式会社
    • YOSHIMATSU NOBUOKIKUSAKA TAKAOYASUDA SUSUMUSEKI JUNICHI
    • G01Q20/02G01B21/30G01Q10/04G01Q30/00G01Q60/00
    • G01Q10/02G01Q70/04
    • PROBLEM TO BE SOLVED: To secure a movable range of a movable part which is a counter mass; to compensate an inertia force always excellently; and to suppress vibration of a support and vibration of a sample or a probe. SOLUTION: A driving stage for deriving the sample or the probe has a counter driving element 500 for moving the probe 1 or a sample holding stand 505, and the movable parts 515, 510 moving in the compensating direction of the inertia force generated when the probe or the sample holding stand is moved. A scanning probe device has a characteristic wherein the movable parts 515, 510 are provided outside the counter driving element 500 so as to enclose the driving element. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:确保作为反质量块的可移动部件的可移动范围; 总是能够很好地补偿惯性力; 并且抑制支撑体的振动和样品或探针的振动。 解决方案:用于导出样品或探针的驱动级具有用于移动探针1或样品保持架505的计数器驱动元件500,以及产生的惯性力的补偿方向上移动的可动部515,510 当探头或样品保持架移动时。 扫描探针装置具有这样的特征,其中可动部分515,510设置在反向驱动元件500的外侧,以封闭驱动元件。 版权所有(C)2007,JPO&INPIT
    • 34. 发明专利
    • Micro-actuator
    • 微致动器
    • JP2005169553A
    • 2005-06-30
    • JP2003412005
    • 2003-12-10
    • Canon Incキヤノン株式会社
    • SHIMADA YASUHIROYASUDA SUSUMU
    • G02B26/10B81B3/00
    • PROBLEM TO BE SOLVED: To provide a micro-actuator for non-resonant driving, small in low power consumption and capable of increasing generated torque while causing no mechanical interference between a movable plate and a driving means in large displacement where large torque is required.
      SOLUTION: This micro-actuator has the movable plate 1; a support board 3; a pair of elastic support parts 2 for supporting the movable plate in a torsionally rotatable manner around a rotating shaft 7 to the support board; a movable magnet 4 formed at the movable plate and formed of a permanent magnet; and electromagnetic coils 11 deflecting the movable plate in the torsionally rotating direction by the magnetic field. The electromagnetic coils 11 are disposed to have tilt angles in the torsionally rotating direction of the movable plate with respect to an axis perpendicular to the movable plate in the stationary state of the center axis without the magnetic field.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种用于非谐振驱动的微型致动器,其功率小,能够增加产生的转矩,同时在大的位移下的可动板和驱动装置之间不产生机械干扰 是必须的。

      解决方案:该微型致动器具有可动板1; 支撑板3; 一对弹性支撑部件2,用于将可动板以可旋转的方式围绕旋转轴7支撑到支撑板; 形成在可动板上并由永磁体形成的可动磁体4; 电磁线圈11通过磁场使可动板沿扭转方向偏转。 电磁线圈11被设置为在中心轴的静止状态下,在没有磁场的情况下,相对于垂直于可动板的轴线在可动板的扭转方向上具有倾斜角。 版权所有(C)2005,JPO&NCIPI

    • 35. 发明专利
    • Drive stage, scanning probe microscope, information recording and reproducing device, and machining device
    • 驱动阶段,扫描探针显微镜,信息记录和再现装置以及加工装置
    • JP2008175823A
    • 2008-07-31
    • JP2008022378
    • 2008-02-01
    • Canon Incキヤノン株式会社
    • YASUDA SUSUMUSEKI JUNICHISHITO SHUNICHI
    • G12B5/00G01Q10/04G01Q70/00G11B9/00H01L41/09H02N2/02
    • H02N2/028G01Q10/04G11B9/1418H02N2/025Y10S977/872
    • PROBLEM TO BE SOLVED: To provide a compact and light-weighted drive stage capable of reducing vibration even when scanned at a high speed, a scanning probe microscope (SPM) having the drive stage and capable of acquiring quickly a clear image, an information recording and reproducing device of hardly generating an error caused by the vibration even when recording and reproducing information quickly, and a machining device capable of preventing precision from getting worse even when machined at a high speed. SOLUTION: The drive stage includes a support, at least two or more of a plurality of movable parts supported by the support, and one or more of actuators for driving the plurality of movable parts, and is constituted to drive the plurality of movable parts along directions of offsetting each other inertia forces generated in the plurality of respective movable parts, when driving the actuator. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:即使在高速扫描的情况下,即使具有驱动级并能够快速获取清晰图像的扫描探针显微镜(SPM),也能够提供即使在高速扫描的情况下也能够减轻振动的紧凑且重量轻的驱动台, 即使在快速记录和再现信息时也几乎不产生由振动引起的误差的信息记录和再现装置,以及即使在高速加工时也能够防止精度变差的加工装置。 解决方案:驱动台包括支撑件,由支撑件支撑的多个可移动部件中的至少两个或更多个以及用于驱动多个可移动部件的一个或多个致动器,并且构造成驱动多个 在驱动致动器时,可移动部件沿着在多个可移动部件中产生的彼此偏移的惯性力的方向移动。 版权所有(C)2008,JPO&INPIT
    • 36. 发明专利
    • Optical scanning system and image forming apparatus using the same
    • 光学扫描系统和使用它的图像形成装置
    • JP2008003530A
    • 2008-01-10
    • JP2006198159
    • 2006-07-20
    • Canon Incキヤノン株式会社
    • ISHIBE YOSHIHIROKATO TAKAHISAYASUDA SUSUMU
    • G02B26/10B41J2/44G02B17/08H04N1/036
    • G02B26/105G02B26/0833H04N1/02815
    • PROBLEM TO BE SOLVED: To provide an optical scanning system and an image forming apparatus having small size but capable of attaining high-quality image outputs. SOLUTION: In the optical scanning system, the deflecting surface is reciprocatingly moved to reciprocatingly scan the surface in the main scan direction with the light beam deflected by the deflecting surface, wherein a first direction refers to a direction of a phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle of the same corresponding to a largest scan position in an effective scan region, the phase difference being produced as a result of reflection of the light beam by the deflection surface, while a second direction refers to a direction of the phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle thereof, the phase difference being produced as a result of transmission of the light beam through the imaging optical system, and wherein at least one optical system inside the imaging optical system is provided with at least one optical surface of non-arcuate shape in a main scan section, so as to assure that the first and second directions are made opposite to each other. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种光学扫描系统和具有小尺寸但能够获得高质量图像输出的图像形成装置。 解决方案:在光学扫描系统中,偏转表面被往复运动,以使由偏转表面偏转的光束在主扫描方向上往复扫描表面,其中第一方向指的是相位差的方向 在与有效扫描区域中的最大扫描位置对应的有效偏转角的偏转表面反射的光束的边缘射线和主射线之间的主扫描方向上的波前像差,相位差被产生为 偏转表面反射光束的结果,而第二方向是指由偏转表面反射的光束的边缘射线和主光线之间的主扫描方向上的波前像差的相位差的方向 在其有效偏转角处,由于光束的传播而产生相位差 所述成像光学系统,并且其中所述成像光学系统内的至少一个光学系统在主扫描部分中设置有至少一个非弓形形状的光学表面,以便确保所述第一和第二方向相反 对彼此。 版权所有(C)2008,JPO&INPIT
    • 37. 发明专利
    • Driving stage in scanning probe microscope, and the scanning probe microscope
    • 扫描探针显微镜中的驱动阶段和扫描探针显微镜
    • JP2007333724A
    • 2007-12-27
    • JP2007038885
    • 2007-02-20
    • Canon Incキヤノン株式会社
    • SEKI JUNICHIYASUDA SUSUMUKUSAKA TAKAOYOSHIMATSU NOBUOKI
    • G01Q10/04G01Q10/06G01Q90/00
    • G01Q70/04G01Q10/04
    • PROBLEM TO BE SOLVED: To provide a driving stage in a scanning probe microscope for reducing generated vibration, without being effected by changes in the mass of a movable section and changes in the characteristics of a drive element, and to provide the scanning probe microscope. SOLUTION: The drive stage is provided with a support 101; at least two or more movable sections 102, 103 fixed to the support; two or more drive elements 106, 107 for driving a plurality of the movable sections; an inertial force difference detecting means 190 for detecting the differences in inertial forces between a plurality of the movable sections; and an inertial force adjusting means 192 for adjusting so as to reduce the difference of the inertial forces between a plurality of the movable sections, based on a detection output from an acceleration sensor. The drive stage is provided in the scanning probe microscope and driven in the direction for mutually canceling the inertial forces in a plurality of the movable sections, when the drive elements are driven. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了在扫描探针显微镜中提供用于减少产生的振动的驱动阶段,而不受可移动部分的质量的变化和驱动元件的特性的变化的影响,并且提供扫描 探针显微镜。 解决方案:驱动级设置有支撑件101; 至少两个或更多个可移动部分102,103固定到支撑件上; 用于驱动多个可移动部分的两个或更多个驱动元件106,107; 用于检测多个可动部之间的惯性力差的惯性力差检测装置190; 以及惯性力调节装置192,用于根据加速度传感器的检测输出进行调节,以减少多个可动部之间的惯性力差。 驱动级设置在扫描探针显微镜中,并且在驱动驱动元件时沿驱动方向驱动,以相互抵消多个可动部中的惯性力。 版权所有(C)2008,JPO&INPIT
    • 38. 发明专利
    • Scanning probe device
    • 扫描探测器
    • JP2007205856A
    • 2007-08-16
    • JP2006024686
    • 2006-02-01
    • Canon Incキヤノン株式会社
    • YASUDA SUSUMUSEKI JUNICHIKUSAKA TAKAOYOSHIMATSU NOBUOKI
    • G01B21/30G01Q10/00G01Q10/04
    • G01Q70/04
    • PROBLEM TO BE SOLVED: To provide a scanning probe device that does not require calibration labor by an operator whenever a scan stage or a driving stage of a probe is replaced, and can suitably offset the inertia force occurring in these stages. SOLUTION: The scanning probe device comprises the probe and the scan stage. The scan stage comprises: a driving element 500 for moving a sample holding base 505 for holding a sample; and movable sections 510 and 515 moving in the direction for offsetting the inertia force occurring in moving the sample holding base. The probe and the sample are moved relatively, and information on the sample is acquired, information is recorded on the sample, or the sample is processed. In other words, the scan stage has a driving circuit 5 for driving the scan stage, and the driving element including the sample holding base and the movable sections can be attached, detached, or replaced in the scanning probe device body 1. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种扫描探针装置,当扫描级或探针的驱动级被更换时,操作者不需要校准劳动,并且可以适当地抵消在这些阶段中发生的惯性力。

      解决方案:扫描探针装置包括探针和扫描台。 扫描级包括:驱动元件500,用于移动用于保持样品的样品保持基座505; 以及沿移动样品保持基座时发生的惯性力的方向移动的可动部510,515。 探针和样品相对移动,获取样品信息,信息记录在样品上,或样品被处理。 换句话说,扫描台具有用于驱动扫描台的驱动电路5,并且可以在扫描探针装置主体1中安装,拆卸或更换包括样本保持基座和可移动部分的驱动元件。 版权所有(C)2007,JPO&INPIT

    • 40. 发明专利
    • Fluid conveyance method
    • 流体输送方法
    • JP2006153494A
    • 2006-06-15
    • JP2004340567
    • 2004-11-25
    • Canon Incキヤノン株式会社
    • YAMAZAKI TAKEOEZAKI TAKAHIROYASUDA SUSUMUICHIMURA YOSHIKATSU
    • G01N35/08G01N37/00
    • PROBLEM TO BE SOLVED: To provide a fluid conveyance method capable of mixing two kinds of solutions at a desired ratio, and conveying a fixed quantity of the mixed solution to an analysis part or the like.
      SOLUTION: This liquid conveyance method has a process for preparing a fluid conveyance device having a passage A, at least two passages B whose each one end is connected to the passage A, and a passage C, and equipped with each valve in the middle of each passage of the passages B and the passage C; a process of introducing the first fluid into the passage A, the passages B and the passage C; a process of introducing at least either fluid of the second fluid and the third fluid from one end of the passages B to the direction of the other end connected to the passage A, and filling a section in the passage A specified by a crossing part between the passages B and the passage A and a crossing part between the passage C and the passage A with the second fluid and the third fluid; and a process of conveying the second fluid and the third fluid, with which the section in the passage A specified by the two crossing parts to one end of the passage A.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供能够以期望的比例混合两种溶液并将固定量的混合溶液输送到分析部件等的流体输送方法。 解决方案:该液体输送方法具有制备流体输送装置的方法,该流体输送装置具有通道A,每个端部连接到通道A的至少两个通道B和通道C,并且配备有每个阀 通道B和通道C的每个通道的中间; 将第一流体引入通道A,通道B和通道C的过程; 将第二流体和第三流体的至少一种流体从通道B的一端引入连接到通道A的另一端的方向的过程,并且填充由通道A中的交叉部分指定的通道A中的部分 通道B和通道A以及通道C和通道A与第二流体和第三流体之间的交叉部分; 以及将由两个交叉部分指定的通道A中的部分与第二流体和第三流体输送到通道A的一端的过程。(C)2006年,JPO和NCIPI