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31. 发明专利

JPH09101279A CATALYTIC COMBUSTION METHOD GAS SENSOR 失效
公开(公告)号：JPH09101279A
公开(公告)日：1997-04-15
申请号：JP25594495
申请日：1995-10-03
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI , TSUDA KOICHI
IPC分类号： G01N25/30 , G01N27/16
摘要： PROBLEM TO BE SOLVED: To provide a catalytic combustion method gas sensor which has high selectivity against carbon monoxide gas. SOLUTION: In a catalytic combustion method gas sensor, the temperature measuring resistors, sintered metal oxide body carriers, and catalysts of a gas detecting element 3 and a compensating element 4 are respectively made of the same materials, with only the catalyst carrying quantities of the elements 3 and 4 being made different from each other. The carriers are made of a tin oxide and the catalyst is made of platinum. It is preferable to adjust the platinum catalyst carrying quantity of the detecting element 3 to 2-3wt.% of the total weight of the carrier and catalyst and that of the compensating element 4 to 0.2-0.4wt.% of the total weight of the carrier and catalyst.

32. 发明专利

JPH08189912A COMBASTIBLE GAS DETECTING DEVICE 失效
公开(公告)号：JPH08189912A
公开(公告)日：1996-07-23
申请号：JP32113794
申请日：1994-12-26
申请人： FUJI ELECTRIC CO LTD
发明人： KUBOTA KAZUNARI , ICHIMURA TAKESHIGE , KAWADA YASUYUKI
IPC分类号： G01N27/16
摘要： PURPOSE: To provide a combustible gas-detecting device which is sensitive to a combustible gas and carbon monoxide gas, and the sensitivity is not affected by changes in surrounding temperature. CONSTITUTION: A gas detecting element M wherein a carrier 2, sticking to a platinum coil 1, supports an oxydizing catalyst 3d, and a compensating element K wherein main component is the carrier, sticking to the platinum coil, are provided. In a catalytic combustion type combustible gas-detecting device wherein those gas detecting element M and compensating element K are integrated into two branch sides of a bridge circuit B, respectively, and further a load V is connected to the output side of the bridge circuit B, the carrier 2 of the compensating element K has a deactivating means which reduces oxidation activity acting on the combustible gas and carbon monoxide gas of the carrier 2. The means is an inactive film F, consisting of silicon dioxide and a vitreous substance, or a catalyst 3c consisting of titanium dioxide.

33. 发明专利

JPH07140101A INCOMPLETE COMBUSTION GAS SENSOR 失效
公开(公告)号：JPH07140101A
公开(公告)日：1995-06-02
申请号：JP28969193
申请日：1993-11-19
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI , NUMATA JUNKO , ICHIMURA TAKESHIGE , TSUDA KOICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To prevent the interference of organic solvent gas by forming a gas sensitive layer, a catalyst layer, and an oxidation/combustion layer sequentially on a substrate and burning the organic solvent gas selectively. CONSTITUTION:A gas sensitive layer 3 comprises a thin film of n-type metal oxide semiconductor, a catalyst layer 4 comprises an ultrathin film of two kinds of noble metal, and an oxidation/combustion layer 5 comprises a thick film of n-type metal oxide semiconductor carrying a noble metal. The oxidation/ combustion layer 5 burns an organic solvent gas selectively and removing the organic solvent gas. On the other hand, activating oxygen is generated by a noble metal catalyst carried on the oxidation/combustion layer 5. The activating gas is adsorbed by the gas sensitive layer 3 to increase the resistance of a sensor in the air thus increasing the difference from the resistance of the sensor in an incomplete combustion gas. The catalyst layer 4 activates carbon monoxide gas and hydrogen gas to accelerate substitution for the oxygen in the gas sensitive layer 3.

34. 发明专利

JPH06288953A THICK-FILM GAS SENSOR 失效
公开(公告)号：JPH06288953A
公开(公告)日：1994-10-18
申请号：JP22766293
申请日：1993-09-14
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a thick-film gas sensor having a stable resistance during operation and excellent initial ringing characteristics by successively forming a first coating layer, first catalyst layer, gas sensitive layer, second catalyst layer, and second coating layer on a substrate. CONSTITUTION:A first coating layer 3, first catalyst layer 4, gas sensitive layer 5, second catalyst layer 6, and second coating layer 7 are successively formed on a substrate 1. A heater 9 is formed of ruthenium oxide. The substrate 1 is made of an insulator having excellent thermal conductivity and constitutes the substrate of this thick film gas sensor. The coating layers 3 and 7 improve the selectivity of this sensor against detecting gases and increase the air supplying quantity to the gas sensitive layer 5. The catalyst layers 4 and 6 increase the oxygen adsorbing speed of the layer 5 and maintains the adsorbed amount of air in the layer 5. Thus a highly reliable thick-film gas sensor having stable resistance during operation and short initial ringing time is obtained.

35. 发明专利

JPH06186191A THICK-FILM GAS SENSOR 失效
公开(公告)号：JPH06186191A
公开(公告)日：1994-07-08
申请号：JP33478292
申请日：1992-12-16
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI
IPC分类号： G01N27/12
摘要： PURPOSE:To eliminate influence due to initial rumbling or supply voltage fluctuation and to improve the stability and reliability of sensitivity by sandwiching a gas-sensitive layer and a catalyst layer with two covering layers where a precious metal catalyst is carried by a metallic oxide semiconductor. CONSTITUTION:A thick-film gas sensor comprises a substrate 1 on which are sequentially formed a covering layer 3 of tin oxide containing 1-5% platinum, a gas-sensitive layer 4 consisting of tin oxide, a catalyst layer 5 of palladium oxide, and a covering layer 6 which is prepared under the same conditions as those of the layer 3. The covering layers 3 and 6 serve to improve the selectivity for detection gas and increase supply of air to the gas-sensitive layer 4. Also, the catalyst layer 5 consisting of a precious metal oxide (palladium oxide) increases the amount of suction of oxygen and the suction speed in the gas-sensitive layer 4, thus obtaining a sensor with superior sensitivity stability, initial rumbling characteristics, and voltage fluctuation characteristics.

36. 发明专利

JPH05249061A 失效
公开(公告)号：JPH05249061A
公开(公告)日：1993-09-28
申请号：JP4894692
申请日：1992-03-06
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a high-sensitivity gas sensor easy to manufacture. CONSTITUTION:On a silicon substrate 2 subjected to offcut at a prescribed angle, a first insulating layer 2, a heater 6, a second insulating layer 13 and a gas-sensitive body 9 are provided in lamination sequentially and then a cavity part 11 is made, so that a diaphragm provided with the heater and the gas- sensitive body be formed. The crystal orientation property and the surface indentation of the gas-sensitive body 9 are controlled by the crystal orientation property and the surface indentation of the silicon substrate, whereby a sensor of high sensitivity is obtained. Besides, the first insulating layer is prepared by laminating a thermal oxide film 3 and a silicon nitride film 4 so as to offset an internal stress, and thereby the damage of the diaphragm at the time of manufacture is prevented.

37. 发明专利

JP2000055852A THIN-FILM GAS SENSOR 失效
公开(公告)号：JP2000055852A
公开(公告)日：2000-02-25
申请号：JP22161298
申请日：1998-08-05
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI , ONODERA KATSUMI , SUZUKI TAKUYA , INOUE FUMIHIRO , TSUDA KOICHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a thin-film gas sensor that can obtain sensitivity being at least equivalent to that of a conventional sensor and has improved gas selectivity. SOLUTION: A thermal oxide film 2 is formed on an Si substrate 1 and a Pt thin-film electrode layer 3 and a contact layer 4 are formed on it. Then, a gas detection layer thin-film layer 5 consisting of a tin oxide thin film doped with Pt and Sb and a gas selection layer 6 for improving gas sensitivity are laminated on the electrode layer 3.

38. 发明专利

JPH08226909A CONTACT-COMBUSTION-TYPE CARBON MONOXIDE GAS SENSOR 失效
公开(公告)号：JPH08226909A
公开(公告)日：1996-09-03
申请号：JP3329995
申请日：1995-02-22
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI , TSUDA KOICHI
IPC分类号： G01N27/16
摘要： PURPOSE: To provide a contact-combustion-type carbon monoxide gas sensor with good gas selectivity having high sensitivity only against carbon monoxide gas. CONSTITUTION: A gas sensing element 3 and a compensating element 4 used while being built into branches of a bridge circuit are held by metallic pins 6 fixed through a base 5 of an insulator and covered with a cap. The gas sensing element 3 comprises a temperature measuring resistor and an oxidation combustion catalyst layer for coating the resistor, wherein the catalyst layer is a sintered body of a mixture of α-ferric oxide fine powder holding a gold catalyst and aluminum oxide powder holding a platinum catalyst and a palladium catalyst. The compensating element 4 comprises a temperature measuring resistor and a metal oxide layer for coating the resistor, wherein the metal oxide layer is a sintered body of a mixture of α-ferric oxide fine powder and aluminum oxide powder. In addition, a cap 8 comprising glass fiber filter paper and a polyfreon filter is put over the elements.

39. 发明专利

JPH07260728A CARBON MONOXIDE GAS SENSOR 失效
公开(公告)号：JPH07260728A
公开(公告)日：1995-10-13
申请号：JP7395094
申请日：1994-03-18
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI , ICHIMURA TAKESHIGE , TSUDA KOICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a sensor with high sensitivity without receiving any interference of combustible gas by providing a pair of electrodes, a gas sensitive layer, catalyst layers and, an oxidation combustion layer on a first main face of an insulation board, and setting another pair of the electrodes and a heater on a second main face. CONSTITUTION:Electrodes 2A, a gas sensitive layer 3, catalyst layers 4, 5, 6 and an oxidation combustion layer 7 are laminated on a first main face of an insulation board 1 in order. A heater 10 composed of electrodes 2B and a ruthenium oxide resistor is provided on a second face of the board 1. The sensitive gas layer 3 is a thin film of tin oxide containing ruthenium and rhodium formed by a sputtering method, and combustible gas having a large molecular structure cannot be diffused in the inside. The catalyst layer 4 is a platinum ultrathin film, a catalyst layer 5 a palladium oxide ultrathin film, a catalyst layer 6 is a platinum ultrathin film, and these are laminated in order on the gas sensitive layer 3 by the sputtering method. The oxidation combustion layer 7 is a thick film composed of gamma-alumina powder, and carries platinum, it coats the gas sensitive layer 3 and the catalyst layers 4-6.

40. 发明专利

JPH07128268A HYDROGEN GAS SENSOR 失效
公开(公告)号：JPH07128268A
公开(公告)日：1995-05-19
申请号：JP29265693
申请日：1993-10-28
申请人： FUJI ELECTRIC CO LTD
发明人： KAWADA YASUYUKI
IPC分类号： G01N27/12
摘要： PURPOSE:To provide a hydrogen gas sensor having no interference of an organic solvent gas by providing an electrode, a gas sensitive layer, a catalyst layer, an oxidizing combusting layer, and a heater on a base. CONSTITUTION:An electrode 2, a gas sensitive layer 3, a catalyst layer 4, and an oxidizing combusting layer 5 are successively laminated on the first main surface of a base 1. A heater 8 consisting of an electrode 2A and ruthenium oxide is formed on the second main surface of the base 1. The gas sensitive layer 3 is a thin film of an n-type metal oxide semiconductor prepared by spattering, and the catalyst layer 4 is an extremely thin film of a noble metal, the oxidizing combusting layer 5 is a thick film of the n-type metal oxide semiconductor supporting the noble metal. The oxidizing combusting layer 5 selectively burns an organic solvent gas and guides hydrogen gas and an inflammable gas to the gas sensitive layer 3. The gas sensitive layer 3 is a columnar crystal formed by spattering, and the inflammable gas can not be diffused into the gas sensitive layer 3. The hydrogen gas is activated by the catalyst layer 4 and guided into the gas sensitive layer 3. Thus, high selectivity of responding to only hydrogen gas can be provided.

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