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21. 发明专利

JP4384378B2 Drying equipment and drying method of organic waste 有权
公开(公告)号：JP4384378B2
公开(公告)日：2009-12-16
申请号：JP2001248049
申请日：2001-08-17
申请人：メタウォーター株式会社
发明人：修一吉田 , 昭光平木 , 哲也柳瀬 , 正巳野々川
IPC分类号： B09B3/00 , F26B3/20 , B01J3/00 , B01J3/02 , B01J3/03 , B01J3/04 , F26B11/06 , F26B21/00 , F26B21/10 , F26B25/00 , F26B25/04

22. 发明专利

JP4355845B2 Penetrable withstand sealing for a container 有权
公开(公告)号：JP4355845B2
公开(公告)日：2009-11-04
申请号：JP2002553127
申请日：2001-12-21
申请人：バイオタージアクチボラゲット
发明人：ヨハンユーリン、
IPC分类号： B01J3/00 , B01J3/02 , B01J3/03 , B01J19/12 , B01L3/00 , C40B60/14 , G01N1/00 , G01N1/44 , G01N35/04 , G01N35/10 , H05B6/64
CPC分类号： B01J19/126 , B01J3/03 , B01J2219/00335 , B01J2219/00373 , B01J2219/1209 , C40B60/14 , G01N1/44 , G01N35/1079 , G01N2035/0405 , Y10T436/2575

23. 发明专利

JP4327410B2 Batch Shikisui heat the reactor and hydrothermal reaction apparatus 有权
公开(公告)号：JP4327410B2
公开(公告)日：2009-09-09
申请号：JP2002155846
申请日：2002-05-29
申请人：オルガノ株式会社
发明人：慎一朗川崎 , 明鈴木
IPC分类号： B01J3/02 , F16J12/00 , B01J3/00 , B01J3/03 , B01J3/04 , F16J13/06
CPC分类号： B30B11/002

24. 发明专利

JP4246804B2 Heating and pressing processing equipment 失效
公开(公告)号：JP4246804B2
公开(公告)日：2009-04-02
申请号：JP7389297
申请日：1997-03-26
申请人：株式会社神戸製鋼所
发明人：由彦坂下 , 格増岡 , 成川　　裕 , 隆裕結城 , 隆男藤川
IPC分类号： H01L21/324 , B01J3/00 , B01J3/03 , B01J3/04 , H01L21/314 , H01L21/768
CPC分类号： B01J3/008 , B01J3/03 , B01J3/04 , H01L21/314

25. 发明专利

JP4194143B2 Aluminum alloy material having excellent gas corrosion resistance and plasma corrosion resistance 有权
公开(公告)号：JP4194143B2
公开(公告)日：2008-12-10
申请号：JP28801098
申请日：1998-10-09
申请人：株式会社神戸製鋼所
发明人：淳久本 , 浩一林 , 博雄茂
IPC分类号： B01J3/03 , C25D11/04 , C23C14/02 , C23C16/02 , C23C16/30 , C23C28/00 , C25D11/18
CPC分类号： C23C28/00 , Y10T428/24942 , Y10T428/249957 , Y10T428/24999

26. 发明专利

JP2007260624A Vacuum vessel for use in vacuum apparatus, and method for manufacturing the same 审中-公开
标题翻译：用于真空设备的真空容器及其制造方法
公开(公告)号：JP2007260624A
公开(公告)日：2007-10-11
申请号：JP2006092052
申请日：2006-03-29
申请人： Kyushu Mitsui Alum Kogyo Kk , Tokyo Electron Ltd , 九州三井アルミニウム工業株式会社 , 東京エレクトロン株式会社
发明人： OKA HIROKI , NARISHIMA MASARU , TEZUKA KAZUYUKI , GONDA MINEO , HASUO TOSHIHARU , ETO SEIICHI
IPC分类号： B01J3/00 , B01J3/03 , C22C21/00 , C22C21/02 , C22F1/043 , C23C16/44 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a vacuum vessel for use in a vacuum apparatus capable of greatly reducing cost by forming a vessel body by casting. SOLUTION: The vacuum apparatus whose interior is set as a vacuum atmosphere is used for carrying out a predetermined treatment to a workpiece W or for transferring the workpiece. The vacuum apparatus is composed of a process chamber 4, a transfer chamber 6 and a lord lock chamber 10. The vacuum vessel 30 used for the process chamber is composed of the vessel body 30A formed into a cylindrical shape, its top plate 30B, and a bottom plate 30C closing a bottom part. The vacuum vessels 32, 34 of the transfer chamber and the lord lock chamber are composed likewise. A component part of the vacuum vessel is cast using an aluminum alloy having a Si content of 4-6% and is coated with an alumite film. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种真空容器，用于能够通过铸造形成容器主体而大大降低成本的真空装置。解决方案：将内部设置为真空气氛的真空装置用于对工件W进行预定处理或用于传送工件。真空装置由处理室4，转印室6和主锁定室10组成。用于处理室的真空容器30由形成为圆筒形的容器主体30A，其顶板30B和封闭底部的底板30C。传送室的真空容器32,34和主锁室也同样地构成。使用Si含量为4-6％的铝合金铸造真空容器的组成部分并涂覆有耐酸铝膜。版权所有（C）2008，JPO＆INPIT

27. 发明专利

JP2007187289A Decompression container and decompression processing apparatus 有权
标题翻译：分解容器和分解处理装置
公开(公告)号：JP2007187289A
公开(公告)日：2007-07-26
申请号：JP2006007330
申请日：2006-01-16
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社
发明人： YAMADA YOHEI
IPC分类号： F16J12/00 , B01J3/03 , C23C14/00 , F16J15/10 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a decompression container and a decompression processing apparatus capable of surely preventing generation of particles caused by deformation of the container.
SOLUTION: An O-ring 90 as a seal member is inserted into a groove 26 formed on an upper end face 21a of a container main body 21 surrounding an internal space of a load lock chamber 20, a spacer 91 having an approximately L-shaped cross section is disposed outside of the O-ring in a state of being partially inserted into the groove 26, and keeping a face at a L-shaped bent internal angular side closely into contact with from an inner wall face of the groove 26 to the upper end face 21a of the container main body 21. As the container main body 21 and a top board 22 are separated from each other by the spacer 91, contact of an angular portion 21b at an inner peripheral side of the container main body 21 and the top board 22 can be prevented even when the top board 22 is deflected in a state of reducing a pressure inside of the load lock chamber 20 to a high vacuum state.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种能够可靠地防止由容器的变形引起的颗粒的产生的减压容器和减压处理装置。解决方案：作为密封构件的O形环90插入形成在容纳主体21的上端面21a上的槽26中，该容器主体21围绕负载锁定室20的内部空间，隔离件91具有大致 L形横截面设置在O形环的外侧，部分地插入凹槽26中，并将L形弯曲的内侧面的面保持与凹槽的内壁面紧密接触当容器主体21和顶板22通过间隔件91彼此分开时，容器主体21的上端面21a与容器主体21的内周侧的角部21b的接触即使当顶板22在将负载锁定室20内部的压力降低到高真空状态的状态下偏转时，也能够防止主体21和顶板22。版权所有（C）2007，JPO＆INPIT

28. 发明专利

JP2007029843A Lid opening and closing device 有权
标题翻译：开启和关闭装置
公开(公告)号：JP2007029843A
公开(公告)日：2007-02-08
申请号：JP2005215997
申请日：2005-07-26
申请人： Cosmic Industry Co Ltd , コスミック工業株式会社
发明人： SATO MITSUMASA
IPC分类号： B01J3/03 , B01J3/02
摘要： PROBLEM TO BE SOLVED: To provide an opening and closing device of a lid, which enables an assured separation of the lid from a chamber body in a vacuum chamber, and a lowering to a low position.
SOLUTION: The opening and closing device of the lid 5 in the vacuum chamber 1 is provided with the chamber body 3 and the lid 5 provided detachably on the chamber body 3. The device is provided with a pair of running objects 25A and 25B movable along a pair of guide members 21A and 21B arranged at both laterals of the chamber body 3 sandwiching the chamber body 3, a pair of lifting bodies 39A and 39B vertically movably provided on the pair of running objects 25A and 25B respectively, and a pair of lid retainers 49A and 49B capable of holding a gripping means 17 provided on the lid 5, and supported rotatably around the axial center horizontal to the lifting bodies 39A and 39B. The pair of guide members 21A and 21B are integrally coupled, and movable.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种盖子的打开和关闭装置，其能够确保盖子与真空室中的室主体的分离，并且降低到低位置。解决方案：真空室1中的盖5的打开和关闭装置设置有可拆卸地设置在室主体3上的室主体3和盖5。该装置设置有一对运行对象25A和 25B可以沿着布置在腔室主体3的两侧的一对引导构件21A和21B移动，夹持室主体3，一对可上下移动地设置在一对行走物体25A和25B上的提升体39A和39B，一对盖保持器49A和49B，其能够保持设置在盖5上的夹持装置17，并且可旋转地围绕提升体39A和39B的水平轴向中心支撑。一对引导构件21A和21B一体地联接并且可移动。版权所有（C）2007，JPO＆INPIT

29. 发明专利

JP3835604B2 Solid powder supplying apparatus and method to the high-pressure reactor 有权
公开(公告)号：JP3835604B2
公开(公告)日：2006-10-18
申请号：JP2002226920
申请日：2002-08-05
申请人：石川島検査計測株式会社
发明人：哲郎原田
IPC分类号： B01J3/02 , B01J3/00 , B01J3/03 , B01J3/04

30. 发明专利

JP3802325B2 Pressurized hot water decomposition method and system of the plant-based biomass 有权
公开(公告)号：JP3802325B2
公开(公告)日：2006-07-26
申请号：JP2000251953
申请日：2000-08-23
申请人：信行林 , 株式会社ミゾタ
发明人：研一土井 , 信行林
IPC分类号： B09B3/00 , C13K13/00 , B01J3/00 , B01J3/02 , B01J3/03 , C08B37/14 , C10L3/06
CPC分类号： Y02E50/30

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