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    • 21. 发明专利
    • Remote monitoring system of polishing end point detection device
    • 抛光端点检测装置远程监控系统
    • JP2013176828A
    • 2013-09-09
    • JP2012043174
    • 2012-02-29
    • Ebara Corp株式会社荏原製作所
    • MITANI RYUICHIRO
    • B24B49/04B24B37/013B24B49/10B24B51/00H01L21/304
    • G05B19/4183B24B37/013G05B19/406G05B2219/31457G05B2219/49085
    • PROBLEM TO BE SOLVED: To provide a remote monitoring system that can remotely monitor and control a plurality of polishing end point detection devices.SOLUTION: A remote monitoring system includes: a plurality of polishing end point detection devices 10; and a host computer 20 connected to the plurality of polishing end point detection devices 10 via a network 1. The host computer 20 includes: a memory for storing polishing end point detection data sent from the plurality of polishing end point detection devices 10; and a display screen for displaying the polishing end point detection data. The host computer 20 sends a new polishing end point detection recipe to at least one polishing end point detection device selected from the plurality of polishing end point detection devices 10, and rewrites the polishing end point detection recipe of the selected at least one polishing end point detection device.
    • 要解决的问题:提供可以远程监测和控制多个抛光终点检测装置的远程监控系统。解决方案:远程监控系统包括:多个抛光终点检测装置10; 以及经由网络1连接到多个抛光终点检测装置10的主计算机20.主计算机20包括:存储器,用于存储从多个抛光终点检测装置10发送的抛光终点检测数据; 以及用于显示抛光终点检测数据的显示屏幕。 主计算机20向从多个抛光终点检测装置10中选择的至少一个抛光终点检测装置发送新的抛光终点检测配方,并且重写所选择的至少一个抛光终点的抛光终点检测配方 检测装置
    • 23. 发明专利
    • Manufacturing process monitoring system and manufacturing process monitoring method
    • 制造过程监控系统和制造过程监控方法
    • JP2012064085A
    • 2012-03-29
    • JP2010208945
    • 2010-09-17
    • Toshiba Corp株式会社東芝
    • INO TOMOMI
    • G05B23/02G05B19/418
    • G05B19/4184G05B19/4183Y02P90/10Y02P90/14
    • PROBLEM TO BE SOLVED: To provide a manufacturing process monitoring system and a manufacturing process monitoring method, capable of improving abnormality monitoring accuracy.SOLUTION: According to one embodiment, a manufacturing process monitoring system for monitoring abnormality in a manufacturing process for products includes an information storage section, a selection information section, a reference space formation section, and a monitoring section. The information storage section is configured to store previously collected data. The selection information section is configured to create information used in classifying the data stored in the information storage section. The reference space formation section is configured to form a reference space based on data subjected to abnormality monitoring acquired in the manufacturing process and the data classified by the information from the data stored in the information storage section. The monitoring section is configured to monitor abnormality of the data subjected to abnormality monitoring based on the reference space.
    • 要解决的问题:提供能够提高异常监测精度的制造过程监控系统和制造过程监控方法。 解决方案:根据一个实施例,用于监视产品制造过程中的异常的制造过程监控系统包括信息存储部分,选择信息部分,参考空间形成部分和监视部分。 信息存储部分被配置为存储先前收集的数据。 选择信息部分被配置为创建用于对存储在信息存储部分中的数据进行分类的信息。 基准空间形成部构成为基于在制造过程中获取的异常监视的数据和根据存储在信息存储部中的数据由信息分类的数据构成基准空间。 监视部被配置为基于参考空间来监视进行异常监视的数据的异常。 版权所有(C)2012,JPO&INPIT
    • 29. 发明专利
    • Automatic working system
    • 自动工作系统
    • JP2006124122A
    • 2006-05-18
    • JP2004316424
    • 2004-10-29
    • Denso Wave Inc株式会社デンソーウェーブ
    • NISHIYAMA NORITAKA
    • B65G47/90B25J13/00
    • G05B19/4183G05B2219/31078Y02P90/083Y02P90/10Y02P90/18Y02P90/28
    • PROBLEM TO BE SOLVED: To provide an automatic working system capable of writing or reading information in relation to a data carrier without stopping a transporting means. SOLUTION: The data carrier is provided in a work 2, and a reading/writing device is provided in a tip of a first and a second robot arms 5 and 8. Operation for writing information about a result of detection by a detecting device 4 into the data carrier is performed until the work 2 of the detecting device 4 is loaded on a pallet 3 and raised after the tip of the first robot arm 5 comes close to the work 2 of the detecting device. In order to separately house the works 2 in a quality item housing case 6 and a bad quality item housing case 7 in response to results of the detection, the operation for reading information about result of the detection written in the data carrier is performed until the work 2 is held and taken out of a belt conveyor device 1 after the data carrier starts to move, following the work 2 being transported. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种能够在不停止传送装置的情况下写入或读取关于数据载体的信息的自动工作系统。 解决方案:数据载体设置在工件2中,并且读/写装置设置在第一和第二机器人臂5和8的尖端中。通过检测来写入关于检测结果的信息的操作 执行装置4进入数据载体,直到检测装置4的工件2装载在托盘3上,并且在第一机器人手臂5的末端靠近检测装置的工件2之后升高。 为了响应于检测结果将作品2分开放置在质量物品外壳6和不良品质的外壳7中,执行用于读取关于在数据载体中写入的检测结果的信息的操作,直到 在数据载体开始移动之后,在运送工件2之后,工件2被保持并从带式输送装置1中取出。 版权所有(C)2006,JPO&NCIPI