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    • 25. 发明专利
    • Interdigital capacitor
    • INTERDIGITAL电容器
    • JPS59105341A
    • 1984-06-18
    • JP21580382
    • 1982-12-09
    • Mitsubishi Electric Corp
    • IKEDA YUKIOTAKAGI SUNAO
    • H01L27/04H01L21/822H01L23/12H01L23/64H01L29/93H01P5/04
    • H01L23/642H01L2924/0002H01L2924/3011H01L2924/00
    • PURPOSE:To vary characteristic impedance and a wavelength shortening rate in the case when the capacitor is regarded as a distribution fixed-number line by forming an epitaxial layer to the lower section of opposite fingers, joining a Schottky with a boundary surface between one finger and the epitaxial layer and forming an ohmic junction to the other finger. CONSTITUTION:The epitaxial layer 13 formed to the lower section of the opposite fingers 4, 5 of the interdigital capacitor used for a microwave integrated circuit, and the Schottky junction surfaces are formed to the boundary surfaces 15 among one fingers 4 and the epitaxial layer 13 and the ohmic junctions to boundary surfaces 16 among the other fingers 5 and the epitaxial layer 13. Consequently, the size of an extent of a depletion layer 18 changes by adjusting a bias power supply 17, and the magnitude C3 of an equivalent variable capacitance 19 depends upon the size of the extent of the depletion layer 18 because the equivalent variable capacitance 19 consists of the coupling capacitance of the fingers 4 and the fingers 5 and depletion capacitance depending upon the extent of the depletion layer. Accordingly, characteristic impedance and the wavelength shortening rate in the case when the interdigital capacitor is regarded as the distribution fixed-number line can be changed by adjusting the bias power supply 17 and altering C3.
    • 目的:为了改变特征阻抗和波长缩短率,在通过在相对指的下部形成外延层将电容器视为分布固定数线的情况下,将肖特基与一个手指和 外延层并形成与其他手指的欧姆结。 构成:形成在用于微波集成电路的叉指电容器的相对指4,5的下部的外延层13和肖特基结表面形成在一个指状物4和外延层13之间的边界表面15上 以及与其他指5和外延层13之间的边界面16的欧姆结。因此,耗尽层18的程度的大小通过调整偏置电源17而变化,并且等效可变电容19的幅度C3 取决于耗尽层18的程度的大小,因为等效可变电容19由指状物4和指状物5的耦合电容和耗尽电容构成,这取决于耗尽层的程度。 因此,可以通过调整偏置电源17并改变C3来改变在指示电容器被认为是分配固定数线的情况下的特性阻抗和波长缩短率。