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21. 发明专利

JPH05299500A 失效
公开(公告)号：JPH05299500A
公开(公告)日：1993-11-12
申请号：JP10311192
申请日：1992-04-22
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU
IPC分类号： H01L21/301 , H01L21/78
摘要： PURPOSE:To cut a silicon substrate W along a desired cutting line with a fine width of cutting allowance and stably execute contamination-free dry cutting. CONSTITUTION:A silicon substrate W is placed on a substrate placing board 2 in a vacuum vessel 1 coupled with a vacuum pump 7 and this silicon substrate W is irradiated with a laser beam B emitted from a laser oscillator 9 by focusing such laser beam into a fine beam with a beam irradiation tube 3. Simultaneously, the chlorine gas G supplied from a gas bombe 11 is narrowed by an injection nozzle 4 and is blown to a beam irradiation part. A silicon substrate material at the beam irradiation part and chlorine gas are activated with beam energy to generate ion and radical and execute chemical reaction therebetween. Thereby, the silicon substrate material at the beam irradiation part is radiated within a vacuum vessel 1 as a low-pressure gas of reaction biproduct to cut the silicon substrate W.

22. 发明专利

JPH05190299A RESONANCE FREQUENCY ADJUSTING DEVICE FOR HIGH FREQUENCY ACCELERATION CAVITY 失效
公开(公告)号：JPH05190299A
公开(公告)日：1993-07-30
申请号：JP283592
申请日：1992-01-10
申请人： KOBE STEEL LTD
发明人： KUSAKA TAKUYA , WASA YASUHIRO , MORIOKA OSAMU , MUROO YOUJI
IPC分类号： H05H7/18 , H05H9/00 , H05H13/04
摘要： PURPOSE:To provide a resonance frequency adjusting device for a high frequency acceleration cavity of susppressing a higher order resonance mode and reducing an influence of the resonance frequency adjusting device relating to the high frequency acceleration cavity. CONSTITUTION:A coaxial line 19 is constituted of a movable main shaft 2 for driving a metal unit 6 advanced and retracted in a high frequency acceleration cavity 16 and an outer cylinder 4 for coaxially coating this main shaft. A frequency of higher order resonance mode having field strength in a resonance frequency adjusting device 1 of the higher order resonance mode with the metal unit 6 as a rod antenna is guided into the coaxial line 19, placed in a power terminal end device 14 from a branch coaxial line 9 and consumed. The higher order resonance mode is not easily accumulated in the high frequency acceleration cavity 16 to reduce an influence given to a charged particle in the high frequency acceleration cavity 16. By matching line impedance of the coaxial line 19, line impedance of the branch coaxial line 9 and impedance of the power terminal end device 14, a change of input impedance of a total unit of the resonance frequency adjusting device 1 as viewed from the high frequency acceleration cavity 16 is decreased, and also an influence a resonance frequency of the high frequency acceleration cavity 16 is decreased.

23. 发明专利

JPH05135704A COAXIAL WAVE GUIDE STRUCTURE 失效
公开(公告)号：JPH05135704A
公开(公告)日：1993-06-01
申请号：JP29439991
申请日：1991-11-11
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU , KUSAKA TAKUYA
IPC分类号： H01J23/40 , H01P1/08
摘要： PURPOSE:To improve the economy of a coaxial wave guide structure and the easiness of the adjusting work by individually and freely adjusting the protrusion lengths of the first outer conductor and the second outer conductor into a rectangular wave guide via the action of two reciprocating systems. CONSTITUTION:When the operation handle 2e of the first reciprocating system 2 is rotated, an inner conductor 7 is reciprocated against an angular wave guide 1 via a support member 2c by the rotation of a support member reciprocating ball screw 2b. The second outer conductor 9 is moved in an outer conductor end section 10, and the protrusion length L2 of the outer conductor 9 into the wave guide 1 can be freely changed. The first outer conductor 4 is also reciprocated in the same direction as the conductor 7 via the second reciprocating system 3, its protrusion length L1 into the wave guide 1 is changed, when the operation handle 3c of the system 3 is rotated, the length L1 can be freely changed by the expansion or shrinkage of an expansion pipe 4b. The distance G between the tip of the conductor 4 and a ceramic disk window 8 can be freely changed.

24. 发明专利

JPH0413625B2 失效
公开(公告)号：JPH0413625B2
公开(公告)日：1992-03-10
申请号：JP17034588
申请日：1988-07-07
申请人： KOBE STEEL LTD
发明人： ISHIMARU JUKI , MORIOKA OSAMU , OOTANI TETSUYA
IPC分类号： F25J1/00 , F25J1/02

25. 发明专利

JPS6338863A METHOD OF REPRODUCING LIQUID NITROGEN 失效
公开(公告)号：JPS6338863A
公开(公告)日：1988-02-19
申请号：JP18303586
申请日：1986-08-04
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU , OTANI TETSUYA
IPC分类号： F25B9/02

26. 发明专利

JPS5886398A GAS-LIQUID DISPERSING DEVICE FOR PLATE FIN TYPE HEAT EXCHANGER 失效
公开(公告)号：JPS5886398A
公开(公告)日：1983-05-23
申请号：JP18512981
申请日：1981-11-17
申请人： KOBE STEEL LTD
发明人： YAMADA KANEO , MORIOKA OSAMU
IPC分类号： F28F3/00 , F25J3/00 , F28F9/22 , F28F27/02
摘要： PURPOSE:To make it possible to grasp accurately the actual state of dispersion of a gas and a liquid by the titled device of simple structure by a method wherein the gas and the liquid are supplied in their own phases respectively and are dispersed by respective dispersing fins. CONSTITUTION:A heat medium entered a header 32 from an inlet is dispersed uniformly in the direction of the width of a group of effective fins 26 for the heat medium as it is guided by a group of distribution fins 29. Then the dispersed heat medium flows upward among the effective fins 26 to enter a group of upper distribution fins 28 and flows outside from the header 32. On the other hand, the gas entered a header 33 flows horizontally among a group of gas dispersing fins 35 within a dispersing core 22 to enter a group of two-phase flow dispersing fins 28 communicating with the fins 35. At the same time, the gas which has entered a header 34 from an inlet flows obliquely upward as it is guided by a group of liquid dispersing fins 36 and enters the two-phase flow distribution fins 28 where it joins the gas to make a two-phase flow of a gas- liquid mixture, so that a heat exchange operation between the mixture and a layer of the heat medium is performed.

27. 发明专利

JPH06136403A DEVICE FOR SUPPLYING POWDER TO MOLD 失效
公开(公告)号：JPH06136403A
公开(公告)日：1994-05-17
申请号：JP28785692
申请日：1992-10-26
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU , WAKABAYASHI MINORU
IPC分类号： B22F3/02 , B22F3/035 , B30B15/30
摘要： PURPOSE:To feed the fixed quantity of magnetic powder having high condensibility and to improve the packing density thereof. CONSTITUTION:This method consists in traversing a powder feed box 19 by means of a forward and backward moving device 20 to position this box in the upper part of molds 13 and dropping and packing the powder M received in the powder feed box 19 by a counting feeder into the molds 13. The powder M is sieved into the molds 13 while the powder is loosened by a perforated or net-like powder receiving rack 23 which is provided in the above-mentioned powder feed box 19 and is kept vertically vibrated by an exciting machine 25.

28. 发明专利

JPH06108111A PRODUCTION OF FERROMAGNETIC POWDER SINTERED BODY 失效
公开(公告)号：JPH06108111A
公开(公告)日：1994-04-19
申请号：JP26207392
申请日：1992-09-30
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU , WAKABAYASHI MINORU
IPC分类号： B22F3/02 , B22F3/04 , B22F3/24 , H01F41/02
摘要： PURPOSE:To provide the process for production of the sintered body of ferromagnetic powder which can easily handle powder molded articles, has excellent productivity and is suppressed in the degradation in magnetic force as far as possible. CONSTITUTION:The ferromagnetic powder consisting of particles having magnetic anisotropy is packed into a molding container 2 and a magnetic field is acted on this molding container 2 to orient the powder in the molding container 2 in a magnetic field direction; thereafter, the molding container 2 is subjected to cold isotropic pressurizing, by which the powder in the molding container 2 is compression molded. After the powder molded article is demagnetized, the molded article is sintered and magnetized.

29. 发明专利

JPH0657306A MAGNETIC MATERIAL MOLDING DEVICE 失效
公开(公告)号：JPH0657306A
公开(公告)日：1994-03-01
申请号：JP21306592
申请日：1992-08-10
申请人： KOBE STEEL LTD
发明人： MORIOKA OSAMU , WAKABAYASHI MINORU
IPC分类号： B22F3/02
摘要： PURPOSE:To provide the magnetic material molding device which can assure the sufficient space for handling powder for molding and its molded article a round a molding container and molding die. CONSTITUTION:An upper punch 6 and lower punch 7 for press molding the powder 8 for molding charged into the molding hole 5 of the molding die 4 are freely attachably and detachably mounted in the above-mentioned molding hole 5 and an electromagnetic coil 9 for forming a magnetic field with powder 8 for molding within the mold 4 as a magnetic path is provided. A yoke 21 for magnetically coupling the above-mentioned upper punch 6 an lower punch 7 is provided outward of the axial center of the press. The electromagnetic coil 9 is mounted to this yoke 21.

30. 发明专利

JPH05326415A PLASMA TREATMENT APPARATUS 失效
公开(公告)号：JPH05326415A
公开(公告)日：1993-12-10
申请号：JP1533592
申请日：1992-01-30
申请人： KOBE STEEL LTD , TDK CORP
发明人： YUKI TAKAHIRO , MORIOKA OSAMU
IPC分类号： H01L21/203 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To form an ECR plane which is parallel to the face of a sample and to increase the uniformity and the anisotropy of ions, radicals and the like which are generated by means of an ECR plasma by a method wherein a yoke which has been former to be a prescribed shape and which is composed of a magnetic material is arranged in a magnetic field which is generated by a pair of permanent magnets. CONSTITUTION:The air inside a vacuum container 1 in which a sample 4 is mounted on an electrode 3 is evacuated a treatment gas G is introduced from a gas introduction port 1a after that, an RF is applied to the electrode 3 by means of a high-frequency power supply 5 to supply an electric field and microwaves are introduced via a waveguide 7. Thereby, the treatment gas G is changed to a plasma clue to an interaction with a magnetic field which is applied by means of a pair of permanent magnets 6, 6'; a plasma treatment such as a CVD treatment, an etching treatment or the like is executed by use of ions, radicals and the like in the plasma. At this time, a ring- shaped yoke 8 whose cross section is step-shaped is arranged and installed at the upper part of the permanent magnet 6' and directly under the electrode 3; it is made to act as a kind of magnetic lens; vectors of lines of magnetic force at the upper part of the yoke 8 are arranged to be parallel and advanced straight.

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