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22. 发明专利

JPS57163950A IONIC-SOURCE DEVICE 失效
公开(公告)号：JPS57163950A
公开(公告)日：1982-10-08
申请号：JP4797281
申请日：1981-03-31
申请人： TOKYO SHIBAURA ELECTRIC CO , JAPAN ATOMIC ENERGY RES INST
发明人： MORIMIYA OSAMU , OKUMURA YOSHIKAZU , OBARA YOSHIHIRO
IPC分类号： H01J27/02 , H05H1/22
摘要： PURPOSE:To decrease primary particles, which are developed within the space of the accelerating electrode due to primary ions, and reduce the damage to a discharge room and the like by increasing the temperature of gases participating in the electric discharge by heating the ion drawing electrode and the inner wall of the discharge room. CONSTITUTION:An electrode 22 constituting an accelerating electrode system 23 is earthed, and a negative voltage is applied to an electrode 21 by means of a power source 24. In addition, a positive voltage is applied to an electrode 20 through a protective resistance 25 by means of a power source 26. After that, a discharge power source 27 is applied across a hollow cathode 12 and an anode 15 to as to generate electric discharge across the electrodes 12 and 15 and to develop plasmas in the internal space of the anode 15. Then, primary ions developed from the plasmas are drawn out with the accelerating electrode system 23. Since the accelerating electrode system 23 and the anode 15 are heated to high temperature by means of an external appropriate power source, the generation of primary particles developed within the space of the accelerating electrode due to the primary ions is reduced.

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