会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 23. 发明专利
    • APPARATUS FOR LIQUEFYING AND RECOVERING METAL VAPOR
    • JPH03161026A
    • 1991-07-11
    • JP29734489
    • 1989-11-17
    • HITACHI LTD
    • FUJIMORI HARUO
    • B01D59/34
    • PURPOSE:To obtain the title apparatus enhanced in recovery efficiency preventing the falling of a liquid droplet on the way even when liquid condensation is generated by constituting a recovery plate of an inclined surface wherein the length in the max. inclination direction is equal to or less than critical length and providing a recovery trough to the lower end of the inclined surface or under the inclined surface in its vertical direction. CONSTITUTION:This apparatus consists of an evaporation source 8 generating metal vapor q, a recovery plate 4 condensing and liquefying the metal vapor 9, a recovery plate heater 3 heating the recovery plate 4 and a vacuum container 1 receiving all of them. The recovery plate 4 constituted of an inclined surface wherein the length in the max. inclination direction is shorter than critical length represented by formula I [wherein V(r) is the volume of a liquid droplet having a radius (r), N' (r) is the number density of liquid droplets having radii (r-r+dr), Rf is the flow-down start radius of a liquid droplet and Rd is the falling critical radius of a liquid droplet] is provided and the metal condensed and liquefied on the recovery plate 4 is recovered by the recovery trough 5 arranged to the lower end of the recovery plate 4 or under the recovery plate in its vertical direction. As a result, the falling of a liquid droplet on the way of flow-down can be prevented and the liquefying and recovery efficiency of metal vapor is enhanced.
    • 25. 发明专利
    • LIGHT SCATTERING TYPE APPARATUS FOR DETECTING FINE PARTICLE IN LIQUID
    • JPS63142234A
    • 1988-06-14
    • JP28943586
    • 1986-12-04
    • HITACHI LTD
    • KITAMORI TAKEHIKOFUJIMORI HARUOSUZUKI KAZUMICHI
    • G01N15/14G01N15/02
    • PURPOSE:To reduce the detection limit particle size of fine particles in a liquid, by increasing the intensity of scattering beam due to particles and sensitizing a detector. CONSTITUTION:Detection laser beam 1 and laser beam 2 (destructing laser beam) for destructing or vaporizing the particles 3 in a liquid or forming the same into plasma are allowed to irradiate the liquid. Even when there is no destructing laser 2, a part of the detection laser beam 1 is scattered by the particles 3 but, when the particles 3 are sufficiently small, scattering beam 5 due to the particles is embedded in the Rayleigh scattering beam of the liquid and detection becomes difficult. When the laser beam 2 is allowed to irradiate the particles 3, the particles 3 are changed or formed into plasma corresponding to the power of the laser beam 2 and, according to circumstances, even the liquid around the particles 3 is vaporized or formed into plasma. Therefore, air bubbles 4 are generated at the place where the particles 3 are present and the volume thereof becomes larger than that of the particles. As a result, the fine particles not detected by the beam scattering of the particles 3 themselves are vaporized or formed into plasma to make it possible to detect fine particles.
    • 30. 发明专利
    • Observation area display unit for scanning type electron microscope
    • 用于扫描型电子显微镜的观察区域显示单元
    • JPS58218738A
    • 1983-12-20
    • JP9930782
    • 1982-06-11
    • Hitachi Ltd
    • FUJIMORI HARUO
    • H01J37/20H01J37/22H01J37/28
    • H01J37/28
    • PURPOSE:To quickly detect an observation area and facilitate its setting by spacially differentiating the brightness distribution of the secondary electron image of a sample, taking out its characteristics as line pictures, and displaying them on a CRT display. CONSTITUTION:The electron beam 3 from an electron gun 2 controlled by an electron beam scanning circuit 1 is raster-scanned on a sample 4. Then the secondary electron 5 from the sample 4 is detected by a detector circuit 6 and the detection signal is differentiated twice by a differential circuit 8. Besides, a signal exceeding preset wave height is sent to a rectangular generator circuit 10 through a wave height discriminator circuit 9 and the output is displayed on a CRT display 17. Furthermore a display image can be stored in a memory circuit 12 through an arithmetic control circuit 11. As a result, since only the characteristic parts of the secondary electron image of the sample can be extracted as line pictures, the observation area can quickly be detected and its setting is facilitated.
    • 目的:通过对样品的二次电子图像的亮度分布进行空间微分,将其特征作为线条图像进行快速检测,便于其设置,并将其显示在CRT显示器上。 构成:由电子束扫描电路1控制的电子枪2的电子束3在样品4上被光栅扫描。然后,由检测器电路6检测来自样品4的二次电子5,检测信号被差分 另外,通过波高鉴别器电路9将超过预设波高的信号发送到矩形发生器电路10,并将输出显示在CRT显示器17上。此外,显示图像可以存储在 存储电路12,结果,由于仅能够提取样本的二次电子图像的特征部分作为线条图像,所以可以快速检测观察区域并且便于其设定。