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    • 21. 发明专利
    • SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD THEREOF
    • JPH10135369A
    • 1998-05-22
    • JP28477196
    • 1996-10-28
    • HITACHI LTD
    • NOSE FUJIAKIWATANABE YUJIYAMAGUCHI EIJIKIKUCHI TAKUMIWA TAKASHI
    • H01L21/60H01L23/12
    • PROBLEM TO BE SOLVED: To decrease the rigidity of an element mounting portion of an element mounting board, so as to reduce the stress applied onto a bump connection part of a semiconductor element and improve connection reliability of the bump connection part of the semiconductor element, by forming the element mounting portion of the element mounting board with a thickness smaller than that of a non-element mounting portion. SOLUTION: In an element mounting board 2 for supporting a semiconductor chip 1, an element mounting portion 2a is formed with a thickness smaller than that of a non-element mounting portion 2b. Thus, the rigidity of the element mounting portion 2 in the element mounting board 2 may be decreased. Therefore, when BGA is heated or cooled to cause the element mounting board 2 to expand or contract, the element mounting portion 2a may be deformed in accordance with the degree of deformation of the semiconductor chip 1, since the element mounting portion 2a having a coefficient of thermal expansion greater than that of the semiconductor chip 1 has flexibility. As a result, the stress applied onto a bump connection part 3a may be reduced, and connection reliability of the bump connection part 3a may be improved.