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21. 发明专利

JP2000018189A TURBO MOLECULAR PUMP 失效
公开(公告)号：JP2000018189A
公开(公告)日：2000-01-18
申请号：JP18419398
申请日：1998-06-30
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： MIYAMOTO MATSUTARO , SOFUGAWA TAKUJI , NAKAZAWA TOSHIHARU
IPC分类号： F04D27/00 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump having rotor temperature detection means capable of accurately detecting the rotor temperature of a turbo molecular pump in operation, without contacting therewith. SOLUTION: In a turbo molecular pump having temperature detection means for detecting a temperature of a rotor rotating at a high speed, at least two displacement sensors 22, 23 for detecting axial displacement of a rotor R are provided, so as to detect the temperature of the rotor R from the detected displacement of the rotor R.

22. 发明专利

JP2003214378A VACUUM PUMP 审中-公开
公开(公告)号：JP2003214378A
公开(公告)日：2003-07-30
申请号：JP2002016686
申请日：2002-01-25
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： MIYAMOTO MATSUTARO , OGAMINO HIROAKI , NAKAZAWA TOSHIHARU
IPC分类号： F04D19/04 , F04D29/54 , F04D29/56
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump capable of improving the discharging and compressing performance of the pump even when a rotor and a stator are kept under a high temperature, miniaturizing the pump, and minimizing the necessary power. SOLUTION: In this vacuum pump having a gas discharging part for discharging a gas by interaction of the rotating rotor 36 and the stator 38 mounted in adjacent to the rotor 36, a distance between the rotor 36 and the stator 38 composing the gas discharging part is adjusted by distance adjusting mechanisms 86, 88 during the rotation of the rotor. COPYRIGHT: (C)2003,JPO

23. 发明专利

JP2002081397A VACUUM PUMP 失效
公开(公告)号：JP2002081397A
公开(公告)日：2002-03-22
申请号：JP2000270654
申请日：2000-09-06
申请人： EBARA CORP
发明人： MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump with a high safety capable of speedily making a device to a re-usable state by exchanging the vacuum pump without damaging a chamber and a product during processing by broken pieces even in the case where a rotor is destroyed by any chance. SOLUTION: In the vacuum pump in which a gas discharge part is constituted by a rotor R and a stator S at the inside of a pump casing 14, the rotor constituting the gas discharge parts L1, L2 is axially and/or radially divided to at least two rotors 115, 116.

24. 发明专利

JP2002033281A BOARD PROCESSING EQUIPMENT 失效
公开(公告)号：JP2002033281A
公开(公告)日：2002-01-31
申请号：JP2000212767
申请日：2000-07-13
申请人： EBARA CORP
发明人： MIYAMOTO MATSUTARO
IPC分类号： C23C14/34 , C23C16/44 , C23C16/455 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a board processing equipment wherein the positional relationship between a board to be processed and a gas jetting part or a vacuum exhausting part is optimized, response in pressure control at a front surface of board is improved, and further the entire equipment is reduced in size. SOLUTION: The inside of a film-forming chamber 1 is depressurized by a vacuum pump 2 and a board W guided into the film-forming chamber 1 is processed under a low pressure. Here, the vacuum pump 2 is so provided as to be close to the film-forming chamber 1 or as to be incorporated in it, and the vacuum pump 2 is provided with a gas jetting part 6 which jets a gas for processing the board W against the board W. The gas jetting part 6 is provided on the air-intake side of the vacuum pump 2 provided.

25. 发明专利

JPH10131966A MAGNETIC BEARING DEVICE 失效
公开(公告)号：JPH10131966A
公开(公告)日：1998-05-22
申请号：JP30390496
申请日：1996-10-30
申请人： EBARA CORP
发明人： SATO KAZUKI , MIYAMOTO MATSUTARO
IPC分类号： F16C32/04 , F16C39/06
摘要： PROBLEM TO BE SOLVED: To enhance radial restoring force with simple structure and prevent the generation of demagnetization with the lapse of time by forming the overlapped structure of a plurality of ring-like permanent magnets on both rotating side and fixed side, and piling the radially magnetized permanent magnets in such a way that the magnetized directions are reverse. SOLUTION: A pluraility of ring-like permanent magnets 26, 26, 26 are formed in an axially overlapped state on the fixed side. The respective ring-like permanent magnets are radially magnetized in the magnetic pole mangetizing direction of N-poles and S-poles. Ring-like permanent magnets 25, 25, 25 on the rotating side are also magnetized radially in the magnetic pole magnetizing direction of N-poles and Spoles. The inner peripheral surface of the fixed side permanent magnet and the outer peripheral surface of the rotating side permanent magnet are axially aligned so as to face each other with a void A. The facing magnetic poles in the A are therefore like-poles, so that magnetic repulsive force works, and a rotor receives radial force so as to be supported in a levitated state, thus constituting a radial magnetic bearing.

26. 发明专利

JPH0833269A TURBO MOLECULAR DRAG PUMP 失效
公开(公告)号：JPH0833269A
公开(公告)日：1996-02-02
申请号：JP18295694
申请日：1994-07-12
申请人： EBARA CORP
发明人： SATO KAZUKI , SHIRAO YUJI , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04 , H02K7/09 , H02K7/14
摘要： PURPOSE:To obtain a turbo molecular drag pump excellent in stability and assembled/disassembled easily. CONSTITUTION:The turbo molecular drag pump 10 comprises a rotating section including an impeller 12, a rotary shaft 14 and a motor, a fixed section 16, and a magnetic bearing unit including a radial bearing and an axial bearing. The radial bearing comprises passive bearings 20, 22 including permanent magnets 28, 30, 32, 34. The passive magnetic bearings 20, 22 are disposed at two different positions in the axial direction and the radial vibration thereof is damped through damping mechanisms 40, 50.

27. 发明专利

JP2002180988A VACUUM PUMP 审中-公开
公开(公告)号：JP2002180988A
公开(公告)日：2002-06-26
申请号：JP2001306490
申请日：2001-10-02
申请人： EBARA CORP
发明人： MIYAMOTO MATSUTARO
IPC分类号： F04D29/02 , F04D19/04 , F04D29/08 , F04D29/52 , F04D29/56
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump capable of widely setting an operable range of the pump and improving the durability of the pump by retaining respective components of the pump within an allowable temperature range while preventing deposition of a reaction product caused by an exhausted gas inside the pump. SOLUTION: This vacuum pump is provided with a suction port 1a and an exhaust port 20, and an exhaust part comprising a vane exhaust portion L1 and/or a vane exhaust portion L2 is constituted of a rotor R and a stator S inside a pump casing 1. A heating means 30 heating a stator side member 19 of the exhaust portion L2 on the side of the exhaust port 20 is disposed on the pump inside, which becomes a vacuum region in the operation, in such a state as making contact with, at least, a part of the stator side member 19 on the side of the exhaust port 20.

28. 发明专利

JP2001304173A TURBO-MOLECULAR PUMP 失效
公开(公告)号：JP2001304173A
公开(公告)日：2001-10-31
申请号：JP2000118629
申请日：2000-04-19
申请人： EBARA CORP
发明人： YAMAMOTO JUICHI , SOFUGAWA TAKUJI , MIYAMOTO MATSUTARO , SHIOKAWA ATSUSHI
IPC分类号： F04D27/00 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo-molecular pump which has a valve element covering an inlet port provided to a casing so as to be capable of opening/closing, can constitute a whole of the turbo-molecular pump including a valve device to be reduced in size, and includes a valve driving mechanism in which high reliability in opening/closing of the valve element can be realized. SOLUTION: In this turbo-molecular pump, a rotor R and a stator S are stored inside the casing 13, and an exhaust passage is provided between the rotor R and the stator S. This turbo-molecular pump comprises: the valve element 15 covering the inlet port 14 provided to the casing 13 so as to be capable of opening/closing; and the valve driving mechanism driving the valve element 15. The valve driving mechanism 40 is constituted of a valve rod 30 inserted through at least a through hole formed in the rotor, an elevation mechanism comprised of a ball screw 44 and a ball screw nut 46, and a servomotor 43 for driving the elevation mechanism.

29. 发明专利

JPH11230084A TURBO MOLECULAR PUMP 失效
公开(公告)号：JPH11230084A
公开(公告)日：1999-08-24
申请号：JP5298698
申请日：1998-02-18
申请人： EBARA CORP
发明人： KAWASAKI HIROYUKI , IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04 , F16C32/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump formed into its compact size in the axial direction and having sufficient exhausting/compressing capabilities. SOLUTION: A turbo molecular pump is provided with a rotor R capable of being rotated at high speed, a stator S fixed to casings 10, 12, a vane exhausting part L1 constituted by alternately arranging rotary vanes 30 on the rotor R side and fixed vanes 32 on the stator S side, and the thread groove exhausting part L2 having thread groove exhausting passages 40a, 40b, 40c, 40d, 40e formed among rotational cylindrical parts 36a, 36b, 36c on the rotor R side and fixed cylindrical parts 38a, 38b on the stator S side on the downstream side of the vane exhausting parts. At least two or more thread groove exhaust passages are concentrically provided, and the ratio H/D of the pump main body height H and the maximum diameter D is set to 0.7 or less.

30. 发明专利

JPH1162882A TURBO MOLECULAR PUMP 失效
公开(公告)号：JPH1162882A
公开(公告)日：1999-03-05
申请号：JP23543897
申请日：1997-08-15
申请人： EBARA CORP
发明人： SHIOKAWA ATSUSHI , MIYAMOTO MATSUTARO , SOFUGAWA TAKUJI , NAKAZAWA TOSHIHARU
IPC分类号： F04D17/16 , F04D19/04 , H02K7/09
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump in which the whole including a valve device can be constituted into a compact size and contamination by a driving mechanism of a valve can be prevented. SOLUTION: A turbo molecular pump in which a rotor R and a stator S are housed in a casing 16, and an exhaust passage is constituted between the rotor R and the stator S is provided with a valve element 20 for covering a suction port 18 provided on a casing 16 so that it may be freely opened and closed, a valve driving mechanism 54 for driving the valve element 20 through a valve element supporting member 50 inserted through a through hole 52 formed on the rotor R and/or the stator S, and magnetic bearing devices 70, 72 for supporting the valve body supporting member 50 in the non contact state.

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