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    • 12. 发明专利
    • Manufacture of vertical magnetic recording body
    • 垂直磁记录体的制造
    • JPS59215025A
    • 1984-12-04
    • JP8838983
    • 1983-05-21
    • Ulvac Corp
    • NAKAMURA KIYUUZOUOOTA YOSHIFUMIYAMADA HIROKI
    • C23C14/00C23C14/34G11B5/85G11B5/851H01F41/18G11B5/84C23C15/00
    • G11B5/851
    • PURPOSE:To manufacture a magnetic recording body having an excellent vertical magnetizing characteristic by sputtering a target made of simple substance or alloy (magnetic metal Me) of an optional magnetic metal in a vacuum tank and introducing gaseous O2 at the same time. CONSTITUTION:A turning drum cooling can 3, a winding roll 4 and a delivery roll 5 at upper/left/right of the can 3 are provided in a tank 1, a tape base (a) made of a PET film is laid over and the base (a) is made run in the direction of the arrow. A sputtering cathode 7 provided with a magnetic metal Me layer 6 is installed at the upper face just beneath the can 3, rising metal Me atoms vertically sputtered by the cathode 7 only pass through a center through-hole 9 of a preventing deposition plate 8 and made incident and adhered vertically to the face of the base (a). The tip of an introducing tube 10 introducing oxygen O2 is provided while being directed to the through-hole 9.
    • 目的:通过在真空槽中溅射由可选择的磁性金属的单质或合金(磁性金属Me)制成的靶,同时引入气态O 2,制造具有优异的垂直磁化特性的磁记录体。 构成:在罐1中设置有转筒冷却罐3,卷绕辊4和罐3的上/左/右侧的输送辊5,由PET膜制成的带基(a) 基座(a)沿箭头方向运行。 设置有磁性金属Me层6的溅射阴极7安装在罐3正下方的上表面,由阴极7垂直溅射的上升的金属Me原子仅穿过防止沉积板8的中心通孔9, 并且垂直粘附在基部(a)的表面上。 引入氧气O 2的导入管10的前端设置在通向通孔9的同时。
    • 13. 发明专利
    • Manufacture of vertical magnetic recording body
    • 垂直磁记录体的制造
    • JPS59213033A
    • 1984-12-01
    • JP8578683
    • 1983-05-18
    • Ulvac Corp
    • NAKAMURA KIYUUZOUOOTA YOSHIFUMIYAMADA HIROKI
    • C23C14/00C23C14/08G11B5/85H01F41/18G11B5/84C23C15/00
    • G11B5/85
    • PURPOSE:To raise magnetic characteristics by ionizing one part in a vertical vapor-deposition process of a magnetic metal or an alloy vapor. CONSTITUTION:The inside of a vacuum enclosed vessel 1 is evacuated, and an evaporating material A of a prescribed composition is heated and evaporated by an electronic beam heating device 8. On the other hand, oxygen is led in from an oxygen leading-in pipe 11, and for instance, a positive DC voltage is applied to an electrode 12 connected to a DC power source 13. An electron from an electronic beam and a secondary electron from an evaporating liquid surface are attracted to a positive electric field, and a metallic vapor and an oxygen atom are partially ionized. In this state, the vapor of a magnetic metal is vapor- deposited roughly vertically to the lower face of a tape base material B fed out of a roll 4 passing through an opening 10 and running at a constant speed along the lower end face of a can 3 being right above said opening. In this way, a vertical magnetic tape having a vertically magnetized film (a) whose magnetic characteristic has been raised is obtained around a winding roll 5.
    • 目的:通过在磁性金属或合金蒸气的垂直气相沉积工艺中电离一部分来提高磁特性。 构成:将真空密封容器1的内部抽真空,并通过电子束加热装置8将规定组成的蒸发材料A加热并蒸发。另一方面,氧气从氧气导入管 例如,对连接到DC电源13的电极12施加正的直流电压。来自电子束的电子和来自蒸发液面的二次电子被吸引到正电场,并且金属 蒸汽和氧原子被部分电离。 在这种状态下,磁性金属的蒸汽大致垂直地垂直于从通过开口10的辊4送出的带状基材B的下表面,并且沿着一个开口10的下端面以恒定的速度运行 可以3在正确的开口上方。 以这种方式,在卷绕辊5周围获得具有磁特性已经升高的垂直磁化膜(a)的垂直磁带。