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11. 发明专利

JPH05332967A 失效
公开(公告)号：JPH05332967A
公开(公告)日：1993-12-17
申请号：JP13943692
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： ONISHI HISAO , KUDO SHUZO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor having a relatively simple and inexpensive structure and excellent selectivity for a nitrogen oxide, by constructing it of a gas detecting part of which the main constituent is a specific composite oxide and of electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a gas detecting part 3 of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula ABO2+8 and of electrodes 4 and 5 which are connected electrically with the detecting part 3. In the formula, A is a group IIa element; B is a transition metal element which can be bivalent, and delta is -0.3 to +0.6. This composite oxide produces a phase of B(NO3)2 reversibly by a vapor-solid phase reaction with a nitrogen oxide gas. Since the B(NO3)2 thus produced is a nonconductive substance, the detecting part 3 itself shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change in the electric resistance value is detected by using the electrodes 4 and 5 provided for the detecting part 3 and only the concentration of the nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected with excellent selectivity.

12. 发明专利

JPS638548A GAS SENSOR AND ITS MANUFACTURE 失效
公开(公告)号：JPS638548A
公开(公告)日：1988-01-14
申请号：JP15258586
申请日：1986-06-27
申请人： OSAKA GAS CO LTD
发明人： IPPONMATSU MASAMICHI , MATSUMOTO TAKESHI , YAKUSHIJI SHINGO , OKADA OSAMU
IPC分类号： G01N27/12
摘要： PURPOSE:To dispense with a doping process, by forming a metal oxide thin film on the surface of an insulating substrate vertically as columnar crystal with the diameter of 0.001-10mum to set the average length of a non-fused part between adjacent columnar crystals over 30% more than the length of the columnar crystal. CONSTITUTION:A gas detection is performed by utilizing changes in the impedance of a metal oxide thin film formed on the surface of an insulating substrate. A metal oxide thin film is formed on the surface of the insulating substrate vertically as columnar crystal with the diameter of 0.01-10mum. In addition, the average length of a non-fused part between adjacent columnar crystals is set over 30% more than the length of the columnar crystal. For example, a silicon wafer as substrate is heated in oxygen or steam at 1,000 deg.C for 2hr to form an SiO2 insulation film on the surface thereof. Then, an SnO2 sintered body as target is subjected to a sputtering with an evaporating operation to produce a gas sensor.

13. 发明专利

JPS61191954A METAL OXIDE THIN FILM GAS SENSOR ELEMENT 失效
公开(公告)号：JPS61191954A
公开(公告)日：1986-08-26
申请号：JP3222885
申请日：1985-02-20
申请人： OSAKA GAS CO LTD
发明人： MATSUMOTO TAKESHI , OKADA OSAMU , NAKAMURA YUJI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a uniform performance sensor with a high sensitivity dispensing with any doping process, by using an evaporation material source of metal or metal oxide to form an evaporation layer having a specified crystal orientation property with respect to the interface to contact a vapor phase. CONSTITUTION:After an oxide insulation layer 3 such as SiO2 is formed on the surface of Si or the like as substrate 1, a metal oxide thin film semiconductor layer 5 is to be formed by physical evaporation method or chemical evaporation method. The evaporation material source herein use shall be metal such as Sn, Zn and the like or the oxide thereof. Then, when the semiconductor layer 5 is formed under a specified condition depending on the material of the substrate 1, type of the evaporation material source, evaporation method and the like, the layer 5 is formed having a specified crystal orientation property with respect to the interface to contact a gaseous phase. For example, when the intensity of diffracted X rays as obtained when CuK as ray source is subjected to an X rays diffraction is I1-I4 sequentially, the ray intensity on (211) face and (110) face will be the highest. This enables the formation of the semiconductor layer 5 to meet a specified requirement of I2/I1

14. 发明专利

JPH05332973A 失效
公开(公告)号：JPH05332973A
公开(公告)日：1993-12-17
申请号：JP13944292
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： MATSUMOTO TAKESHI , ONISHI HISAO , KUDO SHUZO , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor being inexpensive and durable by providing a gas detecting part of which the main constituent is a specific composite oxide and electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a base 2 provided with a gas detecting part 3 of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula Tl2-XAXA'2 CanCun+1O2n+6-delta and by providing current applying electrodes 4 and voltage detecting electrodes 5 which are connected electrically with this gas detecting part 3. In the formula, A is a group IVb element, A' is a group IIa elements, (x) is 0 to 2, (n) is 1 or greater and delta is 0 to 0.2. The composite oxide has a layer-shaped oxygen lattice defect structure in a crystal structure and a nitrogen oxide molecule is made to coordinate with and eliminated from a portion of this oxygen defect reversibly. When this reaction occurs, the gas detecting part 3 shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change in the electric resistance value is detected by using the electrodes 4 and 5 and thereby the concentration of a nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected.

15. 发明专利

JPH053895B2 失效
公开(公告)号：JPH053895B2
公开(公告)日：1993-01-18
申请号：JP3222885
申请日：1985-02-20
申请人： OSAKA GAS CO LTD
发明人： MATSUMOTO TAKESHI , OKADA OSAMU , NAKAMURA JUJI
IPC分类号： G01N27/12

16. 发明专利

JPH05332972A 失效
公开(公告)号：JPH05332972A
公开(公告)日：1993-12-17
申请号：JP13944192
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： KUDO SHUZO , ONISHI HISAO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor being inexpensive and durable by providing a gas detecting part of which the main constituent is a composite oxide and electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a base 2 provided with a thin-film-shaped gas detecting part 3 of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula Bi4-XA'X(Ca1-yB'y)nCun+1O2n+6+ or -delta and by providing current applying electrodes 4 and voltage detecting electrodes 5 which are connected electrically with this gas detecting part 3. In the formula, A' is an alkaline-earth element, B' is a group IIIa element, (x) is 0 to 3, (y) is 0 to 1, (n) is 1 or greater and delta is 0 to 1. The composite oxide has a layer-shaped oxygen lattice defect structure in a crystal structure and a nitrogen oxide molecule is made to coordinate with and eliminated from a portion of this oxygen defect reversibly. When this reaction occurs, the gas detecting part 3 shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change is detected by using the electrodes 4 and 5 and thereby the concentration of a nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected.

17. 发明专利

JPH05332971A 失效
公开(公告)号：JPH05332971A
公开(公告)日：1993-12-17
申请号：JP13944092
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： MATSUMOTO TAKESHI , ONISHI HISAO , KUDO SHUZO , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor being inexpensive and durable by providing a gas detecting part of which the main constituent is a specific composite oxide and electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a base 2 provided with a gas detecting part 3 which is formed in a thin film of a composite oxide having electric conductivity or semiconductivity and expressed by a formula Bi2-XAXSr2CanCun+1O2n+6-delta and by providing current applying electrodes 4 and voltage detecting electrodes 5 which are connected electrically with this gas detecting part 3. In the formula, A is a group IVb element, (x) is 0 to 2, (n) is 1 or greater and delta is 0 to 0.2. The composite oxide has a layer-shaped oxygen lattice defect structure in a crystal structure and a nitrogen oxide molecule is made to coordinate with and eliminated from a portion of an oxygen defect reversibly. When this reaction occurs, the gas detecting part 3 shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change is detected by using the electrodes 4 and 4 and thereby the concentration of a nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected.

18. 发明专利

JPH0772109A SENSOR AND METHOD FOR DETECTING NITROGEN OXIDE 失效
公开(公告)号：JPH0772109A
公开(公告)日：1995-03-17
申请号：JP22083393
申请日：1993-09-06
申请人： OSAKA GAS CO LTD
发明人： KUDO SHUZO , ONISHI HISAO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To make a sensor possible to detect nitrogen oxide even at a relatively low concentration by maintaining a thin film-like gas detection section mainly composed of a compound oxide as given by a specified formula and a detection section provided with an electrode connected thereto at a specified temperature. CONSTITUTION:The nitrogen oxide detection sensor 1 has a thin film-like gas detection section 3 formed on an SrTiO3 substrate 2 and the detection section 3 is provided with a pair of Pt current application electrodes 4 and a Pt voltage detection electrode 5. Moreover, the substrate 2 is provided with a ceramic heater plate 6 as heating means and the temperature of the sensor 1 is maintained at 340-380 deg.C. The main component of the detection section 3 is YBa2Cu3O7delta (delta=0-1). With such an arrangement, detection is made as changes in the electric resistance value of the detection section 3. The detection section 3 is a thin film and is so arranged to increase the portion of a part varying in resistance by a gaseous phase-solid phase reaction when the nitrogen oxide reacts with the film thereby reducing the effect of diffusion time. This make it possible to improve the speed of absorbing and releasing the nitrogen oxide thereby achieving higher response of sensitivity even at a low concentration.

19. 发明专利

JPH05332968A 失效
公开(公告)号：JPH05332968A
公开(公告)日：1993-12-17
申请号：JP13943792
申请日：1992-05-29
申请人： OSAKA GAS CO LTD
发明人： ONISHI HISAO , KUDO SHUZO , MATSUMOTO TAKESHI , IPPONMATSU MASAMICHI
IPC分类号： G01N27/12
摘要： PURPOSE:To obtain a nitrogen oxide detecting sensor having a relatively simple and inexpensive structure and durability by providing a gas detecting part of which the main constituent is a specific composite oxide and electrodes which are connected electrically with the gas detecting part. CONSTITUTION:A nitrogen oxide detecting sensor includes a gas detecting part 3 of which the main constituent is a composite oxide having electric conductivity or semiconductivity and expressed by a formula A1-xA'xMO2+ or -sigma and of electrodes 4 and 5 which are connected electrically with the detecting part 3. In the formula, A is a group IIIa element; A' is a group IIa element; (x) is a number smaller 1; M is a transition metal element; and delta is 0 to 0.2. In this composite oxide, a nitrogen oxide gas reacts reversibly with M of the surface of the gas detecting part by a vapor-solid phase reaction. When this adsorptive reaction occurs, the detecting part 3 shows a change in an electric resistance value in accordance with the concentration of a nitrogen oxide in a vapor phase. This change in the electric resistance value is detected by using the electrodes 4 and 5 provided for the sensor and thereby the concentration of the nitrogen oxide gas contained in the air, a combustion exhaust gas or the like can be detected.

20. 发明专利

JPH0643978B2 失效
公开(公告)号：JPH0643978B2
公开(公告)日：1994-06-08
申请号：JP15258586
申请日：1986-06-27
申请人： OSAKA GAS CO LTD
发明人： IPPONMATSU MASAMICHI , MATSUMOTO TAKESHI , YAKUSHIJI SHINGO , OKADA OSAMU
IPC分类号： G01N27/12

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