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11. 发明专利

JPH03264662A DEVICE FOR FORMING THIN FILM 失效
公开(公告)号：JPH03264662A
公开(公告)日：1991-11-25
申请号：JP6307290
申请日：1990-03-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： OHASHI SEIICHI
IPC分类号： C23C14/32
摘要： PURPOSE:To prevent spitting due to the liquefaction of vapor in a nozzle by heating the vicinity of the nozzle fitted to a crucible to a temp. nearly equal to that of the body of the crucible when vapor of an evaporating substance is spouted from the nozzle. CONSTITUTION:A substrate 19 and a crucible 31 are set in a vacuum vessel 10, an evaporating substance 12 is charged into the crucible 31 and the body of the crucible 31 is heated with a filament 33. Vapor 15 of the evaporating substance 12 is spouted from a nozzle 31a fitted to the crucible 31 and a thin film 20 is formed on the surface of the substrate 19. At this time, the filament 33 is structured so that the lid of the crucible 31 receives a larger number of collided electrons than the body and the vicinity of the nozzle 31a is heated to a temp. nearly equal to that of the body. Since the vapor 15 generated from the crucible 31 does not liquefy in the nozzle 31a, spitting can be prevented.

12. 发明专利

JPH02247377A THIN FILM FORMING DEVICE 失效
公开(公告)号：JPH02247377A
公开(公告)日：1990-10-03
申请号：JP6606689
申请日：1989-03-20
申请人： MITSUBISHI ELECTRIC CORP
发明人： OHASHI SEIICHI
IPC分类号： C23C14/32 , C23C14/56
摘要： PURPOSE:To prevent damage of a base plate and to enable the device to cope with mass production of a formed film by carrying the base plate transferred to a single article cassette from the base plate cassettes into/from a vapor deposition chamber while intactly housing the base plate on the single article cassette and performing vapor deposition. CONSTITUTION:The base plate cassettes 9a, 9b and a single article cassette 11 are arranged in a base plate carrier chamber 15. One sheet of the base plate 1 is transferred at a time to the single article cassette 11 via a feeder 10 from the cassette 9a with a plurality of base plates 1 housed thereon. This base plate 1 is passed through a gate valve 8 via a feeder 7 and carried into a vapor deposition chamber 4 while intactly housing this base plate 1 on the single article cassette 11. Therein a vapor deposited film is formed on the surface of the base plate 1 by the vapor depositing ion beams supplied from the ICB sources 5 provided to the under part. The base plate 1 is taken out by the feeder 7 after the thin film has been formed. The base plate 1 is transferred on the cassette 9b from the single article cassette 11 via a discharger 14.

13. 发明专利

JPH01302679A EXTREME INFRARED RADIATION HEATING DEVICE WITH INDUCTION HEATING COIL 失效
公开(公告)号：JPH01302679A
公开(公告)日：1989-12-06
申请号：JP14103488
申请日：1988-06-07
申请人： MITSUBISHI ELECTRIC CORP
发明人： OHASHI SEIICHI
IPC分类号： H05B6/10 , B05C9/14 , B29C35/02
摘要： PURPOSE:To prevent attachment of evaporated organic substance to the wall of a furnace by mating a conductor, which is arranged in an induction heating coil, with an object to be heated. CONSTITUTION:A conductor 9 is interposed between an induction heating coil 10 and an object to be heated 8. On the side where this conductor 9 mates with the object 8, a radiating member 29 is installed which generates electromagnetic waves including extreme infrared radiations when heated. The temp. of this conductor 9 installed inside the heating coil 10 is kept constant or within a certain range, and the object 8 is heated by the radiative heat from the conductor 9. At this time, its temp. shall be over the setting point of the solvent for the coating used. This prevents attachment of the evaporated organic substance to the conductor 9.

14. 发明专利

JPH01200113A INDUCTION HEATING TYPE WASTE INCINERATING DEVICE 失效
公开(公告)号：JPH01200113A
公开(公告)日：1989-08-11
申请号：JP2597188
申请日：1988-02-04
申请人： MITSUBISHI ELECTRIC CORP
发明人： OHASHI SEIICHI , HASHIMOTO GAKUO
IPC分类号： F23G5/00 , F23G5/10
摘要： PURPOSE:To enable further complete incineration and decomposition of waste, by a method wherein the temperature of a combustion chamber is increased to a given value by induction heating, and the waste is thermally decomposited by means of the heat. CONSTITUTION:With a cover 6a formed by a heat insulating material opened, a substance to be incinerated is contained in a combustion chamber 6 formed by a material capable of being induction-heated, and the cover 6a is closed for sealing. A high frequency current is caused to flow to a heating coil 8 by means of source equipment 9 to induction-heat the combustion chamber 6 to heat the substance to be incinerated to a flashing temperature or an ignition temperature. In this case, air is fed through an air feed nozzle 11, oxidation and decomposition of the substance to be incinerated in the combustion chamber 6 is promoted to generate steam and waste gas. The steam and waste gas are discharged to the open air through a discharge pipe 13.

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