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    • 13. 发明专利
    • Heating device
    • 加热装置
    • JP2008072080A
    • 2008-03-27
    • JP2007047493
    • 2007-02-27
    • Kobe Steel Ltd株式会社神戸製鋼所
    • HAMAGUCHI MAKI
    • H01L21/31C23C16/46H01L21/22H01L21/324H05B6/02H05B6/10
    • PROBLEM TO BE SOLVED: To provide a heating device capable of increasing the temperature-rising rate of a semiconductor wafer by suppressing heat radiation from a glass type carbon heating element to the outside of a reaction vessel when raising the temperature of the semiconductor wafer and of increasing the temperature-reducing rate of the semiconductor wafer by releasing the heat radiation suppression state when reducing the temperature of the semiconductor wafer after terminating energizing a high frequency induction coil in a heating process of the semiconductor wafer by causing the glass type carbon heating element to generate heat by induction.
      SOLUTION: The heating device includes a reaction vessel 1 in which a semiconductor wafer W is accommodated, a glass type carbon heating element 2 arranged in the reaction vessel 1 and heating the semiconductor wafer W, a high frequency induction coil 3 arranged outside the reaction vessel 1 and causing the glass type carbon heating element 2 to generate heat by induction, and a movable heat reflecting plate 4 arranged between the reaction vessel 1 and the high frequency induction coil 3 and configured so that the states in opposition to the glass type carbon heating element 2 can be made differ between when the high frequency induction coil 3 is being energized and when the energizing is terminated.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供一种加热装置,其能够通过在升高半导体的温度的同时抑制从玻璃型碳加热元件向反应容器的外部的散热来提高半导体晶片的升温速度 晶片,并且通过在半导体晶片的加热过程中终止激励高频感应线圈之后降低半导体晶片的温度时释放放热抑制状态来提高半导体晶片的降温速率,通过使玻璃碳 加热元件通过感应产生热量。 解决方案:加热装置包括其中容纳有半导体晶片W的反应容器1,布置在反应容器1中并加热半导体晶片W的玻璃型碳加热元件2,布置在外部的高频感应线圈3 反应容器1并使玻璃碳加热元件2通过感应产生热量;以及可移动热反射板4,其布置在反应容器1和高频感应线圈3之间,并且构造成使得与玻璃相对的状态 当高频感应线圈3被通电时和当通电结束时,可以使碳化碳加热元件2不同。 版权所有(C)2008,JPO&INPIT
    • 15. 发明专利
    • Method for manufacturing glassy carbon
    • 制造玻璃碳的方法
    • JP2007161544A
    • 2007-06-28
    • JP2005361891
    • 2005-12-15
    • Kobe Steel Ltd株式会社神戸製鋼所
    • HAMAGUCHI MAKI
    • C04B35/52
    • C04B35/6269C01B32/05C04B35/524
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing glassy carbon by which a thermosetting resin can be filled into a recess of a molding form without applying high pressure for a long time and further a deformation or a breakage of the resin is suppressed during its removing from the molding form. SOLUTION: The method for manufacturing glassy carbon has a resin-filling step of pouring a thermosetting resin having viscosity of 200 P or lower and molding shrinkage of 2.0-8.0% into a recess of a molding form, a molding step of molding the thermosetting resin poured into the molding form by heating, a demolding step of demolding the molded resin from the molding form, and a carbonizing step of carbonizing the demolded resin. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种制造玻璃碳的方法,通过该方法可以将热固性树脂填充到模制形式的凹部中,而不长时间施加高压,并且进一步导致树脂的变形或断裂 在其从模制形式中移除期间被抑制。 解决方案:制造玻璃碳的方法具有树脂填充步骤,将具有200P或更低的粘度和2.0-8.0%的模塑收缩率的热固性树脂倒入模制件的凹部中,模制成型步骤 通过加热将热固性树脂注入成型中,从模塑形式将模塑树脂脱模的脱模步骤和将脱模树脂碳化的碳化步骤。 版权所有(C)2007,JPO&INPIT
    • 18. 发明专利
    • 無灰炭の製造装置および無灰炭の製造方法
    • 无煤煤粉生产设备及无炉煤生产方法
    • JP2014208757A
    • 2014-11-06
    • JP2013251273
    • 2013-12-04
    • 株式会社神戸製鋼所Kobe Steel Ltd
    • OKUYAMA NORIYUKISAKAI KOJIYOSHIDA TAKUYAKINOSHITA SHIGERUHAMAGUCHI MAKI
    • C10L5/00
    • C10L5/04C10L9/00C10L2290/06C10L2290/08C10L2290/12C10L2290/22C10L2290/24C10L2290/46C10L2290/54C10L2290/543C10L2290/544Y02E50/30
    • 【課題】抽出率を高めることができ、無灰炭の収率を向上させることができる無灰炭の製造装置および無灰炭の製造方法を提供すること。【解決手段】無灰炭の製造装置1は、溶剤を加熱する予熱器4と、石炭と予熱器4にて加熱された溶剤とを混合してなるスラリーから溶剤に可溶な石炭成分を抽出する抽出槽6と、予熱器4を通り一端が抽出槽6に接続される供給管10と、予熱器4よりも下流側の供給管10に接続され、溶剤が逆流してこないように供給管10への供給部17を加圧して供給管10に石炭を供給するロックホッパ5(石炭供給手段)と、抽出槽6にて石炭成分が抽出されたスラリーから石炭成分を含む溶液部を分離する重力沈降槽7(固液分離装置)と、重力沈降槽7にて分離された溶液部から溶剤を蒸発分離して無灰炭を得る溶剤分離器8とを備える。【選択図】図1
    • 要解决的问题:提供能够提高无灰煤的提取率和提高无灰煤的产率的无灰煤生产装置,以及无灰煤的制造方法。解决方案:无灰煤生产装置1包括:预热器4, 溶剂; 提取罐6,其提取可溶于由通过混合煤和由预热器4加热的溶剂获得的浆料制成的溶剂中的煤成分; 通过预热器4的进料管10,其一端连接到提取罐6; 一个与进料管10相比进一步向预热器4下游侧连接的闭锁料斗5(送煤装置),将进料部分17加压到进料管10,使得溶剂不回流并将煤送入 进料管10; 将含有煤成分的溶液部与从其中将煤成分萃取在提取槽6中的浆料分离的重力沉降槽7(固液分离器) 以及将溶剂从在重力沉淀池7中分离的溶液部分蒸发分离以获得无灰煤的溶剂分离器8。
    • 19. 发明专利
    • Apparatus and method for production of ashless coal
    • 用于生产无烟煤的装置和方法
    • JP2014189740A
    • 2014-10-06
    • JP2013069035
    • 2013-03-28
    • Kobe Steel Ltd株式会社神戸製鋼所
    • OKUYAMA NORIYUKIHAMAGUCHI MAKISAKAI KOJISHISHIDO TAKAHIRO
    • C10L5/00
    • C10L9/00C10L5/04C10L2290/12C10L2290/22C10L2290/24C10L2290/54C10L2290/544
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for production of ashless coal which allow reduction of the amount of the solvent and reduction of the scale of the apparatus.SOLUTION: A production apparatus 1 for production of ashless coal includes an extraction vessel 6 for extracting solvent-soluble ingredients from a slurry prepared by mixing coal with a solvent, a first gravitational sedimentation vessel 8 (first solid-liquid separator) which separates the slurry obtained in the extraction vessel 6 into a solution part containing the solvent-soluble ingredients and a solid concentrated liquid containing solvent-insoluble ingredients, a solvent separator 12 which separates the solvent, through evaporation, from the solution part separated in the first gravitational sedimentation vessel 8 to obtain ashless coal, a second gravitational sedimentation vessel 11 (second solid-liquid separator) which separates a slurry obtained by mixing the solid concentrated liquid separated in the first gravitational sedimentation vessel 8 with a solvent into a solution part containing the solvent-soluble ingredients and a solid concentrated liquid containing solvent-insoluble ingredients, and a solution part transfer pipe 17 which is connected, at one end, to the second gravitational sedimentation vessel 11 and feeds the solution part separated in the second gravitational sedimentation vessel 11 to the extraction vessel 6.
    • 要解决的问题:提供一种生产无灰煤的设备和方法,其允许减少溶剂的量并减少设备的规模。解决方案:用于生产无灰煤的生产设备1包括提取容器 6,用于通过将煤与溶剂混合制备的浆料中提取溶剂可溶成分,第一重力沉降容器8(第一固液分离器)将将萃取容器6中获得的浆料分离成含有溶剂可溶性的溶液部分 成分和含有溶剂不溶性成分的固体浓缩液体,通过蒸发从第一重力沉淀容器8中分离的溶液部分分离溶剂以获得无灰煤的溶剂分离器12,第二重力沉降容器11(第二固体 - 液体分离器),其分离通过混合分离的固体浓缩液体获得的浆料 在具有溶剂的第一引力沉降容器8中装入含有溶剂可溶成分的溶液部分和含有溶剂不溶成分的固体浓缩液体,以及溶液部分输送管17,其一端连接到第二重力 将第二重力沉淀容器11中分离的溶液部分供给到萃取容器6。