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11. 发明专利

JP2003007246A Electron microscope 审中-公开
标题翻译：电子显微镜
公开(公告)号：JP2003007246A
公开(公告)日：2003-01-10
申请号：JP2001189355
申请日：2001-06-22
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20 , H01J37/26 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide an electron microscope that significantly increases work efficiency.
SOLUTION: That part of an electron-optical lens barrel 20 of the transmission electron microscope, which has an objective lens 23 is mounted with at least two preprocessing chambers 28A and 28B. Electron-optical lens barrels 29A and 29B of a focused ion beam device are mounted on respective top lids of the preprocessing chambers. Walls of the pre-exhaust chambers 28A and 28B opposite to the electron-optical lens barrel 20 of the transmission electron microscope have respective holes 36A and 36B, in which sample holders 35A and 35B can be inserted. While an observed sample Sa is observed under the transmission electron microscope, an observed sample Sb is subjected to additional machining in the focused ion beam device. While the observed sample Sa is subjected to additional machining in the focused ion beam device, the observed sample Sb is observed under the transmission electron microscope.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供显着提高工作效率的电子显微镜。解决方案：具有物镜23的透射电子显微镜的电子光学镜筒20的一部分安装有至少两个预处理室28A和28B。聚焦离子束装置的电子光学镜筒29A和29B安装在预处理室的相应的顶盖上。与透射电子显微镜的电子光学透镜镜筒20相对的预排气室28A和28B的壁具有可插入样品保持器35A和35B的孔36A和36B。虽然在透射电子显微镜下观察到观察到的样品Sa，但是在聚焦离子束装置中对观察到的样品Sb进行附加的机械加工。在观察到的样品Sa在聚焦离子束装置中进行附加的加工时，在透射电子显微镜下观察观察到的样品Sb。

12. 发明专利

JP2002190269A SAMPLE BLOCK 失效
公开(公告)号：JP2002190269A
公开(公告)日：2002-07-05
申请号：JP2000388667
申请日：2000-12-21
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , ENDO NORIAKI
IPC分类号： H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample block suitable for holding a sample supporting film. SOLUTION: The sample block has pillar-like holes 51A, 51B along an edge part of a sample block 50 with partially cut parts in the direction parallel to an axis O. The bottom surface of these holes are used for holding a supporting film. A sample supporting film 38 is picked up with a pair of tweezers and is placed horizontally on a supporting film holder 51A formed on the sample block 50. A sample 26 to be observed is adhered horizontally on the sample supporting film 38. The part of the supporting film holder 51A of the support film 38 to which the observed sample 26 is adhered, protruding from the bottom surface of the supporting film holder 51A, or a part of it, is pinched with a pair of tweezers and is mounted on a observed sample mounting part formed on the tip of the body 9A in a sample holder.

13. 发明专利

JP2002187099A MANIPULATOR 失效
公开(公告)号：JP2002187099A
公开(公告)日：2002-07-02
申请号：JP2000388666
申请日：2000-12-21
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： B25J7/00 , B81B1/00 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a manipulator to support a sample or the like in a charged particle beam apparatus or the like. SOLUTION: An arm 32 is attached to an tip portion of a tubular probe 31 for pick up. The arm consists of a magnetic body 33 formed in a C shape and a coil 34, and a gap 35 is formed at a central portion of its tip portion. At both end portions that are apposite to each other across the gap 35, sample holding portions (36A, 36B) having extremely thin thickness extend outward perpendicularly to a tip plane 37 while maintaining the gap. The coil 34 is wound to a portion opposite to the tip portion of the magnetic body 33, and a power source 38 is connected to both ends of the coil via lead wires 37. The power source 38 is held inside a driving apparatus 39 equipped with a driving mechanism that moves the probe 31 for pick up in X, Y and Z directions.

14. 发明专利

JP2001291483A SAMPLE HOLDING APPARATUS FOR CHARGED PARTICLE BEAM APPARATUS 失效
公开(公告)号：JP2001291483A
公开(公告)日：2001-10-19
申请号：JP2000103150
申请日：2000-04-05
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： G01N23/225 , G01N1/28 , G01N1/32 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample holding apparatus for charged particle beam apparatus, in which a processing part or an observing part of a sample can be found easily even if a sample cartridge is exchanged between charged particle beam apparatus such as FIB, TEM, and SEM, and in which there is no need to record an information of a sample on a storage case of a sample cartridge when detaching a sample cartridge from a sample holder of a charged particle beam apparatus and storing it. SOLUTION: The sample holding apparatus for a charged particle beam apparatus is composed of a sample cartridge and a sample holder. The sample cartridge is comprised of: a holding part, in which a sample is held, a memory means, in which data about the sample is stored; and a terminal for outside connection to perform reading and rewriting of a memory content, which has been stored in the memory means, from an external CPU at any time. The sample holder maintains the sample cartridge removable, transfers the memory content of the memory means obtained through the terminal for outside connection of the sample cartridge to the external CPU, and transfers the data sent from the external CPU to the memory means of the sample cartridge through the terminal for outside connection of the sample cartridge.

15. 发明专利

JP2002319365A STAGE, AND DEVICE FOR PREPARING FIB SAMPLE 失效
公开(公告)号：JP2002319365A
公开(公告)日：2002-10-31
申请号：JP2001124527
申请日：2001-04-23
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , IBE KATSUHIKO
IPC分类号： G01N1/28 , H01J37/20 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive stage of a small sized device capable of preparing a sample for a TEM and a sample for a SEM quickly in response to requirement. SOLUTION: This stage is constituted of a versatile stage 3, a support member 4 for supporting the stage 3, a driving means 5 for driving the support member 4, and a TEM holder 7 provided in the support member 4.

16. 发明专利

JPH1064468A SAMPLE HOLDER AND SAMPLE TURN-STOP MEMBER 失效
公开(公告)号：JPH1064468A
公开(公告)日：1998-03-06
申请号：JP21988296
申请日：1996-08-21
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI
IPC分类号： H01J37/20
摘要： PROBLEM TO BE SOLVED: To allow to fix a sample to a sample holder without rotating the sample. SOLUTION: This sample holder is composed of a holder main body 24 to which its base end is fixed to a holder support member 23, a sample-housing hole 26 for housing a sample 29 is formed at the front end, and a turn-stop member housing hole 27 is formed at the bottom surface of the sample-housing hole 26; and a sample presser member 32 for preventing the slipping-out of the sample 29 in the sample-housing hole 26, as well as being supported to the holder main body 24.

17. 发明专利

JP2002150984A SAMPLE HOLDER 失效
公开(公告)号：JP2002150984A
公开(公告)日：2002-05-24
申请号：JP2000342426
申请日：2000-11-09
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , OKUNISHI EIJI
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample holder which can facilitate a working, such as additional working or the like. SOLUTION: A rectangular parallelepiped-shaped support hole 32 is formed at the tip of the sample holder body 31, and the rectangular parallelepiped- shaped sample base 33 is set in this hole. As for the sample base 33, a rectangular parallelepiped-shaped groove 34 is formed perpendicular to the upper face of the sample base 33. The longitudinal and lateral sizes of the groove are respectively made a slightly larger than each of the longitudinal and lateral sizes of the sample for observation, and the height (depth) size of the groove is made considerably larger (for example, not less than two times) than the height size of the sample for observation. A probe 28 for pickup supporting the sample 26 is moved in the direction of the support hole 32 of the tip part of the sample holder body 31, and the sample 26 is inserted into the groove 34, formed in the sample base 33 set in the support hole 32.

18. 发明专利

JP2002148160A SAMPLE SUPPORTING CARTRIDGE AND SAMPLE HOLDER 失效
公开(公告)号：JP2002148160A
公开(公告)日：2002-05-22
申请号：JP2000342423
申请日：2000-11-09
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , IBE KATSUHIKO
IPC分类号： G01N1/28 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample supporting cartridge and a sample holder suitable for observation by a microscope. SOLUTION: This sample holder provided with a cartridge supporting body 51 arranged at the tip and constructed for allowing attachment/detachment of the sample supporting cartridge 51 to it is constructed of a holder main body 50 attached removably to a mirror body in an electronic microscope or a processing chamber in a focused ion beam device by means of a holder driving mechanism 52 and the holder driving mechanism 52. In the cartridge supporting body 51, a recess part 52 for supporting the sample supporting cartridge 57 is formed. Piezoelectric elements 53A and 53B protruding vertically to the bottom face of the recess part 52 are arranged in the cartridge supporting body 51. Inside the holder driving mechanism 52, a power source for driving the piezoelectric elements 53A and 53B is arranged.

19. 发明专利

JP2001210265A FOCUSED ION BEAM DEVICE 失效
公开(公告)号：JP2001210265A
公开(公告)日：2001-08-03
申请号：JP2000018544
申请日：2000-01-27
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI
IPC分类号： H01J37/305 , B23K15/00 , H01J37/31 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To facilitate the processing work for the materials. SOLUTION: The focused ion beam device comprises the ion source 2, focusing lens 4 to finely focus the ion beam generated from the ion source 2 on the material 3 to be processed, a deflector 5 for secondary scanning on the sample by means of the ion beam and so forth. Also, a thin film sheet 22 is attached to the frame 23 to be fixed to the driving shaft 24 movable on the straight line so that the frame 23 can be placed on or above the surface of the material to be processed and that it can be moved therefrom.

20. 发明专利

JPH0545265A SPECIMEN FOR PERFORMANCE EVALUATION OF SCAN TYPE ELECTROC MICROSCOPE AND METHOD FOR PREPARING SPECIMEN 失效
公开(公告)号：JPH0545265A
公开(公告)日：1993-02-23
申请号：JP22657191
申请日：1991-08-12
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI
IPC分类号： G01N1/28
摘要： PURPOSE:To prepare a specimen for evaluating the performance of a scanning electron microscope which can perform measurement of the resolution simply and provide a method for specimen preparation. CONSTITUTION:Those of evaporation particles of gold from an evaporation source 5 which have run against the edge Q of a shelter member for a work 3 for evaporative attachment of gold, go around to positions a-e on the surface of the work 3 and are adsorbed there. The number of evaporative particles having flown is the greatest in the position (a) to be decremental toward the position (e), to generate a difference in growth of the island-shaped lump. Therefore, the means grain size of island-shaped lumps is greatest in the position (a) to be decremental toward the position (e). The spacing of adjoining lumps becomes denser as going toward the position (e). Such a specimen as having the mean grain size of lumps being incremental gradually as advancing in a certain direction is set in a specimen chamber of an electroc microscope, and the position to be irradiated with electron beam is selected properly, and now measurement of the resolution can be done simply.

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