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11. 发明专利

JP2010036236A Laser beam irradiation method and apparatus 审中-公开
标题翻译：激光束辐射方法和装置
公开(公告)号：JP2010036236A
公开(公告)日：2010-02-18
申请号：JP2008205098
申请日：2008-08-08
申请人： Japan Steel Works Ltd:The , 株式会社日本製鋼所
发明人： NAKAMURA TETSUSHIGE , SATO RYOSUKE , KOYANAGI KUNIHIKO , TERAO KATSUHIRO , EBISAWA TAKASHI , OTSU HIDEHIKO
IPC分类号： B23K26/00 , B23K26/04 , B23K26/073 , B23K26/08 , H01L21/268 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a laser beam irradiation method and apparatus, which can perform uniform machining by eliminating adverse effects of heat when a photolytic reaction is caused on a substrate by laser beam irradiation. SOLUTION: In the laser beam irradiation method, the photolytic reaction is caused by irradiating a raw film precursor formed on the substrate with a laser beam in producing a thin film on the substrate. The laser beam is radiated while the substrate is rotated in the planar direction and is moved along the planar direction relative to a position to be irradiated with the laser beam. The irradiation apparatus includes a supporting section which supports the substrate on which the raw film is formed, a rotating mechanism which rotates the substrate, a moving mechanism which moves the substrate along the planar direction, a laser beam irradiation means which irradiates the substrate with the laser beam, and a controlling section which causes the photolytic reaction on the raw film by irradiating the substrate with the laser beam by the laser beam irradiation means while the substrate is rotated in the planar direction by the rotating mechanism and is moved relatively along the planar direction by the moving mechanism. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种激光束照射方法和装置，其可以通过在激光束照射下在基板上引起光解反应时消除热的不利影响而进行均匀的加工。解决方案：在激光束照射方法中，通过用激光束照射形成在基板上的原料膜前驱物在基板上产生薄膜而引起光解反应。激光束在基板沿平面方向旋转时被辐射并且相对于要被激光束照射的位置沿平面方向移动。照射装置包括：支撑部，其支撑形成有原料膜的基板;旋转基板的旋转机构;沿着平面方向移动基板的移动机构;激光束照射装置，激光束，以及控制部，其通过激光束照射装置在激光束照射基板的同时通过旋转机构在平面方向上旋转而沿着平面方向相对移动而在原料膜上引起光解反应，方向由移动机构。版权所有（C）2010，JPO＆INPIT

12. 发明专利

JP2007254180A Self-sustained lower hydrocarbon direct decomposition process and process system thereof 审中-公开
标题翻译：自主持续下层油气直接分解过程及其处理系统
公开(公告)号：JP2007254180A
公开(公告)日：2007-10-04
申请号：JP2006077958
申请日：2006-03-22
申请人： Japan Steel Works Ltd:The , 株式会社日本製鋼所
发明人： NAKAMURA TETSUSHIGE , NAKAMURA SATOSHI , KAKIHARA HAJIME
IPC分类号： C01B3/26
摘要： PROBLEM TO BE SOLVED: To carry out a direct decomposition process of hydrogen without generating carbon dioxide.
SOLUTION: The process system is equipped with a reaction pipe 1 where a lower hydrocarbon is introduced and decomposed by a catalyst into hydrogen and carbon and the produced hydrogen and a residual gas are taken out, a heating means 13 to heat the reaction pipe by using hydrogen as a combustion gas, a supply passage 11 to supply the produced hydrogen into the heating means, and a flow controller 12 disposed in the supply passage. Upon decomposing a hydrocarbon into hydrogen and carbon, the process which is self-sustaining from a viewpoint of energy and requiring no external supply of heat can be carried out without generating carbon dioxide by combusting the hydrogen produced by the reaction as a fuel and using the combustion heat for the reaction.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：在不产生二氧化碳的情况下进行氢的直接分解过程。解决方案：工艺系统配备有反应管1，其中低级烃被催化剂引入并分解成氢和碳，并且所产生的氢气和残余气体被取出;加热装置13以加热反应通过使用氢作为燃烧气体的管道，用于将所产生的氢气供给到加热装置的供给通道11和设置在供给通道中的流量控制器12。在将烃分解成氢和碳时，可以从能量的观点而不需要外部供热的方式自我维持的过程不会通过燃烧由反应产生的氢作为燃料而产生二氧化碳，并且使用用于反应的燃烧热。版权所有（C）2008，JPO＆INPIT

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