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    • 14. 发明专利
    • SEMICONDUCTOR MANUFACTURING DEVICE
    • JPH04130779A
    • 1992-05-01
    • JP25017990
    • 1990-09-21
    • HITACHI LTD
    • KANETANI TATSUNORIYUMOTO OSAMUMORIGUCHI AKISADAKABAYAMA KOJI
    • H01L29/80
    • PURPOSE:To lessen the effect of a scattering of an impurity and to obtain a device having high-mobility carriers by a method wherein high-impurity semiconductor crystal thin films are jointed to each other in such a way that they are surrounded with metal films, which are different from each other in Fermi level and work function, and moreover, a metal film for making a voltage apply is jointed to the thin films in the direction perpendicular to this junction between the thin films. CONSTITUTION:High-purity semiconductor crystal thin films (such as Si thin films) 2 are made to joint to each other in such a way that they are surrounded with metal films (such as Al films) to form an active part, an electrode (a gate electrode) 5 for current control use is provided on the active part and moreover, electrodes (drain and source electrodes) 4 and 6 for bias use are respectively provided at both ends of a device via an insulating film (such as an SiO2 film) 3 and the device is constituted. An N-type impurity 8 is doped to the semiconductor parts 2 under the electrode structures at both ends of the device for reducing a contact resistance. When a bias voltage VDS is applied to the electrodes 4 and 6, a current ID is generated. Conduction electrons to contribute to this generation are electrons, which are stored in quantum wells to be formed by the junctions between the metal films and the semiconductor crystal thin films and are fed from the wells. This feed rate of the electrons, that is, the current ID is controlled by a control voltage (a gate voltage) which is applied to the electrodes 5 and 6.