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11. 发明专利

JPH09269961A PRODUCT MANAGEMENT SYSTEM 失效
公开(公告)号：JPH09269961A
公开(公告)日：1997-10-14
申请号：JP7684896
申请日：1996-03-29
申请人： HITACHI LTD
发明人： TSUYAMA TSUTOMU , KOSHISHIBA ERI
IPC分类号： B09B5/00 , G06Q10/04 , G06Q50/00 , G06Q50/04 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To support a system to more effectively prevent an environment hindrance. SOLUTION: A collected article processing method diagnosis/indication system 1002 diagnoses and indicates the method of the appropriate processing of a product, which minimizes the environment hindrance by means of the processing of the product and which improves recycle ability. A field information analysis system 1003 predicts an environment hindrance situation by using the results of diagnosis and an indication. A product life cycle evaluation system 1001 evaluates the life cycle of the product. A diagnosis result, a prediction result on the environment hindrance and the evaluation result of the life cycle of the product are reflected on prediction on the environment hindrance, the diagnosis of the processing method and the method of evaluation on the life cycle of the product in the respective systems by an environment design coordination system 1004.

12. 发明专利

JPH07282089A PORTABLE FAULT DIAGNOSTIC DEVICE 失效
公开(公告)号：JPH07282089A
公开(公告)日：1995-10-27
申请号：JP6688794
申请日：1994-04-05
申请人： HITACHI LTD
发明人： SAKAMOTO TSUTOMU , TSUYAMA TSUTOMU , SATO SHIGERU , SHIMOSHA SADAO
IPC分类号： G06F17/40 , G06Q10/00 , G06Q50/00 , G06Q50/04 , G06Q50/10 , G06F17/60
摘要： PURPOSE:To support the fault diagnosis and the repairing result input operation of product by speedily and securely diagnosing the cause of the fault of the product. CONSTITUTION:This device is provided with a data analyzing part 1, a data base 2, a keyboard 4, a printer 5, a display 3 and a communication device 6, and these are small enough to be portable. A repairing engineer carries the diagnostic device with him to a fault-broke-out place and visually confirms the state concerning the fault product first. When the cause can not be found out, the repairing engineer inputs necessary items from the keyboard 4 of the diagnostic device so as to retrieve a knowledge base for diagnosing the product stored in the data base 2 by the analyzing part 1 so that the results of them are displayed on the display 3. Thus, the repairing engineer can make the unknown cause of the fault clear by looking at the outputted result. Consequently, the repairing engineer can diagnose the product through the use of the diagnostic device while looking at the state at the fault-broke-out place so that the accuracy of diagnosis is improved and the time for repairing is reduced.

13. 发明专利

JPH0242709A METHOD OF MANAGING PRODUCTION OF SEMICONDUCTOR WAFER AND WAFER CARRIER JIG FOR SUCH MANAGEMENT 失效
公开(公告)号：JPH0242709A
公开(公告)日：1990-02-13
申请号：JP19206088
申请日：1988-08-02
申请人： HITACHI LTD
发明人： TSUYAMA TSUTOMU , IWASAKI TAKEMASA , NAKAZATO JUN , SHIMOSHA SADAO , OTANI HARUO
IPC分类号： H01L21/673 , H01L21/02 , H01L21/027 , H01L21/30 , H01L21/68
摘要： PURPOSE:To make it possible to grasp progress of processes on the basis of a number of wafers by transferring an identification mark representing a treating process on a marginal region of a semiconductor wafer where products are not affected thereby. CONSTITUTION:Each time a semiconductor wafer 1 is treated in an exposure process, at least a mark indicating a type of products and a number of the wafer and a mark 3 indicating that the related process has been finished are put on a region close to an orientation flat 2 where chips on the wafer 1 for providing the products are not affected thereby. The identification mark 3 is transferred and engraved by photolithography. The transferred identification mark 3 is read in the following treating processes so that the semiconductor wafers 1 are identified on the basis of a number of wafers. In this manner, it is possible to indicate conditions of physical distribution and manufacture on the basis of a number of wafers as well as to manage working achievements and working results on the basis of a number of wafers.

14. 发明专利

JPS63299108A DATA COLLECTION FOR OPERATING SEMICONDUCTOR FACILITY 失效
公开(公告)号：JPS63299108A
公开(公告)日：1988-12-06
申请号：JP13117587
申请日：1987-05-29
申请人： HITACHI LTD
发明人： NAKAZATO JUN , HARADA TOSHIMASA , TSUYAMA TSUTOMU
IPC分类号： B23Q41/00 , G05B19/418 , G06Q50/00 , G06Q50/04 , H01L21/02
摘要： PURPOSE:To stably operate and monitor process equipment, to find abnormal process equipment early, and shorten the failure analysis period by a method wherein the identification code of wafers and alteration in process setting conditions and operation result information is transmitted to a computer by means of bar code. CONSTITUTION:A computer 1 is provided with an operation table 11 on which processing data of each wafer process equipment 21-2n, wafer No., process setting conditions, and operation results are recorded and a process proceeding table 12 for each wafer W1, W2,...Wn on which wafer process route, facility name, and process status are recorded. As for the alteration in the operation results and process status on this operation table 11 for the wafer process equipment and process proceeding table for each wafer 12, a bar code output unit 6 issues a bar code label, and this bar code label is read by a bar code reader 7 and fed to a computer via an interface 4 and through an information transmission pass 5 by using a guide screen of the computer. The alteration in the input items and digit number of data is all performed by the alteration in the bar code label not by a program.

15. 发明专利

JP2007179209A Recording/management method of business processes or documents 审中-公开
标题翻译：业务流程或文件的记录/管理方法
公开(公告)号：JP2007179209A
公开(公告)日：2007-07-12
申请号：JP2005375674
申请日：2005-12-27
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TSUYAMA TSUTOMU , ADACHI TETSURO
IPC分类号： G06Q10/00 , G06Q10/06 , G06Q50/00
摘要： PROBLEM TO BE SOLVED: To store and manage the contents and result of execution for each kind of business process or for each project independently of a data format so that they may be traced in future. SOLUTION: When a client 30 selects a template, which conforms to its business process, from an index page file (A) from a server 10 and requests the template, the server 10 sets for the client 30 a storage folder 26 to the storage folder 25 of an external storage device 20, generates an html file (B) which is links to the storage folder 26, and downloads the html file (B) to the client 30, together with the template. The client 30 stores the html file (B) and the template in a designated place (C). When a data file in which data are written to the template by the execution of business processes is stored in the external storage device 20, the data file is uploaded to the server 10 based on the html file (B) stored in the designated place (C) to store the data file in the storage folder 26. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：存储和管理每种业务流程的内容和执行结果，或独立于数据格式的每个项目，以便将来可以跟踪它们。解决方案：当客户端30从服务器10从索引页文件（A）中选择符合其业务处理的模板并请求模板时，服务器10将客户机30设置为存储文件夹26到外部存储装置20的存储文件夹25生成连接到存储文件夹26的html文件（B），并将该HTML文件（B）与模板一起下载到客户端30。客户端30将html文件（B）和模板存储在指定的地点（C）中。当通过执行业务处理将数据写入模板的数据文件存储在外部存储装置20中时，基于存储在指定位置的html文件（B）将数据文件上传到服务器10 C）将数据文件存储在存储文件夹26中。版权所有（C）2007，JPO＆INPIT

16. 发明专利

JP2005182558A Cost prediction/evaluation method 审中-公开
标题翻译：成本预测/评估方法
公开(公告)号：JP2005182558A
公开(公告)日：2005-07-07
申请号：JP2003424006
申请日：2003-12-22
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TSUYAMA TSUTOMU , CHIDA TAKAFUMI
IPC分类号： E04B1/00 , G06F17/50 , G06F19/00 , G06Q10/04 , G06Q50/00 , G06Q50/08 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To evaluate/improve a design proporsal without using much time and many man-hours for quickly offering a proporsal complying with a client request and change in it and minimizing a TCO in proposal of a building solution such as a building plan, an equipment plan, an energy-saving plan, a renewal plan, and a conversion plan. SOLUTION: In equipment designing, when a construction cost, a maintenance cost, and an energy (running) cost are predicted by using data or an analysis result in a data center, correlations such as trade-off are evaluated simultaneously for predicting/evaluating a total cost in the time of planning. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了评估/改进设计辅助设备，而不需要花费大量的时间和许多工时来快速提供符合客户要求的更新，并在建议解决方案（如建筑计划，设备计划，节能计划，更新计划和转换计划。解决方案：在设备设计中，通过在数据中心中使用数据或分析结果来预测施工成本，维护成本和能源（运行）成本，同时对相关性进行评估，以进行预测 /在计划时评估总成本。版权所有（C）2005，JPO＆NCIPI

17. 发明专利

JPH0887412A SYSTEM AND METHOD FOR GENERATING FAULT CAUSALITY 失效
公开(公告)号：JPH0887412A
公开(公告)日：1996-04-02
申请号：JP22488894
申请日：1994-09-20
申请人： HITACHI LTD
发明人： TSUNEKAWA KAYO , TSUYAMA TSUTOMU , SATO SHIGERU , KATO MAKIKO
IPC分类号： G06F9/44 , G06N5/04
摘要： PURPOSE: To easily structure a causality rule base which has no dispersion in quality irrelevantly to the ability of an operator. CONSTITUTION: This system and method have a step wherein an event rule base 6 is structured by accepting the input of the relation between event data held in a fault event data base 4 and data on constituent elements of an equipment to be processed that are held in a design information data base 5 and generating rules consisting of the event data as assumption parts and the constituent element data as conclusion parts and a step wherein a fault causality rule base 11 is structured by generating fault causality rules consisting of constituent elements, belonging to the constituent elements being the conclusion parts of the rules held in the event rule base 6, as conclusion parts based on the constituent element data.

18. 发明专利

JPH07114484A FAULT DIAGNOSING METHOD 失效
公开(公告)号：JPH07114484A
公开(公告)日：1995-05-02
申请号：JP26061493
申请日：1993-10-19
申请人： HITACHI LTD
发明人： TSUYAMA TSUTOMU , TSUNEKAWA KAYO , SATO SHIGERU , SHIMOSHA SADAO
IPC分类号： G06F11/30 , G06F11/22 , G06F11/25 , G06F11/273 , G06F17/40
摘要： PURPOSE:To perform the fault diagnosis of equipment at a site where a fault occurs and to easily construct a fault tree representing the causal relation of the fault by applying pre-processing to faulty data with a portable computer, and applying post-processing to it with a host computer. CONSTITUTION:When the fault occurs in the equipment in current use, diagnosis to the equipment is performed after inputting the event of the fault at the site by the handheld computer h5. The fault tree representing data which forms a basis to find a cause and methods for adjustment and correction, etc., and the causal relation of the fault in the diagnosis is stored in an IC card h6 classified by every product. The diagnosis of the fault and the experiment of repair are up-loaded from the portable computer h5 on a data collection managing station h4. The diagnosis of the fault and an instruction for adjustment/repair can be performed by a site station provided with the data collection managing station h4 with a work station h2 and an image filing system h3, and each site station is connected to the host computer h1 provided with a nationwide center function.

19. 发明专利

JPH0784995A FAULT DIAGNOSIS ASSISTANCE SYSTEM 失效
公开(公告)号：JPH0784995A
公开(公告)日：1995-03-31
申请号：JP23185593
申请日：1993-09-17
申请人： HITACHI LTD
发明人： TSUNEKAWA KAYO , TSUYAMA TSUTOMU , ENDO MAKIKO , SATO SHIGERU , SHIMOSHA SADAO
IPC分类号： G06F11/22 , G05B23/02 , G06F17/00 , G06Q10/04 , G06Q50/00 , G06Q50/10
摘要： PURPOSE:To structure an equipment constitution data base by analyzing a fault phenomenon in detail without reference to the skill of an operator, displaying constituent elements of equipment which causes the phenomenon, storing a homogeneous cause and effect relation rule and structuring a cause and effect relation rule base, easily correcting the rule base which is already structured, and hierarchically describing the constitution of the equipment with ease. CONSTITUTION:A fault diagnostic part 6 derives a constituent element which causes the phenomenon from the phenomenon and the phenomenon from the constituent element on the basis of a cause and effect relation rule, and also derives a child constituent element of the constituent element on the basis of the parent-child relation of equipment constituent elements. A rule storage part 13 stores the cause and effect relation rule base 2 with cause and relation rules which are neither discrepancy nor duplicate among inputted cause and effect relation rules. A hierarchical knowledge acquisition part 3 inputs the equipment constitution and stores it in the equipment constitution data base 1.

20. 发明专利

JPH04190133A DIAGNOSIS SUPPORT APPARATUS OF EQUIPMENT 失效
公开(公告)号：JPH04190133A
公开(公告)日：1992-07-08
申请号：JP32038090
申请日：1990-11-24
申请人： HITACHI LTD
发明人： SAKATA MASAO , IWASAKI TAKEMASA , TSUYAMA TSUTOMU , SHIMOSHA SADAO
IPC分类号： G01M99/00 , G07C3/00
摘要： PURPOSE:To support diagnosis so as to be capable of grasping the phenomenon becoming the ground of diagnosis by outputting the fluctuation of the data related to the operation and operative state of equipment in matching relation to the time axis of those data at time of operating the production equipment for semiconductors. CONSTITUTION:When the data showing the operation of equipment is obtained, the history of the operation of the equipment is stored as the item and time of operation. When the data related to the operative state of the equipment is obtained, the hourly fluctuation of the processing condition set when a product is processed by the equipment is stored along with the time thereof. Then, by comparing both of the history of the operation of the equipment and the fluctuation of the processing condition at the time of the processing of the product on the same time axis in order to determine a rule, the knowledge of the relation between the equipment and the processing condition such as the fluctuation of the processing condition to the operation of the equipment or the change of the processing condition to specific operation is made easy to obtain. By this method, a phenomenon can be accurately grasped and a diagnostic rule is easily constituted. The diagnostic rule can be formed from the operation of the equipment and the processing condition at the time of usual work in a semiconductor manufacturing process.

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