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11. 发明专利

JP2007084832A Cross-linkable fluorine elastomer composition containing clean filler incorporated therein 有权
标题翻译：包含清洁填充物的交联氟化物弹性体组合物
公开(公告)号：JP2007084832A
公开(公告)日：2007-04-05
申请号：JP2006294785
申请日：2006-10-30
申请人： Daikin Ind Ltd , ダイキン工業株式会社
发明人： TONO KATSUHIKO , TANAKA HIROYUKI , YAMASOTO TAKAFUMI , NOGUCHI TAKESHI
IPC分类号： C08L27/12 , C09C1/00 , C09C3/12 , C09K3/10 , H01L23/29 , H01L23/31
CPC分类号： H01L2924/12044
摘要： PROBLEM TO BE SOLVED: To provide a cross-linkable fluorine elastomer composition that is prepared by using a very clean filler reduced in both of an amount of moisture generation and an amount of organic outgas generation and is suitable as a molding material for semiconductor production apparatuses and to provide molded articles. SOLUTION: The cross-linkable fluorine elastomer composition comprises the filler that has a weight-reduction ratio per unit surface area of not more than 2.5 × 10 -5 wt.%/m 2 , when being heated at 200°C for two hours and the total amount of organic gas generated of less than 2.5 ppm, when heated at 200°C for 15 minutes and the cross-linkable fluorine elastomer. The molded particle is produced from the cross-linkable composition. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可交联的氟弹性体组合物，其通过使用在水分产生量和有机气体产生量中减少的非常干净的填料而制备，并且适合作为用于半导体制造装置，并提供模制品。解决方案：可交联的氟弹性体组合物包含每单位面积重量减少率不超过2.5×10 -5 SP / wt％的填料， 2，当在200℃下加热2小时，并且在200℃下加热15分钟时产生的有机气体总量小于2.5ppm，并且可交联的氟弹性体。模制颗粒由可交联组合物制备。版权所有（C）2007，JPO＆INPIT

12. 发明专利

JP2008001894A Fluorine-containing elastomer composition excellent in plasma resistance property and sealing material comprising the same 审中-公开
标题翻译：含氟的弹性体组合物具有优异的耐等离子体性能和密封材料
公开(公告)号：JP2008001894A
公开(公告)日：2008-01-10
申请号：JP2007137902
申请日：2007-05-24
申请人： Daikin Ind Ltd , ダイキン工業株式会社
发明人： HIRANO SEIICHI , TONO KATSUHIKO , TANAKA HIROYUKI , FUKUYAMA KOJI , NOGUCHI TAKESHI
IPC分类号： C08L27/18 , C08K5/00 , C09K3/10
摘要： PROBLEM TO BE SOLVED: To provide a fluorine-containing elastomer composition giving a molded article, wherein heat resistance is excellent, weight change is small when exposed to a fluorine type plasma, an oxygen type plasma or a mixture thereof in process steps of a production of a semi-conductor, and an amount of foreign matters (particles) generated by those treatments is small and also to provide a sealing material comprising the composition.
SOLUTION: The fluorine-containing elastomer composition for a sealing material of a semi-conductor manufacturing device comprises a fluorine-containing elastomer containing at least one group selected from the group consisting of a cyano group, a carboxylic group and an alkoxycarbonyl group and an organic filler, wherein 300°C or higher is a temperature at which a weight of the organic filler is reduced by 1 wt.% measured by a thermogravimetric analysis at 10 °C/min in a nitrogen gas atmosphere and the organic filler has an anti-aging effect against plasma.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决方案：为了提供一种赋予模制品的含氟弹性体组合物，其耐热性优异，当在工艺步骤中暴露于氟型等离子体，氧型等离子体或其混合物时，重量变化小的半导体的生产，并且由这些处理产生的异物（颗粒）的量少，并且还提供包含该组合物的密封材料。解决方案：半导体制造装置的密封材料用含氟弹性体组合物包含含有选自氰基，羧基和烷氧基羰基中的至少一种基团的含氟弹性体和有机填料，其中300℃或更高是通过在氮气气氛中以10℃/ min的热重分析测量的有机填料的重量减少1重量％的温度，并且有机填料具有对抗血浆的抗衰老作用。版权所有（C）2008，JPO＆INPIT

13. 发明专利

JP2007194626A Method of cleaning fluorine rubber molded article for semiconductor production device, and cleaned molded article 审中-公开
标题翻译：清洁用于半导体生产装置的氟橡胶模制品的方法和清洁的模制品
公开(公告)号：JP2007194626A
公开(公告)日：2007-08-02
申请号：JP2007000049
申请日：2007-01-04
申请人： Daikin Ind Ltd , ダイキン工業株式会社
发明人： TONO KATSUHIKO , NOGUCHI TAKESHI , KISHINE MITSURU , HASEGAWA MASANORI
IPC分类号： H01L21/02 , B08B3/04 , C11D7/08 , C11D7/26 , H01L21/3065
CPC分类号： B08B3/04 , Y10S210/90
摘要： PROBLEM TO BE SOLVED: To provide a new and effective cleaning method by which a cleaned fluorine robber seal material for semiconductor production device can be acquired.
SOLUTION: In this method for cleaning fluorine rubber seal material for semiconductor production device, the fluorine rubber seal material is extracted and cleaned by a Soxhlet extraction method, a high-temperature high-pressure extraction method, a microwave extraction method or a supercritical fluid extraction, or by combining these methods.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种新的有效的清洁方法，通过该方法可以获得用于半导体生产装置的清洁的氟强化密封材料。解决方案：在这种清洗半导体生产装置的氟橡胶密封材料的方法中，氟橡胶密封材料通过索格利特提取法，高温高压萃取法，微波提取法或超临界流体萃取，或通过组合这些方法。版权所有（C）2007，JPO＆INPIT

14. 发明专利

JP2007246928A Composition for crosslinking fluororubber 有权
标题翻译：用于交联氟橡胶的组合物
公开(公告)号：JP2007246928A
公开(公告)日：2007-09-27
申请号：JP2007177220
申请日：2007-07-05
申请人： Daikin Ind Ltd , ダイキン工業株式会社
发明人： KAWASAKI KAZUYOSHI , IRIE MASAKI , IZEKI KATSUHIKO , ITAGAKI TAKAYUKI , NOGUCHI TAKESHI , YAMASOTO TAKAFUMI , KISHINE MITSURU
IPC分类号： C08L27/12 , C08K5/17 , C08K5/30 , C08K5/37
摘要： PROBLEM TO BE SOLVED: To provide a composition for crosslinking a fluororubber giving a crosslinked product having particularly improved mechanical strength and compression set at a high temperature. SOLUTION: The composition for crosslinking a fluororubber comprises a perfluoroelastomer having a carboxy group and/or an alkoxycarbonyl group at both ends of a main chain, as a crosslinkable group, and a crosslinking agent reacting with the carboxy group or the alkoxycarbonyl group and being used in an oxazole crosslinking system, an imidazole crosslinking system, or a thiazole crosslinking system. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种氟橡胶的交联组合物，其提供具有特别改善的机械强度和在高温下设定的压缩性的交联产物。＆lt; P＆gt;解决方案：用于交联氟橡胶的组合物包括在主链两端具有羧基和/或烷氧基羰基的全氟弹性体作为可交联基团，和与羧基或烷氧基羰基反应的交联剂并用于恶唑交联体系，咪唑交联体系或噻唑交联体系。版权所有（C）2007，JPO＆INPIT

15. 发明专利

JP2006316112A Fluorine-containing elastomer composition and molded article comprising the same 审中-公开
标题翻译：含有氟的弹性体组合物和包含其的成型制品
公开(公告)号：JP2006316112A
公开(公告)日：2006-11-24
申请号：JP2005137843
申请日：2005-05-10
申请人： Daikin Ind Ltd , ダイキン工業株式会社
发明人： HIRANO SEIICHI , NOGUCHI TAKESHI
IPC分类号： C08L27/12 , C08K5/34 , C08K9/00
CPC分类号： C08K5/34 , C08K5/0025 , C08K5/47 , C08L27/18
摘要： PROBLEM TO BE SOLVED: To provide a fluorine-containing elastomer composition containing a specific filler; to provide a molded article having excellent heat resistance and obtained by curing the composition; and to provide a method for producing the fluorine-containing elastomer composition, involving a step for producing a surface-treated filler by treating the surface of the filler with a hydrophobizing agent so as to have ≥30% hydrophobicity measured by a specified method.
SOLUTION: The fluorine-containing elastomer composition comprises one or more kinds of crosslinking agents selected from the group consisting of an oxazole crosslinking agent, an imidazole crosslinking agent, a thiazole crosslinking agent and a triazine crosslinking agent, a fluorine-containing elastomer having a crosslinkable site crosslinkable with the crosslinking agent, and the surface-treated filler which has ≥30% hydrophobicity measured by the specified method.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供含有特定填料的含氟弹性体组合物; 提供耐热性优异并通过固化该组合物获得的模制品; 并提供一种生产含氟弹性体组合物的方法，其包括通过用疏水化剂处理填料的表面以通过特定方法测量的具有≥30％疏水性来生产表面处理填料的步骤。解决方案：含氟弹性体组合物包含一种或多种选自恶唑交联剂，咪唑交联剂，噻唑交联剂和三嗪交联剂的交联剂，含氟弹性体具有与交联剂交联的交联性部位，通过规定的方法测定具有≥30％疏水性的表面处理填料。版权所有（C）2007，JPO＆INPIT

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