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11. 发明专利

JPH0437759A PELLICLE STICKING METHOD 失效
公开(公告)号：JPH0437759A
公开(公告)日：1992-02-07
申请号：JP14498490
申请日：1990-06-01
申请人： FUJITSU LTD
发明人： HIRANO HIROAKI , OGASAWARA NOBUHIRO
IPC分类号： G03F1/62 , G03F1/84 , H01L21/027
摘要： PURPOSE:To improve work efficiency and to prevent the surface of a reticle and the surface of a pellicle from being scratched in course of working by executing a reticle inspecting work, a pellicle inspecting work, a pellicle sticking work and a reticle provided with the pellicle inspecting work in the same work space having a small quantity of suspending dust. CONSTITUTION:The work space for executing this pellicle sticking method is disposed in a clean room, and four working tables 11a, 11b, 11c and 11d are arranged in a square form in a clean booth 10 which is about class 1. A 1st transfer board 12a, a 2nd transfer board 12b, a 3rd transfer board 12c and a 4th transfer board 12d are set between the 1st and the 2nd working tables 11a and 11b, between the 2nd and the 3rd working tables 11b and 11c, the 3rd and the 4th working tables 11c and 11d, and between the 4th nd the 1st working tables 11d and 11a, respectively. Then, it is unnecessary to execute the work of taking the reticle, etc., in/out of a dedicated transporting container, and the efficiency of the pellicle sticking work including the reticle inspection and the pellicle inspection is improved.

12. 发明专利

JPH0437030A WASHING METHOD AND WASHING EQUIPMENT 失效
公开(公告)号：JPH0437030A
公开(公告)日：1992-02-07
申请号：JP14417190
申请日：1990-05-31
申请人： FUJITSU LTD
发明人： HIRANO HIROAKI , SAKA TAKETORA
IPC分类号： B08B3/04 , H01L21/304 , H05K3/26
摘要： PURPOSE:To realize washing free from stain attaching by jetting liquid in a shower type against an object to be washed which is pulled up from a liquid storage tank, and preventing the object from drying. CONSTITUTION:A robot arm 2 is made to descend, and a cassette 3 is dipped in a liquid storage tank 11 overflown with pure water. A little while later, the robot arm 2 is again operated and the cassette 3 is made to ascend. When the cassette is pulled up from the liquid storage tank 11 and isolated from the pure water (tank), water is jetted in a shower type against a mask M of the cassette from a first zone 1a of a liquid jetting pipe A and a first zone 1b of a liquid jetting pipe B. The jetting of water is continued until the cassette 3 is pulled up from the liquid storage tank 11, moved in the horizontal direction, and dipped in a liquid storage tank 12. When the cassette is dipped in a liquid storage tank 12, the jetting of water from the first zones 1a, 1b is automatically stopped.

13. 发明专利

JPH03132663A PELLICLE 失效
公开(公告)号：JPH03132663A
公开(公告)日：1991-06-06
申请号：JP27230489
申请日：1989-10-18
申请人： FUJITSU LTD
发明人： HIRANO HIROAKI , YOSHIZAWA TAKESHI
IPC分类号： G03F1/62 , G03F1/64 , H01L21/027
摘要： PURPOSE:To simplify renewing work and to reduce the flaw of a mask by deforming a sticking means elastically with an external force, and providing an elongated groove in the longitudinal direction of the flat surface of the sticking abutting with the mask. CONSTITUTION:The pellicle is comprised of a frame 12 formed in frame structure, a light transmission film 13 fixed on the surface 12a of the frame and stretching the aperture part 12c of the frame, and the sticking means 14 of frame structure fixed on the back plane 12b of the frame and sticking to the mask 10. The sticking means 14 can be deformed elastically with the external force, and also, the elongated groove 14b is provided in the longitudinal direction of the flat surface 14a of the sticking means 14 abutting with the mask 10. Therefore, when the sticking means 14 is released by abutting with and pressing the mask 10, pressure reduction between the elongated groove 14b and the mask 10 occurs, then, the pellicle 11 is fixed on the mask 10, and peeling can be easily performed by introducing the air. Thereby, it is possible to easily perform the exchange of the pellicle 11 loaded on the mask 10, and to reduce the flaw of an expensive mask 10 while performing work.

14. 发明专利

JPH02247651A PELLICLE REMOVING DEVICE 失效
公开(公告)号：JPH02247651A
公开(公告)日：1990-10-03
申请号：JP6788989
申请日：1989-03-20
申请人： FUJITSU LTD
发明人： MIYAZONO SUKENARI , HIRANO HIROAKI
IPC分类号： G03F1/62 , H01L21/027
摘要： PURPOSE:To prevent a pellicle film from sticking to a mask surface in the case of removing the pellicle by cutting away the pellicle film in the stage of sucking the same to a suction plate. CONSTITUTION:This device 6 is formed by supporting the suction plate 8 consisting of 'Teflon(R)' in a cap-shaped frame body 7 and supporting a cutter 9 having an annular cutting tooth 12 vertically movable between the frame body 7 and the suction plate 8. This device 6 is imposed on the frame 2 of the pellicle 1 adhered to a mask 4 and the pellicle film 3 is sucked to the suction plate 8. The tooth 12 is lowered by pressing an operating part 13 of the cutter 9 downward in this state to cut the film 3 on the inner side of the frame 2; thereafter, the device 6 is removed. The frame 2 is thereafter removed from the mask 4 by using a jig.

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