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11. 发明专利

JP2000305630A PARALLEL BRANCHED FLUID FEEDING DEVICE 失效
公开(公告)号：JP2000305630A
公开(公告)日：2000-11-02
申请号：JP10868999
申请日：1999-04-16
申请人： OMI TADAHIRO , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , KAGATSUME SATORU , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOJI , DOI RYOSUKE , KOMEHANA KATSUNORI , IKEDA SHINICHI , YAMAJI MICHIO
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To stably hold the steady flow of another passage and to enable one regulator to control the steady flow of plural passages by setting a mass flow controller so as to have delay time from an operation start point to a command flow value when controlling the circulation of a fluid in a certain passage from a closed state to a circulating state. SOLUTION: On the assumption valves V1 and V2 are opened in a passage S1, gas is ordinarily fed and gas reaction is performed in a reaction chamber C, on this stage, closed valves V3 and V4 are opened and gas flows into a time delay type mass flow controller DMFC2. The valve part of the time delay type mass flow controller DMFC2 is completely closed at the beginning but when a valve detecting part detects the changes of the valves V3 and V4 from closing to opening, after short standstill time, a time delay part starts operating. This short standstill time is provided as time for setting the disturbance of gas stream caused by opening the valves V3 and V4.

12. 发明专利

JP2000171422A GAS DETECTING SENSOR 失效
公开(公告)号：JP2000171422A
公开(公告)日：2000-06-23
申请号：JP34550198
申请日：1998-12-04
申请人： FUJIKIN KK , OMI TADAHIRO
发明人： OMI TADAHIRO , KAWADA KOJI , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO , KOMEHANA KATSUNORI , MOTOIDEN AKIO , ENOHARA TAKAAKI , HIRANO TAKANORI , FUJII YUICHI
IPC分类号： G01N25/32 , G01N27/00 , G01N27/16 , G01N33/00
摘要： PROBLEM TO BE SOLVED: To obtain a sensor which is high in reliability and superior in stability by a method wherein a first detecting sensor composed of a thermocouple in which one end side of a metal of a different kind is fixed and bonded to the backside of a diaphragm comprising a platinum coating film on a gas contact face is provided and a second detecting sensor whose structure is identical to that of the first detecting sensor and which does not comprise a platinum coating film is provided. SOLUTION: A detecting sensor 2, a detector body 3 and connecting cables 4 which connect both compose a combustible-gas detector 1. A first detecting sensor 5 and a second detecting sensor 6 comprise the detecting sensor 2. A first temperature detector 3a and a second temperature detector 3b which detect temperature signals from the first and second detecting sensors 5, 6, a temperature-difference detector 3e and the like compose the detector body 3. The first gas detecting sensor 5 is composed of a thermocouple or the like in which a platinum coating film film is formed on the gas contact face of a barrier film and in which one end part of a metal of a different kind is fixed and bonded to the backside. The second detecting sensor 6 is constituted so as to remove a platinum coating film from the first detecting sensor 5, and other constitutions of it are identical to those of the first detecting sensor 5.

13. 发明专利

JP2000137528A METHOD AND DEVICE FOR DETECTING ORIFICE CLOGGING IN PRESSURE-TYPE FLOW RATE CONTROLLER 失效
公开(公告)号：JP2000137528A
公开(公告)日：2000-05-16
申请号：JP21363399
申请日：1999-07-28
申请人： OMI TADAHIRO , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATORU , HIROSE JUN , UNO TOMIO , NISHINO KOJI , IKEDA SHINICHI , YAMAJI MICHIO , DOI RYOSUKE , IDETA EIJI , HIROSE TAKASHI , YOSHIKAWA KAZUHIRO , KOGAI MUTSUNORI
IPC分类号： G01F1/42 , G05D7/06 , G05D16/20
摘要： PROBLEM TO BE SOLVED: To judge clogging with simple operation without disassembling piping by comparing reference pressure attenuation data when an orifice is not clogged with pressure attenuation data at the time of an actual operation and judging the propriety of clogging according to whether or not they are dissociated for not less than a prescribed degree. SOLUTION: A setting flow rate is held to a high setting flow rate. The high setting flow rate is switched to a low setting flow rate and it is kept. Upper stream side pressure is measured and pressure attenuation data is obtained. Reference pressure attenuation data measured when an orifice is not clogged and pressure attenuation data obtained by measurement are compared with same conditions. When pressure attenuation data is dissociated from reference pressure attenuation data for not less than a prescribed degree, clogging is reported. The clogging detector is constituted of a central processing unit CPU, a memory device for data storage M, a communication part PT 42 with outside, the outer circuit 4 of a trigger circuit, an alarm circuit 46 at the time of clogging, a power source circuit SC 48 and the outer power source 50 of ±15 V, for example.

14. 发明专利

JP2000072405A REACTION FURNACE FOR GENERATING WATER 失效
公开(公告)号：JP2000072405A
公开(公告)日：2000-03-07
申请号：JP24787498
申请日：1998-09-02
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , KAWADA KOJI , MINAMI YUKIO , HIRAO YOSHIYUKI , IKEDA SHINICHI
IPC分类号： H01L21/31 , B01J23/42 , C01B5/00 , H01L21/316
摘要： PROBLEM TO BE SOLVED: To provide a reaction furnace for generating water capable of stably attaining water generation reaction rate exceeding 99% even under the condition that the temp. of the furnace is =1000 sccm. SOLUTION: The inside of a reaction furnace main body 1 is partitioned into two of upper and lower chambers 14 and 15 by a gas permeable diffusion filter 2. A gaseous starting material being a gaseous mixture of hydrogen with oxygen is fed to the upper part 1st chamber 14 from a gaseous starting material feed port 4 formed on the top wall 12 of the reaction furnace main body 1 and introduced into the lower part 2nd chamber 15 while being diffused by a 1st reflection plate 3 and the diffusion filter 2. Hydrogen and oxygen introduced to the 2nd chamber 15 radically react with each other by bringing it to contact with a platinum catalytic film 5 formed on the peripheral wall 11 and the bottom wall 13 of the reaction furnace main body 1 and the produced water is taken out from a water take-out port 7 of the bottom wall 13. The reaction of hydrogen with oxygen occurs mainly in a narrow space 15a between a 2nd reflection plate 6 and the bottom wall having the size that the outer peripheral part is adjacent to the inner surface of the peripheral wall 11 of the reaction furnace main body 1.

15. 发明专利

JPH116585A PIPE JOINT 失效
公开(公告)号：JPH116585A
公开(公告)日：1999-01-12
申请号：JP16104797
申请日：1997-06-18
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , IKEDA SHINICHI , SHINOHARA TSUTOMU , KOJIMA TETSUYA
IPC分类号： F16L17/06 , F16L19/02
摘要： PROBLEM TO BE SOLVED: To provide an optimum shape of an annular seal projection provided on a butting end face of a joint member. SOLUTION: Each seal projection 7, 8 is located closely to the radial outside of inner peripheries 1a, 2a of butting end faces of joint members (1), (2). The contour shapes of cross section of each seal projections 7, 8 is constituted of circular arc parts 7b, 8b extending from the butting end faces toward the radial outside and linear parts 7a, 8a continued to the circular arc parts 7b, 8b. The centers of the circular arc parts 7b, 8b are located at the radial inside of the intersection of the circular arc parts 7b, 8b and the linear parts 7a, 8a and the linear parts 7a, 8a are axially inclined by 45 deg..

16. 发明专利

JPH10270437A WATER CONTENT PRODUCING REACTOR 失效
公开(公告)号：JPH10270437A
公开(公告)日：1998-10-09
申请号：JP7413097
申请日：1997-03-26
申请人： OMI TADAHIRO , FUJIKIN KK , HITACHI LTD
发明人： OMI TADAHIRO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO
IPC分类号： H01L21/31 , C01B5/00
摘要： PROBLEM TO BE SOLVED: To raise the water content producing reactivity to stably produce the water content under specified condition by providing an inlet reflector, filter and outlet reflector-diffuser in a reactor and providing a diffusion filter having a Pt coating in the outlet reflector-diffuser. SOLUTION: A gas diffusing member 8 is composed of an inlet reflector, filter and outlet reflector-diffuser 12 which has a diffusion filter 12c and Pt coating 12d on the outer surface of the filter 12 at the space side. A Pt coating 13 provided on the inner wall of a reactor 1 top covert a non-radical H or O gas into radicals, thus H and O are brought into reaction instantaneously to produce water. The coating 13 stably produces water continuously at 1000 cc/min or more at about 500 deg.C over the entire area due to the reaction heat.

17. 发明专利

JPH1082707A PRESSURE DETECTOR 失效
公开(公告)号：JPH1082707A
公开(公告)日：1998-03-31
申请号：JP23870696
申请日：1996-09-10
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/06
摘要： PROBLEM TO BE SOLVED: To eliminate the possibility of lowering the quality of product even a pressure detector is applied to a semiconductor production process, by forming a passive film on the gas-contact face of a stainless steel diaphragm having specified dimensions provided on a diaphraqm base. SOLUTION: A diaphragm 3 of about 50μm thick having an inside diameter of about 10mm is made of stainless steel and has a gas-contact face 3a on which a passive film 3b of chromium oxide, a fluorinated passive film 3b or a mixed oxide passive film 3b of aluminum oxide and chromium oxide is formed. After forming the diaphragm 3 integrally with a diaphragm base 4, the diaphragm base 4 formed with the passive film 3b and a sensor base 1 are abutted against the gas contact face 3a of the diaphragm 3 and the entire circumference of the side wall face is welded 8. Subsequently, an oil injection hole 1b is filled with a pressure transmission medium (silicon oil) 5 and a sealing body (ball) 6 is welded 10 to the sensor base 1 thus sealing the silicon oil 5 hermetically.

18. 发明专利

JPH0821573A PIPE FITTING 失效
公开(公告)号：JPH0821573A
公开(公告)日：1996-01-23
申请号：JP15890794
申请日：1994-07-11
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , IKEDA SHINICHI , SHINOHARA TSUTOMU , KOJIMA TETSUYA
IPC分类号： F16L19/02 , F16L19/03
摘要： PURPOSE:To provide a pipe fitting which allows easy checking of any gasket existing or not. CONSTITUTION:A pipe fitting is equipped with a retainer 5 to hold a gasket 3 at one of the pipe fitting members 1. The two pipe fitting members 1, 2 are made of stainless steel and are silver white. The retainer 5 is of stainless steel and is colored blue so that distinction is practicable from the fitting members 1, 2. Existence of retainer 5, accordingly of gasket 3, can be checked only by ocularly judging whether the color seen through a window 40 in a nut 4 is blue or silver white.

19. 发明专利

JP2003195948A IMPROVED PRESSURE TYPE FLOW CONTROL DEVICE 审中-公开
公开(公告)号：JP2003195948A
公开(公告)日：2003-07-11
申请号：JP2001399433
申请日：2001-12-28
申请人： OMI TADAHIRO , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , INUI HIDEJIRO , SAKAI TAIJI , UEYAMA MASAYOSHI , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA SHINICHI , NISHINO KOJI , NAKAMURA OSAMU , DOI RYOSUKE , MATSUMOTO SENSHI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To develop an improved pressure type flow control device establishing an empirical flow formula fitted with high precession to an actual flow amount of a compressible fluid in a non-critical region and performing flow control with high precision using the empirical flow formula. SOLUTION: The improved pressure type flow control device expressing the empirical flow formula for the compressible fluid in the non-critical region (non-sonic region) as Qc=KP 2 m (P 1 -P 2 ) n (wherein K is a proportionality constant; m and n are each constants) and calculating the flow amount passing an orifice 4 using the formula Qc=KP 2 m (P 1 -P 2 ) n accurately and speedily controls flow to be the target flow. A pressure ratio P 2 /P 1 =r obtained from an upstream pressure P 1 and a downstream pressure P 2 is always compared with a critical value r c . The flow amount is calculated using Qc=KP 1 for a critical condition (r≤r c ), and using Qc=KP 2 m (P 1 -P 2 ) n for a critical condition (r>r c ). The flow control device then accurately and speedily controls the flow amount to be the target flow amount while corresponding to all conditions of the fluid. COPYRIGHT: (C)2003,JPO

20. 发明专利

JP2000208431A METALLIC MATERIAL WHEREIN CHROMIUM OXIDE PASSIVATION FILM IS FORMED, ITS MANUFACTURE AND CORROSIVE FLUID CONTACTING PART AND FLUID SUPPLY/DISCHARGE SYSTEM 失效
公开(公告)号：JP2000208431A
公开(公告)日：2000-07-28
申请号：JP709299
申请日：1999-01-13
申请人： OMI TADAHIRO , FUJIKIN KK , NIPPON KINZOKU CO LTD
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , IKEDA SHINICHI , IDETA EIJI , MORIMOTO AKIHIRO , OGUSHI TETSUTARO , KONISHI TAKEHISA
IPC分类号： H01L21/28 , C23C8/02 , C23C26/00
摘要： PROBLEM TO BE SOLVED: To obtain good anti-corrosion property at a low cost by providing a passivation film consisting of chromium oxide formed by oxidizing a chromium film on a metallic material with surface roughness not exceeding a specified value. SOLUTION: A surface formed by applying chromium to a metallic material whose surface roughness is at most about 1.5 μm is subjected to heat treatment in oxidizing gas atmosphere. Contact property between a metallic material and a film interface is improved by applying chromium to a metallic material whose surface roughness is at most about 1.5 μm in this way and defective adhesion can be resolved as combination force of an interface is increased by carrying out heat treatment. Since interface corrosion is eliminated, good anti-corrosion property can be obtained. Furthermore, since the need for limitation of a metallic material, limitation of part configuration and accurate control of oxidizing atmosphere is eliminated, chromium oxide passivation film treatment can be performed for an arbitrary metallic material and part at a low cost when compared to chromium oxide passivation treatment which is a conventional method.

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