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11. 发明专利

JP5323988B2 Mems switch 有权
公开(公告)号：JP5323988B2
公开(公告)日：2013-10-23
申请号：JP2012514283
申请日：2011-09-26
申请人：太陽誘電株式会社
发明人：知徳藤井 , 泰成入枝 , 中村　　健太郎 , 貴之高野 , 謙一太田 , 剛士荻野
IPC分类号： H01H57/00
CPC分类号： H01H59/0009
摘要： Provided is a MEMS switch wherein worsening of isolation can be alleviated as much as possible, even when semiconductor material is used for a lever main-layer of a flexible lever upon which a movable terminal is formed. The MEMS switch (10-1) is provided with parasitic-capacitance inhibiting sections (RPC11, RPC12, RPC13) for inhibiting, in a state wherein two signal layers (16, 17) do not have continuity with each other, parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a first fixed terminal (16a), and parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a second fixed terminal (17a).

12. 发明专利

JP5275401B2 Wiring board, a method of manufacturing a semiconductor device and the wiring board 有权
公开(公告)号：JP5275401B2
公开(公告)日：2013-08-28
申请号：JP2011092202
申请日：2011-04-18
申请人：新光電気工業株式会社 , 太陽誘電株式会社
发明人：昭仁高野 , 昌宏春原 , 秀明坂口 , 光敏東 , 謙一太田 , 裕一笹島
IPC分类号： H01L23/12 , H01L23/14 , H01L23/32
CPC分类号： H01L23/49822 , H01L23/49827 , H01L23/50 , H01L2224/16225 , H01L2924/01322 , H05K1/0306 , H05K1/162 , H01L2924/00
摘要： A wiring board provided with a silicon substrate including a through hole that communicates a first surface and a second surface of the silicon substrate. A capacitor is formed on an insulating film, which is applied to the silicon substrate, on the first surface and a wall surface defining the through hole. A capacitor part of the capacitor includes a first electrode, a dielectric layer, and a second electrode that are sequentially deposited on the insulating film on the first surface and the wall surface of the through hole. A penetration electrode is formed in the through hole covered by the first electrode, the dielectric layer, and the second electrode of the capacitor part.

13. 发明专利

JP5180683B2 Switched capacitor 有权
公开(公告)号：JP5180683B2
公开(公告)日：2013-04-10
申请号：JP2008144150
申请日：2008-06-02
申请人：太陽誘電株式会社
发明人：謙一太田 , 中村　　健太郎 , 龍一近藤
IPC分类号： H01G7/06 , B81B3/00
CPC分类号： H01G5/18
摘要： PROBLEM TO BE SOLVED: To provide a new switched capacitor where a digital switching mechanism and an analog switching mechanism are unified. SOLUTION: The switched capacitor includes: a driving arm which has a plate-like elastic body at least one end of which is fixed to a substrate, a lower electrode layer formed on the upper surface of the elastic body, a piezoelectric layer formed on the upper surface of the lower electrode layer, and an upper electrode layer formed on the upper surface of the piezoelectric layer; a capacitor portion formed at a portion of the driving arm; and a signal line at least one end of which is fixed to the substrate. The signal line is extended to the upper part of the capacitor portion formed at a portion of the driving arm, and can be brought into contact with the driving arm via the capacitor portion. Accordingly, the digital switching mechanism and the analog switching mechanism can be unified, and improvement of characteristics and reduction of mounting cost are achieved. COPYRIGHT: (C)2010,JPO&INPIT

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