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    • 117. 发明专利
    • Semiconductor device and method for manufacturing semiconductor device
    • 半导体器件及制造半导体器件的方法
    • JP2013098373A
    • 2013-05-20
    • JP2011240125
    • 2011-11-01
    • Fujitsu Ltd富士通株式会社
    • SASAKI SHINYATANI MOTOAKI
    • H01L23/12
    • H01L24/96H01L21/568H01L2224/04105H01L2224/12105H01L2224/16225H01L2224/19H01L2225/1035H01L2225/1058H01L2924/18162H01L2924/00012
    • PROBLEM TO BE SOLVED: To solve the problem that wear of a front end part of a drill cannot be avoided when the drill is used to form a through hole in a support base including much of inorganic filler.SOLUTION: A reconfigured wafer is constituted of semiconductor chips and a support base made of insulating resin, which is fixed to the semiconductor chips and is disposed up to the outside of edges of the semiconductor chips. A rewiring layer is formed on a first surface being one surface of the reconfigured wafer. The rewiring layer includes an insulating film made of insulating resin, a plurality of wires arranged in the insulating film, a plurality of first metallic pads arranged in positions not overlapping with the semiconductor chips within the insulating film, and a plurality of second metallic pads exposed to a surface of the insulating film. Through holes reaching the first pads through the support base are formed from a second surface opposite to the first surface of the reconfigured wafer. Conductive vias connected to the first pads are formed in the through holes.
    • 要解决的问题:为了解决当钻头在包括大量无机填料的支撑基底中形成通孔时不能避免钻头前端部磨损的问题。 解决方案:重新配置的晶片由半导体芯片和由绝缘树脂制成的支撑基座构成,其固定到半导体芯片并且设置在半导体芯片的边缘的外侧。 再配线层形成在作为重新配置的晶片的一个表面的第一表面上。 再布线层包括由绝缘树脂制成的绝缘膜,布置在绝缘膜中的多根布线,布置在绝缘膜内与半导体芯片不重叠的位置的多个第一金属垫,以及多个第二金属垫暴露 到绝缘膜的表面。 通过支撑基座到达第一焊盘的通孔由与重新配置的晶片的第一表面相对的第二表面形成。 连接到第一焊盘的导电通孔形成在通孔中。 版权所有(C)2013,JPO&INPIT
    • 120. 发明专利
    • Manufacturing method of elastic wave device
    • 弹性波装置的制造方法
    • JP2012248916A
    • 2012-12-13
    • JP2011116552
    • 2011-05-25
    • Taiyo Yuden Co Ltd太陽誘電株式会社
    • INOUE KAZUNORIMIYASHITA TSUTOMUMATSUMOTO KAZUHIRO
    • H03H3/08H03H9/25
    • H01L41/338H01L21/568H01L24/97H01L2224/04105H01L2224/11H01L2224/12105H01L2224/96H01L2924/18162H03H3/08H03H9/0576
    • PROBLEM TO BE SOLVED: To simplify the manufacturing process while reducing the manufacturing cost, in the manufacture of an elastic wave device including a plurality of elastic wave filters.SOLUTION: Wafers (11, 21) on which elastic wave devices having different characteristics are formed are divided into stripes, and some of them are moved to other adhesive sheets (60, 70), selectively. The wafers in stripe-shape are aligned alternately on one of the adhesive sheets (60, 70) by matching the adhesive sheets, on which the wafers including the elastic wave devices having different characteristics are pasted selectively, each other. Under this state, the entire resin sealing, formation of through holes, formation of through electrodes, and formation of solder balls are carried out collectively, and the elastic wave devices are individualized by finally dicing the entirety. When compared with a case where piezoelectric substrates(chip) of wafer level package are previously arranged and integrated, the manufacturing process is simplified and the manufacturing cost can be reduced.
    • 要解决的问题:为了简化制造过程,同时降低制造成本,在制造包括多个弹性波滤波器的弹性波装置时。 解决方案:其上形成有不同特性的弹性波器件的晶片(11,21)被分成条纹,并且其中一些被选择性地移动到其它粘合片(60,70)。 通过使包含具有不同特性的弹性波装置的晶片的晶片彼此粘合在一起,粘合片(60,70)之间交替地对准条形状的晶片。 在这种状态下,集体进行整个树脂密封,通孔的形成,通孔的形成和焊球的形成,并且通过最终切割整体来使弹性波器件个体化。 与晶片级封装的压电基板(芯片)预先布置并集成的情况相比,制造工艺简化,并且可以降低制造成本。 版权所有(C)2013,JPO&INPIT