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    • 111. 发明专利
    • High temperature electrostatic capacitive type static/dynamic pressure sensor
    • 高温静电电容式静态/动态压力传感器
    • JP2009162751A
    • 2009-07-23
    • JP2008326837
    • 2008-12-24
    • Rosemount Aerospace Incローズマウント・エアロスペース・インコーポレーテッドRosemount Aerospace Inc.
    • GUO SHUWEN
    • G01L23/22G01L9/12
    • G01L23/125G01L9/0072
    • PROBLEM TO BE SOLVED: To provide a high temperature electrostatic capacitive type static/dynamic pressure sensor for the use of a pressure probe which has a diaphragm composed in order to enable more exact measurement of pressure (dynamic or static) at high temperature. SOLUTION: The electrostatic capacitive type pressure probe is used for high temperature, such as for use in a gas turbine engine. The electrostatic capacitive type probe or pressure sensor 10 includes a sensor housing 20 that defines an interior detection chamber 42 having a pressure port 36 and an interior reference chamber 52 positioned adjacent to a detection electrode 62. The reference chamber 52 is separated from the detection chamber 42 by a flexible diaphragm 44 made from Haynes 230 alloy, wherein the deflection of the diaphragm 44 in response to an applied pressure in the detection chamber 42 corresponds to a change in electrostatic capacitive value by the detection electrode 62. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种高温静电电容式静态/动态压力传感器,用于使用压力探头,该压力探头具有隔膜,以便能够在高温下更准确地测量压力(动态或静态) 。

      解决方案:静电电容型压力探头用于高温,例如用于燃气涡轮发动机。 静电电容型探针或压力传感器10包括传感器外壳20,该传感器壳体限定具有压力端口36的内部检测室42和邻近检测电极62定位的内部参考室52.参考室52与检测室 42通过由Haynes 230合金制成的柔性隔膜44,其中响应于检测室42中施加的压力的隔膜44的偏转对应于检测电极62的静电电容值的变化。COPYRIGHT :(( C)2009年,JPO&INPIT

    • 117. 发明专利
    • Capacitance-type pressure sensor
    • 电容式压力传感器
    • JP2008008688A
    • 2008-01-17
    • JP2006177359
    • 2006-06-27
    • Yamatake Corp株式会社山武
    • YOSHIKAWA YASUHIDEICHIHARA JUN
    • G01L9/00
    • G01L9/0072G01L9/125G01L27/007
    • PROBLEM TO BE SOLVED: To provide a pressure sensor with its reliability enhanced by surely performing wire disconnection detection. SOLUTION: The capacitance-type pressure sensor is used for measuring a change in a physical quantity of a measuring medium by measuring two capacitances wherein a mutual relative relation between the capacitances changes correspondently to the change in the physical quantity of the measuring medium. The sensor is equipped with the function of measuring the individual values CX and CY of the respective capacitances to determine that a wire-disconnection/anomaly exists when at least either capacitance value of the capacitance values is less than a capacitance value A shown as a normal operating range of the pressure sensor. This ensures wire disconnection detection, thereby enhancing reliability. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:通过确保执行断线检测来提供其可靠性提高的压力传感器。 电容式压力传感器用于通过测量电容之间的相互相对关系相对于测量介质的物理量的变化而变化的两个电容来测量测量介质的物理量的变化 。 该传感器配备有测量各个电容的各个值CX和CY的功能,以确定当电容值的至少一个电容值小于作为正常显示的电容值A时,断线/异常存在 压力传感器的工作范围。 这确保断线检测,从而提高可靠性。 版权所有(C)2008,JPO&INPIT
    • 120. 发明专利
    • Pressure sensor
    • 压力传感器
    • JP2005233877A
    • 2005-09-02
    • JP2004045948
    • 2004-02-23
    • Alps Electric Co Ltdアルプス電気株式会社
    • SATO HIDEAKI
    • G01L9/12G01L1/14G01L7/08G01L9/00
    • G01L9/0072G01L1/142
    • PROBLEM TO BE SOLVED: To provide a pressure sensor capable of increasing variational quantities in a measuring range, by lowering the capacitance with respect to measurement start pressure.
      SOLUTION: A base stage 1, fixed electrodes 2 placed on the base stage surface 1, an insulating layer 3 stacked for covering the fixed electrodes 2, and a conductive diaphragm 5 arranged to face the fixed electrode 2 so as to form a specific gap above the insulation layer 3 are provided. When pressure is added to the diaphragm 5, the pressure sensor detects the variations in the capacitance between fixed electrodes 2, by bending of the diaphragm 5; and on the insulating layer 3, a projection part 3a, projecting toward the diaphragm 5, is formed.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种能够通过相对于测量开始压力降低电容量而在测量范围内增加变化量的压力传感器。 解决方案:基台1,放置在基台表面1上的固定电极2,层叠以覆盖固定电极2的绝缘层3和布置成面向固定电极2的导电隔膜5,以形成 提供了绝缘层3上方的特定间隙。 当压力加到隔膜5上时,压力传感器通过隔膜5的弯曲来检测固定电极2之间的电容变化; 并且在绝缘层3上形成有朝向隔膜5突出的突出部3a。 版权所有(C)2005,JPO&NCIPI