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91. 发明专利

JP2007192637A Probe microscope, and probe microscope type optical recording and regeneration head device 审中-公开
标题翻译：探针显微镜和探针微型光学记录和再生头设备
公开(公告)号：JP2007192637A
公开(公告)日：2007-08-02
申请号：JP2006010175
申请日：2006-01-18
申请人： Gunma Univ , 国立大学法人群馬大学
发明人： HOSAKA SUMIO , SONE ITSUHITO
IPC分类号： G01Q30/02 , G01Q60/18 , G01Q60/24 , G01Q80/00 , G11B7/135 , G11B9/14
摘要： PROBLEM TO BE SOLVED: To achieve a miniaturization and an improvement of resolving power in a probe microscope, having a cantilever activated by the inter-atomic force with the surface of a sample. SOLUTION: The probe microscope is miniaturized, by providing an observation illumination optical system 12 and a data detecting optical system 11 for fetching observation data out of the sample 10, with respect to a common object lens 14 and the improvement of the noise caused by the duplication of the wavelengths of the optical systems 11 and 12 is achieved by a wavelength-selecting element 13. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了实现在探针显微镜中的分辨力的小型化和提高，其具有通过原子间力与样品表面激活的悬臂。解决方案：通过提供观察照明光学系统12和用于从样品10中取出观察数据的数据检测光学系统11，相对于共同的物镜14和提高噪声，探针显微镜被小型化由光学系统11和12的波长的复制引起的波长选择元件13实现。（C）2007，JPO＆INPIT

92. 发明专利

JP3950610B2 Scanning probe microscope 有权
公开(公告)号：JP3950610B2
公开(公告)日：2007-08-01
申请号：JP2000014814
申请日：2000-01-24
申请人：日本電子株式会社
发明人：槻正志岩
IPC分类号： G01Q60/10 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01Q70/04 , G01Q90/00

93. 发明专利

JP2007170876A Microscope apparatus 审中-公开
标题翻译： MICROSCOPE设备
公开(公告)号：JP2007170876A
公开(公告)日：2007-07-05
申请号：JP2005365582
申请日：2005-12-19
申请人： Keyence Corp , 株式会社キーエンス
发明人： KASHIWABARA MITSUHIRO
IPC分类号： G01B21/30 , G01Q10/02 , G01Q30/02 , G01Q30/18 , G01Q60/24 , G02B21/00
CPC分类号： G01Q30/18 , G01Q30/025
摘要： PROBLEM TO BE SOLVED: To provide a microscope apparatus, equipped with a scanning probe microscope capable of preventing the occurrence of vibration. SOLUTION: An atomic force microscope 10 and an optical microscope 20 are attached to a microscope connecting member 40. The microscope connecting member 40 is held by a base housing part 50 via elastic members 54a, 54b, 54c and 54d. A weight W is attached to the microscope connecting member 40 and the attaching position of the weight W is set so as to surely attenuate the vibration produced in each of the constituent elements taking into consideration the weight, installation locations or the like of each of the constituent elements of the microscope apparatus. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种配备有能够防止发生振动的扫描探针显微镜的显微镜装置。解决方案：原子力显微镜10和光学显微镜20附接到显微镜连接构件40.显微镜连接构件40通过弹性构件54a，54b，54c和54d由基部壳体部分50保持。重物W连接到显微镜连接构件40，并且重量W的安装位置被设定为可以确定地减小每个构成元件产生的振动，同时考虑到每个构件的重量，安装位置等显微镜装置的构成元件。版权所有（C）2007，JPO＆INPIT

94. 发明专利

JP2007170875A Microscopic system, and observation method and program 审中-公开
标题翻译：微观系统，观察方法和程序
公开(公告)号：JP2007170875A
公开(公告)日：2007-07-05
申请号：JP2005365581
申请日：2005-12-19
申请人： Keyence Corp , 株式会社キーエンス
发明人： SHIMONAKA HIDEJI
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q30/04 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a microscopic system capable of easily and rapidly observing a target, an observation condition adjusting method using the microscopic system and an observation condition adjusting program.
SOLUTION: A CPU sets the bending quantity of a cantilever to an initial value (step S21) and allows the cantilever to reciprocally scan the surface of the sample so as to hold the bending quantity (step S22). The CPU compares the forward path height data corresponding to the same pixel in a display device with return pass height data at every pixel to calculate the absolute value (difference value) of those differences and further calculates the sum of a plurality of the calculated difference values (step S23) to discriminate whether the sum total of the calculated difference values is a predetermined threshold value or below (step S24). The CPU sets the present bending quantity as a reference bending quantity in a case that the sum total is the threshold value or below (step S25) and reset the bending quantity in a case that the sum total is not the threshold value or below (step S26).
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够容易且快速地观察目标的微观系统，使用微观系统的观察条件调整方法和观察条件调整程序。解决方案：CPU将悬臂的弯曲量设定为初始值（步骤S21），并允许悬臂对样品的表面进行往复扫描以保持弯曲量（步骤S22）。 CPU将显示装置中与相同像素相对应的前向路径高度数据与每个像素处的返回通道高度数据进行比较，以计算这些差异的绝对值（差值），并且还计算多个计算出的差值的和（步骤S23），以判断计算出的差分值的总和是否为预定阈值以下（步骤S24）。在总和为阈值以下的情况下，CPU将当前弯曲量设定为基准弯曲量（步骤S25），并且在总和不是阈值以下的情况下复位弯曲量（步骤 S26）。版权所有（C）2007，JPO＆INPIT

95. 发明专利

JP2007170862A Scanning probe microscope device 审中-公开
标题翻译：扫描探针显微镜装置
公开(公告)号：JP2007170862A
公开(公告)日：2007-07-05
申请号：JP2005365356
申请日：2005-12-19
申请人： Keyence Corp , 株式会社キーエンス
发明人： YANASE KENGO
IPC分类号： G01B21/30 , G01Q10/02 , G01Q30/02 , G01Q30/04 , G01Q60/24 , G01Q90/00
CPC分类号： G01Q30/025
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope device having operability improved when an inspected object is made to approach a probe from an evacuating position to an appropriate position.
SOLUTION: The scanning probe microscope device comprises a mounting stand 11 on which the inspected object is mounted, a probe microscope 5 for pressing and scanning the probe attached to a cantilever to the inspected object on the mounting stand 11 and creating shape data showing the surface shape of the inspected object, and an optical microscope 13 for photographing the inspected object and creating a microscopic image seen from the back side of the cantilever. The scanning probe microscope device comprises an approach control section 112 for relatively moving the mounting stand 11 and the cantilever and making the inspected object and the probe approach each other, a side view camera control section 140 for photographing the inspected object and cantilever and creating a side view image seen from a side of the cantilever, and an image processing section 30 for processing the microscope image and side view image and displaying them on a monitor 31.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种扫描探针显微镜装置，当被检查物体从抽空位置接近探针到适当的位置时，其操作性提高。解决方案：扫描探针显微镜装置包括安装有被检查物体的安装台11，用于将安装在悬臂上的探针按压扫描到安装台11上的被检查物体的探针显微镜5，并形成形状数据示出被检查物体的表面形状，以及用于拍摄被检查物体的光学显微镜13，并且形成从悬臂的后侧看到的微观图像。扫描探针显微镜装置包括用于使安装台11和悬臂相对移动并使检查对象和探针彼此接近的进近控制部分112，用于拍摄被检查物体和悬臂的侧视照相机控制部分140，从悬臂的一侧看到的侧视图，以及用于处理显微镜图像和侧视图的图像处理部30，并将其显示在监视器31上。版权所有（C）2007，JPO＆INPIT

96. 发明专利

JP2007170861A Scanning probe microscope device, and program for same 审中-公开
标题翻译：扫描探针显微镜设备及其程序
公开(公告)号：JP2007170861A
公开(公告)日：2007-07-05
申请号：JP2005365355
申请日：2005-12-19
申请人： Keyence Corp , 株式会社キーエンス
发明人： YANASE KENGO
IPC分类号： G01B21/30 , G01Q30/02 , G01Q30/04 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope device capable of appropriately determining adjusting degree of sensitivity even when the inspected object has an unclear outline due to irregularity on the surface.
SOLUTION: The scanning probe microscope device comprises a scanning control section 24 for reciprocating and scanning a probe attached to a cantilever on the inspected object, a height control section 26 for controlling the height of the probe based on the deviation from a target value of a pressing force acting on the cantilever, a surface shape detection section 27a for detecting the surface shape on the scanning line based on the scanning positional information and height information of the probe, a deviation distribution detection section 27b for determining the deviation distribution on the scanning line, based on the scanning positional information and the deviation, a display control section 29 for overlaying and two-dimensionally displaying the deviation distribution on the approach route and back route of the reciprocating and scanning and overlaying and two-dimensionally displaying the obtained surface shapes on the approach route and back route, and an offset adjusting section 28 for offsetting the scanning positional information on the approach route and back route based on the offset amount specified by a user.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种扫描探针显微镜装置，即使当检查对象由于表面上的不规则性而具有不清楚的轮廓时，也能够适当地确定灵敏度的调节度。解决方案：扫描探针显微镜装置包括扫描控制部分24，用于往复扫描附着在被检查物体上的悬臂的探头;高度控制部分26，用于根据与目标的偏差来控制探头的高度作用在悬臂上的按压力的值，基于扫描位置信息和探测器的高度信息来检测扫描线上的表面形状的表面形状检测部分27a，用于确定探测器的偏差分布的偏差分布检测部分27b 基于扫描位置信息和偏差的扫描线，显示控制部29，用于在往复扫描和重叠的接近路线和返回路线上重叠和二维地显示偏差分布，并且二维地显示所获得的接近路线和后向路线上的表面形状，以及偏移调整用于基于用户指定的偏移量抵消接近路线和返回路线上的扫描位置信息。版权所有（C）2007，JPO＆INPIT

97. 发明专利

JP2007155423A Method of evaluating piezoelectric film 审中-公开
标题翻译：评估压电薄膜的方法
公开(公告)号：JP2007155423A
公开(公告)日：2007-06-21
申请号：JP2005348814
申请日：2005-12-02
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MIYAZAWA YOKO , ASAOKA ICHIRO
IPC分类号： G01B21/32 , G01B5/30 , G01Q30/06 , G01Q30/20 , G01Q60/24 , H01L41/22
摘要： PROBLEM TO BE SOLVED: To provide a method of evaluating a piezoelectric film capable of acquiring displacement of the piezoelectric film having a small measurement error. SOLUTION: In this evaluation method of the piezoelectric film 31, first of all, a sample 12 including the piezoelectric film 31 is fixed to a sample fixing tool 20. In the sample 12, the first electrode 42 and the second electrode 43 are formed to sandwich the piezoelectric film 31 in order to apply a voltage to the piezoelectric film 31. Then, a probe 33 is brought into direct contact with a measuring surface in the crossing direction to the electric field direction of the piezoelectric film 31. Thereafter, while applying the voltage to the piezoelectric film 31, the probe 33 is allowed to directly scan a measuring domain, to thereby measure a piezoelectric characteristic (the first displacement) of the piezoelectric film 31. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种评估能够获得具有小测量误差的压电膜的位移的压电膜的方法。解决方案：在压电膜31的评估方法中，首先将包括压电膜31的样品12固定到样品固定工具20上。在样品12中，第一电极42和第二电极43 被形成为夹持压电膜31以便向压电膜31施加电压。然后，探针33与测量表面沿与压电膜31的电场方向交叉的方向直接接触。之后在将压力施加到压电膜31的同时，允许探针33直接扫描测量域，从而测量压电膜31的压电特性（第一位移）。（C）2007， JPO＆INPIT

98. 发明专利

JP2007147365A Analysis method of functional group on surface of molded product 审中-公开
标题翻译：模具产品表面功能组分析方法
公开(公告)号：JP2007147365A
公开(公告)日：2007-06-14
申请号：JP2005340230
申请日：2005-11-25
申请人： Sumitomo Bakelite Co Ltd , 住友ベークライト株式会社
发明人： IIDA HIROSHI , ISHIGURO TOSHIHISA
IPC分类号： G01N31/00 , G01Q30/04 , G01Q30/20 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide an analysis method of functional group on the surface of a molded product, capable of precisely analyzing the kind, the distribution state and the density of the functional group on the surface of the molded product.
SOLUTION: The analysis method of the functional group on the surface of the molded product conducts qualitative and quantitative analysis of the functional group on the surface of the molded product, constituted of a compound having the functional group and has a process for making the functional group and a component react which selectively reacts with the functional group, in a solid phase, to form an analyzing discriminating part on the surface of the molded product, and a process for observing the analyzing discrimination part by an atomic force microscope and a process for treating image acquired in the observation process.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够精确分析模塑产品表面上的官能团的种类，分布状态和密度的模制产品表面上的官能团的分析方法。解决方案：模塑制品表面官能团的分析方法对由具有官能团的化合物构成的模制品表面官能团进行定性和定量分析，并具有制备方法所述官能团和与所述官能团选择性反应的成分在固相中在所述成型体的表面上形成分析识别部，所述成分反应是通过原子力显微镜观察所述分析鉴别部的工序，在观察过程中获取的图像的处理过程。版权所有（C）2007，JPO＆INPIT

99. 发明专利

JP3917698B2 Laser annealing method and laser annealing apparatus 失效
公开(公告)号：JP3917698B2
公开(公告)日：2007-05-23
申请号：JP35214096
申请日：1996-12-12
申请人：株式会社半導体エネルギー研究所
发明人：舜平山崎 , 直人楠本 , 幸一郎田中
IPC分类号： H01L21/20 , H01L21/324 , G01Q60/24 , G01Q90/00 , H01L21/00 , H01L21/268
CPC分类号： H01L21/67115 , H01L21/2026 , H01L21/268
摘要： In order to promote an effect of laser annealing in respect of a semiconductor film, moisture is intentionally included in an atmosphere in irradiating laser beam to these miconductor film by which a temperature holding layer comprising water vapor is formed on the surface of these miconductor film in irradiating the laser beam and the laser annealing operation can be performed effectively.

100. 发明专利

JP3914084B2 Substrate processing method 有权
公开(公告)号：JP3914084B2
公开(公告)日：2007-05-16
申请号：JP2002096438
申请日：2002-03-29
申请人：株式会社荏原製作所
发明人：浩二三島 , 裕章井上 , 光男多田 , 新明王 , 康成須藤
IPC分类号： G01B21/30 , H01L21/66 , G01Q60/10 , G01Q60/18 , G01Q60/24

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