会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 95. 发明专利
    • MANUFACTURE OF SEMICONDUCTOR DEVICE
    • JPH02161752A
    • 1990-06-21
    • JP31709588
    • 1988-12-15
    • TOSHIBA CORP
    • YAMAGUCHI YOSHIHIROFURUKAWA KAZUYOSHIWATANABE KIMINORIYASUHARA NORIO
    • H01L21/762H01L21/76
    • PURPOSE:To enable a resist film to be applied without forming steps in subsequent formation of a groove and to avoid disconnection when a plurality of grooves having different depths are formed by etching in a semiconductor substrate, by providing a pattern for both first and second etchings prior to performing the etchings. CONSTITUTION:An Si substrate 11 is heated to a high temperature within oxygen to produce a thin SiO2 film 12 for preventing cracks. The film 12 is then removed such that it is left only on the top face of the substrate. An oxidation- resistant Si3N4 film 13 is deposited on the film 12 and an photo-etching is performed so that the laminate consisting of the films 13 and 12 is left unetched in a predetermined size only on a second etching region. Then, an SiO2 film 14 is deposited on the exposed surface of the substrate 11 so as to surround the laminate and is provided with a window corresponding to a first etching region, A deep groove 15 is then formed in the window by etching and the film 14 around it is substituted with a new film 16. The laminate film 12, 13 is then removed and the second etching is performed on the exposed surface part of the substrate 11 to provide a shallow groove 17 there.
    • 97. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS6373564A
    • 1988-04-04
    • JP21750986
    • 1986-09-16
    • TOSHIBA CORP
    • YAMAGUCHI YOSHIHIRONAKAGAWA AKIOWATANABE KIMINORI
    • H01L29/68H01L29/06H01L29/40H01L29/78
    • PURPOSE:To improve reliability by disposing a resistive field plate film so as to simultaneously cover a second main electrode and a control electrode. CONSTITUTION:An oxide film 24 is formed onto the surface of an n type drain layer 12 shaped onto an n type drain layer 11 through epitaxial growth, the oxide film 24 is etched to a predetermined pattern, and a gate electrode 16 is formed through a gate oxide film 15. p-type base layers 13 are formed, using the gate electrode 16 and the oxide film 24 as masks. An oxide film is shaped into a diffusion window by the gate electrode 16, and an n type layer 25 as well as n type sources 14 are formed, employing the oxide film and the gate electrode 16 as masks. The surface of the gate electrode 16 is coated with an oxide film 17, a hole is bored to a contact section in the gate electrode 16, and a source electrode 18 and a metallic gate electrode 19 are shaped. An a-Si film is deposited on the whole surface of an element, and a resistive field plate film 27 is formed. A drain electrode 20 is shaped onto the surface of a wafer. Accordingly, the element having high reliability can be acquired through a simple process.
    • 100. 发明专利
    • Thyristor with function of protecting over-voltage
    • 具有保护过电压功能的THYRISTOR
    • JPS59167061A
    • 1984-09-20
    • JP4074483
    • 1983-03-14
    • Toshiba Corp
    • OOHASHI HIROMICHIYOSHIDA JIROUYAMAGUCHI YOSHIHIROAKAGI JIYUNKO
    • H01L29/74H01L29/861
    • H01L29/7424
    • PURPOSE:To obtain a large strength of di/dt by increasing the value of non destructive breakdown current at junction bending part by a method wherein the P type second base layers divided into two are provided on the N type first base layer, and, when the P-N junction is exposed to the surface on cathode electrode side while bending devided ends, the surface of the first base layer positioned between the divided ends is covered with a P type layer. CONSTITUTION:The N type first base layer 12 is laminated on a P type emitter layer 11 provided with an anode electrode 15 on the back surface, the P-N junction J2 is generted by providing the P type second base layers 13 divided into two on said base layer, and the function bending parts 100 are provided at the divided ends. In this construction, the surface layer part of the layer 12 positioned between the bending parts 100 ie kept covered with the P type region 30, and a pluraity of N type emitter regions 14 are diffusion-formed in these thyristor regions divided into two, respectively, which emitters are then isolated by means of a shallow P type layer 140 connected to the region 30. Thereafter, cathode electrodes 16 are adhered on the regions 14.
    • 目的:通过在N型第一基底层上设置分为两部分的P型第二基底层的方法,通过增加接合弯曲部分的非破坏性击穿电流的值来获得较大的di / dt强度, PN结暴露于阴极电极侧的表面,同时弯曲的端部,位于分开的端部之间的第一基底层的表面被P +型层覆盖。 构成:N型第一基底层12层叠在背面设置有阳极电极15的P型发射极层11上,PN结J2通过在所述基底上设置分为两部分的P型第二基底层13 层,功能弯曲部100设置在分割端。 在这种结构中,位于被保持覆盖有P +型区域30的弯曲部分100之间的层12的表面层部分和N型发射极区域14的一部分在这些可控硅区域中被扩散形成, 两个,然后通过连接到区域30的浅P +型层140隔离这些发射体。之后,阴极电极16粘附在区域14上。