专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

91. 发明专利

JPS6457599A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS6457599A
公开(公告)日：1989-03-03
申请号：JP21281087
申请日：1987-08-28
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUZUKI KOJI , KUROSAWA YUKIO
IPC分类号： H01G4/12 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/24 , H05G2/00
摘要： PURPOSE:To increase the rising steepness or the discharge current and obtain strong X-ray emission by laminating a bank of capacitors, with multiple ceramic capacitors sandwiched by parallel conductor plates and flat faces of the conductor plates aligned in the nearly vertical direction to the ground. CONSTITUTION:Ceramic capacitors 20 are sandwiched between low-voltage conductor plates 21 and high-voltage conductor plates 22. After the ceramic capacitor 20 is charged, if a discharge switch 4 is turned on, charges of the ceramic capacitor 20 are quickly discharged between electrodes 11, 12. This circuit serves as a distributed constant circuit at this time, charges of the ceramic capacitor 20a at the position with the shortest electric path to a discharge tube reach between the electrodes 11, 12 first, and charges of ceramic capacitors 20b, 20c...20h flow in sequence after the fixed delay time. Since the electric path is practically shortened, the discharge current wave-form with a short rising time is obtained. As a result, the magnetic force necessary to pinch the plasma between the electrodes 11, 12 is strong, the heating temperature is increased, thus a strong X-ray output can be obtained.

92. 发明专利

JPS63284744A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS63284744A
公开(公告)日：1988-11-22
申请号：JP11705687
申请日：1987-05-15
申请人： HITACHI LTD
发明人： SUZUKI KOJI , ARITA HIROSHI , TOKUYAMA SHUNJI , KUROSAWA YUKIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/02
摘要： PURPOSE:To make it possible to obtain a plasma X-ray source with high brightness, long service life and large freedom in wave length selection by making the inside of a discharge vessel vacuum while providing a switching means outside a discharge circuit and also forming either of electrodes with X-ray generating material. CONSTITUTION:A switching means is sealed inside an electrode 1 positioned at the center of a vessel through an insulating material 11 and formed with a trigger electrode 12 drawn to the outside and a trigger pulse source 13 provided between the trigger electrode 12 and an electrode 1. Then, the inside of a discharge vessel 4 is exhausted in vacuum through an exhaust hole 14 and maintained at high vacuum degree. An X-ray material having a desired wave length is used for faced electrodes 1 and 2. Since discharge is generated on the faced electrodes with a switching means provided outside the discharge circuit, a switching means inside the discharge circuit is eliminated so that a large current with high speed pulse is obtained. Therefore, it is possible to generate X-ray with high brightness, eliminate the deterioration of the insulating material and prolong the service life in the plasma X-ray source.

93. 发明专利

JPS63136447A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS63136447A
公开(公告)日：1988-06-08
申请号：JP28176286
申请日：1986-11-28
申请人： HITACHI LTD
发明人： SUZUKI KOJI , ARITA HIROSHI , KUROSAWA YUKIO , HIRASAWA KUNIO
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To facilitate the replacing of an electrode or the supplying of a X-ray generating material without requiring the welding of an X-ray generating electrode's fusing metal and an electrifying conductor by inserting a sublimated conductor into a part of electrode electrification paths. CONSTITUTION:A X-ray generating electrode 15 made of molybdenum or the like and an electrifying conductor 17 made of copper or the like are respectively screw jointed with a sublimated conductor 16 made of carbon or the like. Thus, no welding is required at the junction parts of the electrode 15 and the conductor 17, so that only the electrode 15 can be replaced when the electrode 15 is consumed. Therefore, the replacing of the electrode and the supplying of the X-ray generating material are facilitated.

94. 发明专利

JPS6388795A PLASMA X-RAY SOURCE 失效
公开(公告)号：JPS6388795A
公开(公告)日：1988-04-19
申请号：JP23118086
申请日：1986-10-01
申请人： HITACHI LTD
发明人： ARITA HIROSHI , SUZUKI KOJI , KUROSAWA YUKIO , HIRASAWA KUNIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To make it possible to acquire a powerful X-ray output, by making a capacitor bank to place plural ceramic capacitors to a parallel conductive plate in a sandwich form, forming a circuit from at least one place of the parallel plate to make a unit, and connecting plural units in parallel. CONSTITUTION:When a discharge switch 4 is turened on after a ceramic capacitor 20 is charged, the charge of the ceramic capacitor 20 is discharged immediately between electrodes 11 and 12. In this case, this circuit is made into a distribution constant circuit, and the charge of a ceramic capacitor 20a whose circuit to a discharge tube is shortest reaches first between the electrodes 11 and 12. After a specific delay time, the charges of ceramic capacitors 20b, 20c... 20h flow in in order, and so a discharge current wave-form of a fast starting time can be obtained. Therefore, the magnetic power to pinch the plasma between the electrodes 11 and 12 is strong enough, the heating temperature is high enough, and a powerful X-ray output can be acquired.

95. 发明专利

JPS62195836A X-RAY GENERATOR 失效
公开(公告)号：JPS62195836A
公开(公告)日：1987-08-28
申请号：JP3743786
申请日：1986-02-24
申请人： HITACHI LTD
发明人： SUZUKI KOJI , ARITA HIROSHI , KUROSAWA YUKIO , HIRASAWA KUNIO , WATANABE YOSHIO
IPC分类号： H01L21/30 , H01J35/06 , H01J35/22 , H01L21/027
摘要： PURPOSE:To obtain a stable and high brightness X-ray source, by making the curvature radius or the size of the top of the cathode side electrode of a pair of electrodes smaller than that of the anode side. CONSTITUTION:A pair of opposing electrodes 7 and 8 are furnished in a vacuum container 1, and an outside switch 9 is arranged. For both electrodes 7 and 8, an X-ray generating substance of a high melting point, such as tungsten or molybdenum is used, the top of the positive side electrode 7 is made spherical while a conical electrode is used for the negative side electrode 8, and the curvature radius of the anode side electrode is made larger than that of the cathode side. A capacitor 5 is charged by a charger 4, a desired voltage in ON through the switch 9, generating a discharge between the opposing electrodes 7 and 8, and a special X-rays can be produced according to the material of the electrodes. Therefore, a stable discharge with little consumption of the electrodes is gained, and an X-ray source to bear a high frequency of use and to generate a high brightness and stable X-rays is realized.

96. 发明专利

JPS62180940A X-RAY GENERATING DEVICE 失效
公开(公告)号：JPS62180940A
公开(公告)日：1987-08-08
申请号：JP2193686
申请日：1986-02-05
申请人： HITACHI LTD
发明人： SUZUKI KOJI , ARITA HIROSHI , KUROSAWA YUKIO , HIRASAWA KUNIO , WATANABE YOSHIO , KATO YASUO
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To obtain high contrast, by heating solid sulfur at normal temperature and utilizing characteristics in sulfur vapor pressure to supply the sulfur vapor into a vacuumized container. CONSTITUTION:First, solid sulfur 26 is put into a container 24 and a valve 23 is opened to exhaust the container 24 and a discharge tube 3 through an exhaust port 27. Then, a valve 23 is closed and heaters 18 and 25 are powered to heat the insides of the container 24 and the discharge tube 3. For example, heating temperature is controlled at 200 deg.C or so, the sulfur 26 inside the container 24 partially becomes gas and liquid states. When the valve 23 is opened in these states, the sulfur 26 inside the discharge tube 3 becomes vapor to be put into the tube 3. Thus, either method considered as a lithography X-ray source is applicable to obtain high contrast.

97. 发明专利

JPS62145633A PLASMA X-RAY RADIATION SOURCE DEVICE 失效
公开(公告)号：JPS62145633A
公开(公告)日：1987-06-29
申请号：JP28726885
申请日：1985-12-20
申请人： HITACHI LTD
发明人： KUROSAWA YUKIO , SUZUKI KOJI , ARITA HIROSHI , HIRASAWA KUNIO , WATANABE YOSHIO
IPC分类号： H05G2/00 , G03F7/20 , H01J35/22 , H01L21/027
摘要： PURPOSE:To prevent an X-rays taking out window from damaging owing to high energy charged particles, by providing a magnetic field generating means connected to a power source for generating X-rays in front of an X-rays transmission hole provided at an electrode in the travelling direction of the X-rays, and generating a magnetic field orthogonal to an X-rays taking out channel. CONSTITUTION:A magnetic field generating means 56 of loop shape is disposed under a cathode 22, one end of the magnetic field generating means 56 is connected to the cathode 22 so as to be formed integrally with the cathode 22, and the other end thereof is connected to a great electric current power source 48. And the magnetic field generating means 56 is made of a pair of loops which are on the both sides of the transmission channel (taking out channel) of characteristic X-rays 34 and almost parallel to a plane containing the taking out channel of the characteristic X-rays 34, and generates a magnetic field phiorthogonal to the taking out channel of the characteristic X-rays 34 when currents (i) are conducted. Thus, the orbit of high energy charged particles in plasma can be curved surely, and the high energy charged particles impact directly against an X-rays taking out window 40, so that the X-rays taking out window 40 can be prevented from damaging.

98. 发明专利

JPS61101942A X-ray source 失效
标题翻译： X射线源
公开(公告)号：JPS61101942A
公开(公告)日：1986-05-20
申请号：JP22213684
申请日：1984-10-24
申请人： Hitachi Ltd
发明人： ARITA HIROSHI , KUROSAWA YUKIO , HIRASAWA KUNIO , NATSUI KENICHI , WATANABE YOSHIO
IPC分类号： H01J35/22 , G03F7/20 , H01L21/027 , H05G2/00
CPC分类号： H05G2/003
摘要： PURPOSE:To acquire an X-ray source to generate a desirable X-ray stable for a long period of time, by adding a metallic layer of low resistivity on the surface of a high vacuum container. CONSTITUTION:On the side plate 1 and on the surface of the cylinder 2 of a vacuum container 4 is spread or contacted a metal of low resistivity (Cu or Ag for example) 16 and 17. When a switch 11 is closed and voltage of capacitor 8 is applied to the electrodes 5 and 6, a pulse discharge is generated between the electrodes 5 and 6, and X-ray 14 is generated from plasma by the Z pinch effect then. The generated X-ray is lead to an exposure room through a permeable window 15. Since an impulse current circuit necessary for the Z pinch effect can be formed through the metallic layers 16 and 17, and moreover, the frequency of the impulse discharge current is about 200kHz-1MHz, the skin effect is large and the layers 16 and 17 is effective enough with a thickness of coating level.
摘要翻译：目的：通过在高真空容器的表面添加低电阻率的金属层，获取X射线源以产生长期稳定的期望的X射线。构成：在侧板1和真空容器4的气缸2的表面上扩散或接触低电阻金属（例如Cu或Ag）16和17.当开关11闭合并且电容器的电压 8被施加到电极5和6，在电极5和6之间产生脉冲放电，然后通过Z夹紧效应从等离子体产生X射线14。所产生的X射线通过渗透窗15导致暴露室。由于可以通过金属层16和17形成Z夹紧效应所需的脉冲电流电路，此外，脉冲放电电流的频率为约200kHz-1MHz，皮肤效果大，层16和17的涂层水平厚度足够有效。

99. 发明专利

JPS61101028A X-ray lithographic apparatus 失效
标题翻译： X射线光刻机
公开(公告)号：JPS61101028A
公开(公告)日：1986-05-19
申请号：JP22210284
申请日：1984-10-24
申请人： Hitachi Ltd
发明人： ARITA HIROSHI , HIRASAWA KUNIO , KUROSAWA YUKIO , NATSUI KENICHI , WATANABE YOSHIO
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F7/70808 , H01L21/30
摘要： PURPOSE:To reduce X-ray absorption rate by providing means for producing X-ray in opposite direction to gas flow from a nozzle, thereby suppressing the gas density between Z-pinch and a transparent window to low density. CONSTITUTION:A nozzle 23 capable of blowing coaxial gas to an electrode 2 is provided, and a hole 24 is formed at the center. The nozzle 23 is connected through a gas tube 22 to a high pressure bomb. An X-ray transmission window 6 is formed under the electrode 2, and a hole 13 for inputting gas flow from the nozzle 23 is formed at the center of opposite electrode 1. With this construc tion, the gas density of the hole 24 can be maintained in low density. According ly, X-ray absorption rate by gas can be reduced. Since supersonic gas flow does not collide directly with the window 6, the durability of the window can be increased.
摘要翻译：目的：通过提供与喷嘴的气流相反的方向产生X射线的方法来降低X射线吸收率，从而抑制Z-pinch与透明窗口之间的气体密度低密度。构成：能够将同轴气体吹送到电极2的喷嘴23，在中心形成有孔24。喷嘴23通过气体管22连接到高压弹。在电极2的下方形成有X射线透过窗6，在对置电极1的中央形成有用于输入来自喷嘴23的气体流的孔13，通过该结构，能够使孔24的气体密度保持低密度。据了解，可以减少气体的X射线吸收率。由于超音速气流不直接与窗口6碰撞，所以可以提高窗户的耐久性。

100. 发明专利

JPS6120332A X-ray generating device and x-ray lithography equipment using same 失效
标题翻译： X射线发生装置和X射线光刻设备
公开(公告)号：JPS6120332A
公开(公告)日：1986-01-29
申请号：JP14259084
申请日：1984-07-09
申请人： Hitachi Ltd
发明人： NATSUI KENICHI , KUROSAWA YUKIO , HIRASAWA KUNIO , ARITA HIROSHI
IPC分类号： G03F7/20 , H01J35/00 , H01L21/027 , H05G1/00 , H05G2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033
摘要： PURPOSE:To obtain a soft X-ray generating device of high strength, less variation in strength and the position for generating X-ray, and a long life by generating a high-temperature plasma from a theta pinch to generate a characteristic X-ray. CONSTITUTION:By making a switch 51 according to a command of a starting device 52 to flow a high-frequency large current to a theta pinch 41 and a plasma 53 is pinch-produced in the central part of the coil 41. By making a switch 56, according to a command of starting device 57, a voltage is applied to the plasma 53 through electrodes 42 and 43 to flow an electric current. A temperature of electrons of the pinched plasma 53 increases and a soft X-ray of a specified wave length determined by the enclosed gas in a container 2 is emitted. The soft X-ray is led to a lithography device 20 through a window 48 made of beryllium. Then patterning of an X-ray mask 23 is transferred as a latent image on an X-ray resist 25 formed on a surface of a semiconductor substrate 24 such a silicon wafer.
摘要翻译：目的：为了获得高强度，强度变化小，产生X射线位置的软X射线产生装置，并且通过从θ夹紧产生高温等离子体而产生长寿命，以产生特征X射线。构成：通过根据起动装置52的指令制作开关51，使高频大电流流向θ夹头41，并且等离子体53在线圈41的中心部分产生。通过开关如图56所示，根据启动装置57的指令，通过电极42和43将电压施加到等离子体53以使电流流动。夹持等离子体53的电子温度升高，并且发射由容器2中的封闭气体确定的规定波长的软X射线。软X射线通过由铍制成的窗口48引导到光刻设备20。然后将X射线掩模23的图案作为潜像转印到形成在诸如硅晶片的半导体衬底24的表面上的X射线抗蚀剂25上。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式