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    • 3. 发明专利
    • ELEMENT TESTING METHOD
    • JPH07174813A
    • 1995-07-14
    • JP34467893
    • 1993-12-21
    • SONY TEKTRONIX CORP
    • KATO KATSUHISAONOZAWA TOSHIHIKOEBISAWA AKIRAUSUDA KOICHI
    • G01R31/26
    • PURPOSE:To recognize the contact condition of terminals of an element to be tested, and surely carry out a characteristic test by applying prescribed voltage to terminals for a signal channel and testing whether the detected voltage is the prescribed voltage or not. CONSTITUTION:Each terminal of an insulated gate bipolar transistor(IGBT) 10, an element to be tested, is so put as to be brought into contact with a terminal of a testing apparatus. Electric continuity of an emitter fourth terminal (a terminal for a signal channel) 22 and a gate return terminal 26 is checked. In a processing apparatus 52, a voltage generating circuit 32 supplied prescribed voltage to the terminal 26 and at the same time, a differential amplifier 44 controls as to amplify only the voltage of an input terminal connected to the terminal 22 of a resistor 34. When the value computed from the output signal of an ADC (A/D converter) 46 corresponds to the prescribed voltage supplied to the terminal 26, the terminals 26, 22 are electrically continued. When the value does not corresponds to the voltage, they are not electrically continued and the abnormality is displayed. Successively, following the processing procedure stored in the apparatus 52, prior testing is carried out to check the contact condition of each terminal of the IGBT 10 with each corresponding terminal.
    • 8. 发明专利
    • ELEMENT CHARACTERISTIC TESTING DEVICE
    • JPH07294592A
    • 1995-11-10
    • JP11189194
    • 1994-04-28
    • SONY TEKTRONIX CORP
    • KATO KATSUHISAONOZAWA TOSHIHIKOMUROFUSHI TATSUYA
    • G01R31/26H01L21/66H01L29/78
    • PURPOSE:To provide an element characteristic testing device which is less affected by the contact resistance between contact terminals. CONSTITUTION:The device is provided with a first contact terminal 28 which is in contact with a first terminal 16 which is one terminal of the main current path of an element 10 to be tested and where a main current flows to the first terminal 16, a second contact terminal 22 which is in contact with a second terminal 14 which is the other terminal of the main current part of the element 10 to be tested and where the main current flows, a third contact terminal 18 which is in contact with a third terminal 12 which is the control terminal of the element 10 to be tested and where a control current flows, a fourth contact terminal 26 which is in contact with the second terminal 14 of the element 10 to be tested and where a control current flows, and a control signal source 32 which is connected between the third and fourth contact terminals 18 and 26, thus preventing and erroneous voltage due to the large current of the main current path and the contact resistance of the contact terminal from being generated.